MKS AX8410-28HC發(fā)電機(jī)模塊
1.產(chǎn) 品 資 料 介 紹：
中文資料：
MKS AX8410-28HC 是 MKS Instruments 生產(chǎn)的一款高功率激勵(lì)系統(tǒng)控制器模塊，主要用于等離子體處理和薄膜沉積等應(yīng)用。
主要特點(diǎn)：
- 高功率輸出： 提供高達(dá) 10 kW 的功率輸出，滿(mǎn)足大功率等離子體處理和薄膜沉積的需求。
- 寬頻率范圍： 支持從 10 kHz 到 100 MHz 的頻率范圍，適應(yīng)不同的工藝要求。
- 高效率： 采用先進(jìn)的功率轉(zhuǎn)換技術(shù)，提供高效率的能量傳輸，降低能耗。
- 精確控制： 配備精確的功率和頻率控制功能，確保工藝過(guò)程的穩(wěn)定性和一致性。
應(yīng)用領(lǐng)域：
該激勵(lì)系統(tǒng)控制器廣泛應(yīng)用于以下領(lǐng)域：
- 半導(dǎo)體制造： 用于薄膜沉積、刻蝕和其他等離子體處理工藝。
- 材料科學(xué)： 用于研究和開(kāi)發(fā)新材料的薄膜沉積和表面處理。
- 光伏產(chǎn)業(yè)： 用于太陽(yáng)能電池的薄膜沉積和表面處理。
- 顯示技術(shù)： 用于液晶顯示器和有機(jī)發(fā)光二極管（OLED）的制造過(guò)程。
維護(hù)與更換：
長(zhǎng)期使用可能導(dǎo)致模塊性能下降，定期檢查和更換該模塊可以確保工藝過(guò)程的穩(wěn)定性和高效運(yùn)行。
英文資料：
MKS AX8410-28HC is a high-power excitation system controller module produced by MKS Instruments, mainly used for applications such as plasma treatment and thin film deposition.
Main features:
High power output: Provides up to 10 kW of power output to meet the needs of high-power plasma processing and thin film deposition.
Wide frequency range: Supports a frequency range from 10 kHz to 100 MHz to meet different process requirements.
High efficiency: Adopting advanced power conversion technology to provide efficient energy transmission and reduce energy consumption.
Precise control: equipped with precise power and frequency control functions to ensure the stability and consistency of the process.
Application areas:
This incentive system controller is widely used in the following fields:
Semiconductor manufacturing: used for thin film deposition, etching, and other plasma treatment processes.
Materials Science: Used for researching and developing thin film deposition and surface treatment of new materials.
Photovoltaic industry: used for thin film deposition and surface treatment of solar cells.
Display technology: used in the manufacturing process of liquid crystal displays and organic light-emitting diodes (OLEDs).
Maintenance and replacement:
Long term use may lead to a decrease in module performance. Regular inspection and replacement of the module can ensure the stability and efficient operation of the process.
2.產(chǎn) 品 展 示
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