AMAT Applied Materials 0010-68129閥門組件
1.產(chǎn) 品 資 料 介 紹：
- 設(shè)備適配：匹配 AMAT 半導(dǎo)體工藝設(shè)備（如 CVD 沉積、蝕刻機(jī)臺），用于真空腔室的氣體 / 液體控制，適配反應(yīng)氣體輸送、清洗液循環(huán)、真空抽排等管路系統(tǒng)。
- 工藝兼容：聚焦高潔凈、高真空場景，適配 1×10?3 - 1×10?? Pa 真空區(qū)間，兼容半導(dǎo)體制造中硅烷、氨氣、氟化物等腐蝕性 / 易燃易爆氣體，避免工藝污染。
- 核心功能：實現(xiàn)管路介質(zhì)的精準(zhǔn)通斷與流量調(diào)節(jié)，配合設(shè)備主控系統(tǒng)控制介質(zhì)輸送時序，保障薄膜沉積、蝕刻等工序的工藝穩(wěn)定性。
- 控制精度：閥門開度調(diào)節(jié)精度 ±2%，開關(guān)響應(yīng)時間≤200ms，泄漏率≤1×10?? Pa?m3/s（氦質(zhì)譜檢測），確保高真空環(huán)境下無介質(zhì)泄漏，適配 3x 納米制程要求。
- 結(jié)構(gòu)性能：采用隔膜式密封結(jié)構(gòu)（膜片材質(zhì)為全氟橡膠 FFKM），耐溫范圍 - 20-200℃，耐壓≤1.0MPa，長期使用無老化變形，使用壽命超 8000 次開關(guān)循環(huán)。
- 驅(qū)動方式：支持氣動驅(qū)動（工作氣壓 0.4-0.8MPa），可通過 4-20mA 信號實現(xiàn)開度比例控制，適配 AMAT 設(shè)備 PLC 系統(tǒng)的遠(yuǎn)程調(diào)控需求。
- 防護(hù)設(shè)計：閥體采用 316L 不銹鋼材質(zhì)（表面粗糙度 Ra≤0.8μm），內(nèi)壁經(jīng)電解拋光處理，無顆粒殘留，符合半導(dǎo)體 Class 1 潔凈標(biāo)準(zhǔn)；外部配備防塵罩，適配潔凈車間環(huán)境。
- 安裝適配：采用卡套式 / 法蘭式連接（接口規(guī)格 1/4"- 1/2"），支持管路快速拆裝，適配設(shè)備內(nèi)部緊湊空間，安裝同軸度誤差≤0.1mm，避免管路應(yīng)力導(dǎo)致的密封失效。
- 維護(hù)便利：內(nèi)置可拆卸過濾芯（孔徑 5μm），可單獨清洗更換；配備位置反饋傳感器，通過 LED 指示燈顯示閥門開關(guān)狀態(tài)，便于快速排查卡滯、泄漏等故障。
AMAT Applied Materials 0010-68129閥門組件 英文資料：
1. Adaptation scenarios and functions (0010-68129)
Equipment adaptation: Matching AMAT semiconductor process equipment (such as CVD deposition and etching machines) for gas/liquid control in vacuum chambers, adapting to pipeline systems such as reaction gas transportation, cleaning solution circulation, and vacuum pumping.
Process compatibility: Focusing on high cleanliness and high vacuum scenarios, suitable for 1 × 10 ?3 -1 × 10 ?? Pa vacuum range, compatible with corrosive/flammable and explosive gases such as silane, ammonia, fluoride, etc. in semiconductor manufacturing, avoiding process pollution.
Core function: Achieve precise on/off and flow regulation of pipeline media, cooperate with the equipment main control system to control the timing of media transportation, and ensure the process stability of thin film deposition, etching and other processes.
2. Accuracy and Performance (0010-68129)
Control accuracy: Valve opening adjustment accuracy ± 2%, switch response time ≤ 200ms, leakage rate ≤ 1 × 10 ?? Pa · m 3/s (helium mass spectrometry detection), ensuring no medium leakage in high vacuum environment, suitable for 3x nanometer process requirements.
Structural performance: Adopting diaphragm type sealing structure (diaphragm material is perfluororubber FFKM), temperature resistance range -20-200 ℃, pressure resistance ≤ 1.0MPa, long-term use without aging deformation, service life exceeding 8000 switching cycles.
Drive mode: Supports pneumatic drive (working pressure 0.4-0.8MPa), can achieve opening ratio control through 4-20mA signal, suitable for remote control requirements of AMAT equipment PLC system.
3. Structure and Protection (0010-68129)
Protection design: The valve body is made of 316L stainless steel material (surface roughness Ra ≤ 0.8 μ m), and the inner wall is treated with electrolytic polishing, with no particle residue, meeting the semiconductor Class 1 cleanliness standard; Equipped with an external dust cover, suitable for clean workshop environment.
Installation and adaptation: Adopting sleeve/flange connection (interface specification 1/4 "-1/2"), supporting quick disassembly and assembly of pipelines, adapting to the compact space inside the equipment, with installation coaxiality error ≤ 0.1mm, avoiding sealing failure caused by pipeline stress.
Easy maintenance: Built in detachable filter element (pore size 5 μ m), can be cleaned and replaced separately; Equipped with position feedback sensors, the valve switch status is displayed through LED indicator lights, making it easy to quickly troubleshoot faults such as jamming and leakage.
AMAT Applied Materials 0010-68129閥門組件 產(chǎn)品展示
產(chǎn)品視頻
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4.其他英文產(chǎn)品
Honeywell SC-UCMX01 51307198-175 module
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IDPG 940128102 Control card
| PMA22B-01100-22 | AMAT 0100-35279 | PFTL101A-1.0KN 3BSE004166R1 |
| PMA22B-01100-00 | AMAT 0100-77043 | PFTL 101AER-1.0KN |
| PMA22B-00100-00 | AMAT 0100-00060 | PFTL-101A 3BSE008508R1 |
| PMA21B-10100-00 | AMAT 0100-00059 | PFEA112-65 |
| PMA21B-01100-00 | ANAT 0100-76091 | PFRL101A |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
