AMAT  0010-20498電源供應(yīng)模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT 0010-20498 電源供應(yīng)模塊

產(chǎn)品概述

AMAT（Applied Materials）0010-20498 電源供應(yīng)模塊是一種用于半導(dǎo)體制造設(shè)備的 關(guān)鍵電力供應(yīng)單元。它負(fù)責(zé)為設(shè)備內(nèi)部的控制器、加熱器、泵浦、氣動(dòng)閥門(mén)、射頻模塊、傳感器及其他子模塊提供穩(wěn)定、高可靠的電源，保證設(shè)備持續(xù)、精確運(yùn)行。該模塊通常安裝于控制箱或底盤(pán)，是設(shè)備正常運(yùn)行和工藝穩(wěn)定的核心組成部分。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 輸入電源：工業(yè)標(biāo)準(zhǔn)交流電

• 輸出類(lèi)型：直流或交流多路輸出，可調(diào)

• 額定功率：適配高功率工藝模塊使用

• 保護(hù)功能：過(guò)流保護(hù)、過(guò)壓保護(hù)、短路保護(hù)

• 接口類(lèi)型：與設(shè)備控制系統(tǒng)、互鎖模塊及下游模塊連接

• 安裝方式：模塊化設(shè)計(jì)，便于安裝、維護(hù)和現(xiàn)場(chǎng)更換

• 環(huán)境適應(yīng)性：耐高溫、耐振動(dòng)，適應(yīng)半導(dǎo)體設(shè)備潔凈室環(huán)境

應(yīng)用場(chǎng)景

1. 控制器與底盤(pán)控制箱供電

   • 為控制器、PCB、互鎖模塊及其他電子模塊提供穩(wěn)定電源

   • 保證設(shè)備核心控制系統(tǒng)正常運(yùn)行

2. 沉積工藝（CVD/PVD/ALD）

   • 為加熱器、泵浦、氣體閥門(mén)提供高精度電源

   • 支持薄膜沉積工藝的溫度和流量控制

3. 刻蝕工藝設(shè)備

   • 為射頻模塊、壓力傳感器及流量控制模塊供電

   • 確保刻蝕功率及氣體控制穩(wěn)定

4. 離子注入系統(tǒng)

   • 為離子源、掃描系統(tǒng)及束流監(jiān)測(cè)模塊提供電力

   • 確保注入劑量和均勻性

5. 工廠自動(dòng)化與安全系統(tǒng)

   • 與互鎖及監(jiān)控系統(tǒng)聯(lián)動(dòng)，實(shí)現(xiàn)設(shè)備異常斷電保護(hù)

   • 提高操作安全性與工藝連續(xù)性

AMAT   0010-20498電源供應(yīng)模塊 英文資料：

AMAT 0010-20498 Power Supply Module

Product Overview

AMAT (Applied Materials) 0010-20498 power supply module is a critical power supply unit used in semiconductor manufacturing equipment. It is responsible for providing stable and highly reliable power to the internal controllers, heaters, pumps, pneumatic valves, RF modules, sensors, and other sub modules of the equipment, ensuring continuous and precise operation of the equipment. This module is usually installed in the control box or chassis and is a core component for the normal operation and process stability of the equipment.

Technical parameters (typical direction, specific data should refer to the original factory information)

Input power supply: Industrial standard AC power

Output type: DC or AC multi-channel output, adjustable

Rated power: Suitable for use with high-power process modules

Protection functions: overcurrent protection, overvoltage protection, short circuit protection

Interface type: Connected to device control system, interlock module, and downstream module

Installation method: Modular design for easy installation, maintenance, and on-site replacement

Environmental adaptability: high temperature resistance, vibration resistance, suitable for semiconductor equipment cleanroom environment

Application scenarios

Controller and chassis control box power supply

For the controller PCB、 Interlocking modules and other electronic modules provide stable power supply

Ensure the normal operation of the core control system of the equipment

Deposition process (CVD/PVD/ALD)

Provide high-precision power supply for heaters, pumps, and gas valves

Temperature and flow control supporting thin film deposition process

Etching process equipment

Power supply for RF module, pressure sensor, and flow control module

Ensure stable etching power and gas control

Ion implantation system

Provide power for ion source, scanning system, and beam monitoring module

Ensure injection dose and uniformity

Factory Automation and Safety Systems

Linkage with interlocking and monitoring systems to achieve equipment abnormal power-off protection

Improve operational safety and process continuity

AMAT   0010-20498電源供應(yīng)模塊 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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