AMAT Applied Materials 600369自動(dòng)溫度控制器
1.產(chǎn) 品 資 料 介 紹：
- 設(shè)備適配：匹配 AMAT 半導(dǎo)體工藝設(shè)備（如 CVD 沉積腔室、蝕刻機(jī)加熱模塊），用于晶圓加工中腔室壁、反應(yīng)托盤、加熱管等部件的溫度精準(zhǔn)控制，適配 300mm 晶圓制造全流程。
- 工藝兼容：聚焦高潔凈、高溫工藝場(chǎng)景，兼容薄膜沉積（如金屬、介電質(zhì)沉積）、晶圓退火等需穩(wěn)定溫控的工序，可與 AMAT 設(shè)備主控系統(tǒng)聯(lián)動(dòng)，實(shí)現(xiàn)工藝溫度時(shí)序化調(diào)節(jié)。
- 核心功能：實(shí)現(xiàn)多區(qū)域溫度的實(shí)時(shí)監(jiān)測(cè)、自動(dòng)調(diào)節(jié)與異常報(bào)警，保障工藝溫度穩(wěn)定性，避免溫度波動(dòng)導(dǎo)致的晶圓薄膜厚度不均、蝕刻速率異常等問(wèn)題。
- 控溫精度：溫度控制范圍 - 50-500℃，控溫誤差≤±0.1℃（200-400℃核心區(qū)間），溫度分辨率 0.01℃，適配 3x 納米制程對(duì)工藝溫度的嚴(yán)苛要求。
- 響應(yīng)性能：溫度采樣頻率≥10Hz，加熱 / 制冷調(diào)節(jié)響應(yīng)時(shí)間≤1s，支持 PID 自整定算法，可自動(dòng)補(bǔ)償環(huán)境溫度、負(fù)載變化對(duì)控溫的影響，連續(xù)運(yùn)行無(wú)溫漂。
- 輸出能力：支持多路模擬量輸出（4-20mA），可驅(qū)動(dòng)加熱棒、制冷器等執(zhí)行元件，單路最大輸出功率≤5kW，適配不同加熱模塊的功率需求。
- 防護(hù)設(shè)計(jì)：外殼采用工業(yè)級(jí)阻燃金屬材質(zhì)，防護(hù)等級(jí) IP65，防粉塵、防車間清潔潑濺；內(nèi)部電路具備防靜電（ESD）、防電磁干擾（EMI）設(shè)計(jì)，通過(guò) EN 55032 Class B 電磁兼容測(cè)試。
- 安裝適配：緊湊型結(jié)構(gòu)（尺寸約 180×100×60mm），支持面板嵌入式 / 導(dǎo)軌式安裝，適配設(shè)備控制柜內(nèi)有限空間；接線端子帶防呆標(biāo)識(shí)與螺絲鎖固，避免振動(dòng)導(dǎo)致的接線松動(dòng)。
- 操作便利：配備 2.4 英寸 LCD 顯示屏，支持中文 / 英文界面切換，可直觀顯示實(shí)時(shí)溫度、設(shè)定值、報(bào)警信息；自帶物理按鍵，支持本地參數(shù)設(shè)置，也可通過(guò) RS-485 接口遠(yuǎn)程調(diào)控。
AMAT Applied Materials 600369自動(dòng)溫度控制器 英文資料：
1. Adaptation scenarios and functions (600369)
Equipment adaptation: Matched with AMAT semiconductor process equipment (such as CVD deposition chambers, etching machine heating modules), used for precise temperature control of chamber walls, reaction trays, heating tubes, and other components in wafer processing, suitable for the entire process of 300mm wafer manufacturing.
Process compatibility: Focusing on high cleanliness and high temperature process scenarios, it is compatible with processes that require stable temperature control such as thin film deposition (such as metal and dielectric deposition) and wafer annealing. It can be linked with the AMAT equipment main control system to achieve sequential adjustment of process temperature.
Core function: Real time monitoring, automatic adjustment, and abnormal alarm of temperature in multiple areas, ensuring process temperature stability and avoiding problems such as uneven thickness of wafer thin films and abnormal etching rates caused by temperature fluctuations.
2. Accuracy and Performance (600369)
Temperature control accuracy: Temperature control range -50-500 ℃, temperature control error ≤ ± 0.1 ℃ (core range of 200-400 ℃), temperature resolution 0.01 ℃, suitable for the strict temperature requirements of 3x nanometer processes.
Response performance: Temperature sampling frequency ≥ 10Hz, heating/cooling adjustment response time ≤ 1s, supports PID self-tuning algorithm, can automatically compensate for the impact of environmental temperature and load changes on temperature control, continuous operation without temperature drift.
Output capability: Supports multi-channel analog output (4-20mA), can drive actuators such as heating rods and refrigerators, with a maximum output power of ≤ 5kW per channel, suitable for the power requirements of different heating modules.
3. Structure and Protection (600369)
Protection design: The shell is made of industrial grade flame-retardant metal material, with a protection level of IP65, and is resistant to dust and workshop cleaning splashes; The internal circuit is designed with anti-static (ESD) and electromagnetic interference (EMI) protection, and has passed the EN 55032 Class B electromagnetic compatibility test.
Installation adaptation: Compact structure (size approximately 180 × 100 × 60mm), supporting panel embedded/rail mounted installation, suitable for limited space inside equipment control cabinets; The wiring terminals are equipped with anti misoperation signs and screw locks to prevent loose wiring caused by vibration.
Easy to operate: equipped with a 2.4-inch LCD display screen, supporting Chinese/English interface switching, can intuitively display real-time temperature, set values, and alarm information; Comes with physical buttons, supports local parameter settings, and can also be remotely controlled through RS-485 interface.
AMAT Applied Materials 600369自動(dòng)溫度控制器 產(chǎn)品展示
產(chǎn)品視頻
3.其他產(chǎn)品
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| PFTL101B | AMAT 0100-90139 | PFRL101D 5KN |
| PFRL101D | AMAT 0100-00642 | PFTL 101BE-2.0KN |
| PFRL101C | AMAT 0100-09292 | PFTL 201CE-50.0KN |
| PFRL101B | AMAT 0100-00069 | PFTL 101BER-5.0KN |
| PFRL101A | AMAT 0100-35170 | PFTL 101AER-0.5 |
| PFEL113 | AMAT 0100-90861 | PFTL101A-1.0KN 3BSE004166R1 1.0KN |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
