AMAT Applied Materials 0190-48491適配器
1.產(chǎn) 品 資 料 介 紹:
- 多維度信號傳輸能力:支持電力分配與高頻信號同步傳輸,適配沉積、蝕刻等制程中模塊間的實時數(shù)據(jù)交互需求,信號延遲控制在微秒級,滿足晶圓加工的高精度控制要求。
- 跨系列設(shè)備兼容設(shè)計:遵循 AMAT 設(shè)備接口通用規(guī)范,可直接匹配 Endura? PVD、Producer? CVD 及 Centura? 蝕刻等多系列主力設(shè)備,無需額外接口轉(zhuǎn)換模塊,降低設(shè)備集成復(fù)雜度。
- 第三方系統(tǒng)適配靈活:針對半導(dǎo)體產(chǎn)線的傳感器、檢測儀器等第三方設(shè)備,具備信號協(xié)議兼容能力,可實現(xiàn)與 AMAT 主機系統(tǒng)的無縫對接,提升產(chǎn)線設(shè)備協(xié)同效率。
- 寬域溫濕度適應(yīng):采用耐高低溫元器件封裝技術(shù),工作溫度覆蓋 - 20℃~85℃,濕度耐受范圍 0%~95%(非凝露),可適應(yīng)沉積制程的高溫腔室周邊環(huán)境與潔凈車間的恒溫恒濕要求。
- 高真空密封防護:具備符合半導(dǎo)體行業(yè)標(biāo)準(zhǔn)的真空密封等級,搭配特制密封墊圈(推測采用低釋氣性材料),在 10??Pa 高真空環(huán)境下可維持穩(wěn)定性能,避免密封失效導(dǎo)致的設(shè)備故障。
- 抗腐蝕與抗干擾設(shè)計:外殼采用陽極氧化處理的鋁合金材質(zhì),可耐受蝕刻制程中常見的腐蝕性氣體殘留;內(nèi)部電路采用屏蔽層包裹,能抵御設(shè)備運行中的電磁干擾,信號傳輸誤碼率低于 0.001%。
AMAT Applied Materials 0190-48491適配器 英文資料:
1、 Process level functional adaptability: precise matching of semiconductor equipment requirements
As an interface component designed by AMAT specifically for high-end process equipment, its core features are reflected in multifunctional integration adaptation and device compatibility:
Multi dimensional signal transmission capability: supports power distribution and synchronous transmission of high-frequency signals, adapts to real-time data exchange requirements between modules in processes such as deposition and etching, and controls signal delay in microseconds to meet high-precision control requirements for wafer processing.
Cross series device compatibility design: Following the AMAT device interface universal specification, it can directly match Endura ? PVD、Producer ? CVD and Centura ? Etching and other main equipment series, without the need for additional interface conversion modules, reduce the complexity of equipment integration.
Flexible adaptation of third-party systems: For third-party equipment such as sensors and detection instruments in semiconductor production lines, it has signal protocol compatibility and can achieve seamless integration with AMAT host systems, improving the collaborative efficiency of production line equipment.
2、 Strict environmental tolerance: suitable for semiconductor extreme working conditions
Relying on AMAT's precision manufacturing process, the adapter's ability to operate stably in extreme environments has become its core advantage:
Wide range temperature and humidity adaptation: Adopting high and low temperature resistant component packaging technology, the working temperature covers -20 ℃~85 ℃, and the humidity tolerance range is 0%~95% (non condensing), which can adapt to the high-temperature chamber environment of the deposition process and the constant temperature and humidity requirements of the clean workshop.
High vacuum sealing protection: It has a vacuum sealing level that meets the standards of the semiconductor industry, and is equipped with special sealing gaskets (presumably made of low release materials). It can maintain stable performance in a high vacuum environment of 10 ?? Pa, avoiding equipment failure caused by sealing failure.
Anti corrosion and anti-interference design: The shell is made of anodized aluminum alloy material, which can withstand corrosive gas residues commonly found in etching processes; The internal circuit is wrapped in a shielding layer, which can resist electromagnetic interference during equipment operation, and the signal transmission error rate is less than 0.001%.
AMAT Applied Materials 0190-48491適配器 產(chǎn)品展示

產(chǎn)品視頻
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| 745-W3-P5-G5-HI-A | 8030-RIM-125 | 8030-HQM-521 |
| 745-W3-P155-G5-HI-A-L-E-H | 8030-ROM-121 | 46088608 |
| 745-W2-P5-G5-HI-R-T | 8030-RIM-731 | 6AV3971-1BA01-0CA0 |
| 745-W2-P5-G5-HI-A-R-E | 8030-RIM-361 | 6AV35151MA201AA0 |
| 745-W2-P5-G5-HI-AR | 8030-RIM-123 | 710-609995-002 |
| 745-W2-P5-G5-HI-A-L-R-E | 8030-RIM-121 | X-AI 32 02 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218


