AMAT Applied Materials 0100-01066離子體檢測組件
1.產(chǎn) 品 資 料 介 紹：
- 設(shè)備適配：匹配 AMAT 半導體等離子體工藝設(shè)備（如干法蝕刻機、PECVD 沉積機臺），用于真空腔室內(nèi)等離子體狀態(tài)的實時監(jiān)測，適配 300mm 晶圓制造的蝕刻、薄膜沉積工序。
- 工藝兼容：聚焦射頻等離子體（13.56MHz/27.12MHz 常用頻段）檢測場景，兼容硅、金屬、介電質(zhì)等不同晶圓材料的等離子體加工工藝，可與設(shè)備射頻電源、腔室控制系統(tǒng)聯(lián)動。
- 核心功能：實現(xiàn)等離子體密度、電子溫度、離子能量等關(guān)鍵參數(shù)的精準檢測，當參數(shù)偏離工藝閾值時觸發(fā)報警，保障蝕刻速率均勻性、薄膜沉積質(zhì)量，避免晶圓報廢。
- 檢測精度：等離子體密度測量范圍 10?-1012 cm?3，誤差≤±5%；電子溫度測量范圍 0.5-5eV，誤差≤±0.1eV；離子能量分辨率 0.1eV，可捕捉等離子體微小參數(shù)波動。
- 響應性能：參數(shù)采樣頻率≥10Hz，數(shù)據(jù)輸出延遲≤100ms，支持 “實時監(jiān)測 + 歷史數(shù)據(jù)存儲” 雙模式，存儲容量可記錄≥72 小時工藝參數(shù)，便于工藝追溯與異常分析。
- 信號兼容：支持以太網(wǎng)（100Mbps）、RS-485 數(shù)字信號輸出，可接入 AMAT 設(shè)備 PLC 系統(tǒng)與 SmartFactory 良率管理平臺，實現(xiàn)等離子體參數(shù)的遠程監(jiān)控與工藝配方優(yōu)化。
- 防護設(shè)計：檢測探頭采用氧化鋁陶瓷絕緣外殼（耐等離子體腐蝕壽命≥5000 小時），探頭表面經(jīng) Y?O?涂層處理；主體模塊防護等級 IP65，防粉塵、防車間清潔潑濺，內(nèi)部電路具備抗電磁干擾（EMI）設(shè)計。
- 安裝適配：采用法蘭式安裝（適配 DN40/DN50 標準真空法蘭），可直接嵌入腔室側(cè)壁，探頭伸入深度可調(diào)（0-50mm），適配不同尺寸腔室的等離子體分布區(qū)域；接線端子帶真空密封設(shè)計（漏率≤1×10?? Pa?m3/s）。
- 操作便利：配備 2.0 英寸 LCD 顯示屏，實時顯示等離子體核心參數(shù)與模塊工作狀態(tài)；支持通過物理按鍵本地校準探頭，也可通過專用軟件遠程更新固件，無需拆解腔室。
AMAT Applied Materials 0100-01066離子體檢測組件 英文資料：
1. Adaptation scenarios and functions (0100-01066)
Equipment adaptation: Matched with AMAT semiconductor plasma process equipment (such as dry etching machine, PECVD deposition machine), used for real-time monitoring of plasma state in vacuum chambers, suitable for etching and thin film deposition processes in 300mm wafer manufacturing.
Process compatibility: Focusing on RF plasma (commonly used frequency bands of 13.56MHz/27.12MHz) detection scenarios, compatible with plasma processing processes of different wafer materials such as silicon, metal, and dielectric, and can be linked with equipment RF power supply and chamber control system.
Core function: Accurate detection of key parameters such as plasma density, electron temperature, and ion energy. When the parameters deviate from the process threshold, an alarm is triggered to ensure the uniformity of etching rate, film deposition quality, and avoid wafer scrap.
2. Accuracy and Performance (0100-01066)
Detection accuracy: Plasma density measurement range is 10 ? -10 12 cm ? 3, with an error of ≤± 5%; The electronic temperature measurement range is 0.5-5eV, with an error of ≤± 0.1eV; the ion energy resolution is 0.1eV, which can capture small fluctuations in plasma parameters.
Response performance: Parameter sampling frequency ≥ 10Hz, data output delay ≤ 100ms, supports "real-time monitoring+historical data storage" dual-mode, storage capacity can record process parameters for ≥ 72 hours, facilitating process traceability and anomaly analysis.
Signal compatibility: Supports Ethernet (100Mbps), RS-485 digital signal output, and can be connected to AMAT equipment PLC system and SmartFactory yield management platform to achieve remote monitoring of plasma parameters and process formulation optimization.
3. Structure and Protection (0100-01066)
Protection design: The detection probe adopts an aluminum oxide ceramic insulation shell (with a plasma corrosion resistance life of ≥ 5000 hours), and the probe surface is treated with Y ? O3 coating; The main module has a protection level of IP65, which is dust-proof and workshop cleaning splash proof. The internal circuit is designed to resist electromagnetic interference (EMI).
Installation adaptation: Adopting flange installation (compatible with DN40/DN50 standard vacuum flanges), it can be directly embedded into the chamber side wall, and the probe can be inserted into the depth adjustable (0-50mm) to adapt to the plasma distribution area of different sizes of chambers; The wiring terminal is designed with vacuum sealing (leakage rate ≤ 1 × 10 ?? Pa · m 3/s).
Easy to operate: equipped with a 2.0-inch LCD display screen, real-time display of plasma core parameters and module working status; Support local calibration of probes through physical buttons, and remote firmware updates through dedicated software without disassembling the chamber.
AMAT Applied Materials 0100-01066離子體檢測組件 產(chǎn)品展示
產(chǎn)品視頻
3.其他產(chǎn)品
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ANYBUS ABDT-PDP 3183203131 mechanical module
EMBEDDED EPCDFBA#219 B2 Robot module
EMBEDDED EPCPCRA#136 B5 Robot module
| PCE845-XYZ-F | AMAT 0100-09068 | MC-TAMR03 |
| PCE845-XYZ-A | AMAT 0100-03378 | MC-TAIH14 |
| PCE843-001-T | AMAT 0100-20335 | MC-TAIH13 |
| PCE843-001-N | 6134-6SC71-7 | MC-TAIH12 |
| PCE843-001-F | 6SC6620-0AA01 | MC-TAIH04 |
| PCE843-001-A |  6SC6100-0GC10 | MC-TAIH23 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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