AMAT Applied Materials  03-81723-00電機(jī)驅(qū)動(dòng)器總成模塊

1.產(chǎn) 品 資 料 介 紹：

產(chǎn)品應(yīng)用領(lǐng)域

1. 半導(dǎo)體制造設(shè)備運(yùn)動(dòng)控制

   • 應(yīng)用于 AMAT 的沉積（CVD、PVD）、刻蝕、離子注入等工藝設(shè)備。

   • 負(fù)責(zé)驅(qū)動(dòng)設(shè)備內(nèi)部的電機(jī)，完成精準(zhǔn)的機(jī)械運(yùn)動(dòng)控制。

2. 晶圓搬運(yùn)與傳輸系統(tǒng)

   • 在晶圓由加載端到工藝腔體、再到卸載端的傳輸過(guò)程中，電機(jī)驅(qū)動(dòng)器控制搬運(yùn)機(jī)械臂的旋轉(zhuǎn)、升降與抓取動(dòng)作。

   • 保證晶圓在真空腔體或大氣環(huán)境中穩(wěn)定、無(wú)顆粒污染地傳輸。

3. 閥門與真空腔門的啟閉控制

   • 用于驅(qū)動(dòng)腔體的開關(guān)閥門、滑板門（Slit Valve）等機(jī)械部件。

   • 確保腔體之間真空隔離或工藝切換時(shí)的高可靠啟閉動(dòng)作。

4. 晶圓對(duì)準(zhǔn)與旋轉(zhuǎn)系統(tǒng)

   • 應(yīng)用于晶圓定向器（Orienter）和旋轉(zhuǎn)臺(tái)，幫助晶圓在工藝前進(jìn)行方向和位置的精確對(duì)準(zhǔn)。

5. 載片盒與工藝托盤機(jī)構(gòu)

   • 控制晶圓載片盒的進(jìn)出、定位和搬運(yùn)。

   • 驅(qū)動(dòng)器為托盤、夾具等部件提供運(yùn)動(dòng)動(dòng)力，實(shí)現(xiàn)自動(dòng)化裝卸片功能。

AMAT Applied Materials 03-81723-00電機(jī)驅(qū)動(dòng)器總成模塊 英文資料：

Product application areas

Motion Control of Semiconductor Manufacturing Equipment

Applied to AMAT's deposition (CVD, PVD), etching, ion implantation and other process equipment.

Responsible for driving the internal motors of the equipment and achieving precise mechanical motion control.

Wafer Handling and Transport System

During the transfer of wafers from the loading end to the process chamber and then to the unloading end, the motor driver controls the rotation, lifting, and gripping actions of the handling robotic arm.

Ensure stable and particle free transfer of wafers in vacuum chambers or atmospheric environments.

Opening and closing control of valves and vacuum chamber doors

Mechanical components such as switch valves and slide valves used to drive the chamber.

Ensure highly reliable opening and closing actions during vacuum isolation or process switching between chambers.

Wafer Alignment and Rotation System

Applied to wafer orienters and rotary tables, it helps to accurately align the direction and position of wafers before processing.

Carrier box and process tray mechanism

Control the entry, exit, positioning, and handling of wafer carriers.

The driver provides motion power for components such as trays and fixtures, achieving automated loading and unloading functions.

AMAT Applied Materials 03-81723-00電機(jī)驅(qū)動(dòng)器總成模塊 產(chǎn)品展示      

 產(chǎn)品視頻

3.其他產(chǎn)品

HORNER ELECTRIC HE693ADC420隔離模擬電流輸入模塊
Horner Electric HE693MPXCBL適配器電纜
Horner Electric HE693THM884M輸入模塊

4.其他英文產(chǎn)品

ALSTOM AH116-2 Control card
ALSTOM AS111-1 Control card
YOKOGAWA ATK4A-00 terminal

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218