LAM 839-019090-620靜電夾 

1.產(chǎn) 品 資 料 介 紹：

中文資料：

839-019090-620 是 LAM Research 生產(chǎn)的一款靜電夾（Electrostatic Chuck，ESC），主要用于半導(dǎo)體制造過(guò)程中硅片的夾持和固定。

主要特點(diǎn)：

• 高精度夾持： 通過(guò)靜電力精確固定硅片，確保在加工過(guò)程中硅片的穩(wěn)定性和位置精度。
• 廣泛應(yīng)用： 適用于化學(xué)氣相沉積（CVD）、物理氣相沉積（PVD）、刻蝕（Etching）等半導(dǎo)體制造工藝。
• 高可靠性： 設(shè)計(jì)用于滿足半導(dǎo)體制造環(huán)境的高要求，具有優(yōu)異的耐用性和穩(wěn)定性。

應(yīng)用領(lǐng)域：

該靜電夾廣泛應(yīng)用于半導(dǎo)體制造行業(yè)，特別是在以下工藝中：

• 化學(xué)氣相沉積（CVD）： 用于在硅片表面沉積薄膜。
• 物理氣相沉積（PVD）： 用于在硅片表面沉積金屬或其他材料。
• 刻蝕（Etching）： 用于在硅片上刻蝕圖案。

維護(hù)與更換：

長(zhǎng)期使用可能導(dǎo)致靜電夾性能下降，定期檢查和更換該模塊可以確保半導(dǎo)體制造過(guò)程的穩(wěn)定性和高效運(yùn)行。

英文資料：

839-019090-620 is an electrostatic chuck (ESC) produced by LAM Research, mainly used for clamping and fixing silicon wafers in the semiconductor manufacturing process.

Main features:

High precision clamping: By precisely fixing the silicon wafer with electrostatic force, the stability and positional accuracy of the silicon wafer are ensured during the processing.

Widely applicable: Suitable for semiconductor manufacturing processes such as chemical vapor deposition (CVD), physical vapor deposition (PVD), etching, etc.

High reliability: designed to meet the high requirements of semiconductor manufacturing environments, with excellent durability and stability.

Application areas:

This electrostatic clamp is widely used in the semiconductor manufacturing industry, especially in the following processes:

Chemical Vapor Deposition (CVD): Used for depositing thin films on the surface of silicon wafers.

Physical Vapor Deposition (PVD): Used for depositing metals or other materials on the surface of silicon wafers.

Etching: Used for etching patterns on silicon wafers.

Maintenance and replacement:

Long term use may lead to a decrease in the performance of the electrostatic clamp. Regular inspection and replacement of this module can ensure the stability and efficient operation of the semiconductor manufacturing process.

2.產(chǎn)      品      展      示      

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