AMAT 0010-70415氣動箱

1.產 品 資 料 介 紹：

AMAT 0010-70415 氣動箱

產品概述

AMAT（Applied Materials）0010-70415 氣動箱是一種用于半導體制造設備的 氣動控制與分配單元。它集成了氣動閥門、管路接口、調壓器和執(zhí)行元件，用于為設備內部各子模塊（如氣動互鎖、氣動閥門、泵浦和機械動作部件）提供穩(wěn)定的壓縮氣體供應和控制。氣動箱確保設備氣動系統(tǒng)安全可靠地運行，同時支持工藝操作、維護和自動化控制。

技術參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 氣源類型：壓縮空氣或惰性氣體

• 控制方式：氣動或電控氣動閥驅動

• 接口：多路氣體輸出接口，可連接氣動執(zhí)行模塊

• 內部組件：氣動閥、調壓器、過濾器、傳感器接口

• 安裝方式：模塊化設計，可集成于設備底盤或控制箱

• 環(huán)境適應性：耐高壓、耐振動，適應潔凈室及工業(yè)環(huán)境

應用場景

1. 沉積工藝（CVD/PVD/ALD）

   • 提供反應腔體或工藝模塊所需氣動操作

   • 支持氣體閥門精確控制和腔體壓力調節(jié)

2. 刻蝕工藝設備

   • 控制氣動閥門和腔體開關動作

   • 保證刻蝕工藝參數(shù)穩(wěn)定

3. 互鎖系統(tǒng)與安全控制

   • 配合互鎖模塊，實現(xiàn)門鎖、閥門安全控制

   • 防止設備在不安全狀態(tài)下操作

4. 控制箱與底盤系統(tǒng)

   • 作為氣動系統(tǒng)的核心分配單元

   • 為各子模塊提供穩(wěn)定的氣動驅動

5. 工廠自動化與維護

   • 支持遠程氣動控制、設備狀態(tài)監(jiān)控

   • 提高設備操作安全性和維護效率

AMAT  0010-70415氣動箱 英文資料：

AMAT 0010-70415 Pneumatic Box

Product Overview

AMAT (Applied Materials) 0010-70415 pneumatic box is a pneumatic control and distribution unit used in semiconductor manufacturing equipment. It integrates pneumatic valves, pipeline interfaces, regulators, and actuators to provide stable compressed gas supply and control for various sub modules within the equipment, such as pneumatic interlocks, pneumatic valves, pumps, and mechanical action components. The pneumatic box ensures the safe and reliable operation of the equipment's pneumatic system, while supporting process operation, maintenance, and automation control.

Technical parameters (typical direction, specific data should refer to the original factory information)

Gas source type: Compressed air or inert gas

Control mode: Pneumatic or electrically controlled pneumatic valve drive

Interface: Multi channel gas output interface, capable of connecting pneumatic execution modules

Internal components: pneumatic valve, regulator, filter, sensor interface

Installation method: Modular design, can be integrated into the equipment chassis or control box

Environmental adaptability: resistant to high pressure and vibration, suitable for clean rooms and industrial environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide pneumatic operations required for reaction chambers or process modules

Support precise control of gas valves and chamber pressure regulation

Etching process equipment

Control the action of pneumatic valves and chamber switches

Ensure stable etching process parameters

Interlocking system and safety control

Cooperate with the interlock module to achieve safe control of door locks and valves

Prevent equipment from operating in an unsafe state

Control box and chassis system

As the core allocation unit of the pneumatic system

Provide stable pneumatic drive for each submodule

Factory Automation and Maintenance

Support remote pneumatic control and equipment status monitoring

Improve equipment operation safety and maintenance efficiency

AMAT  0010-70415氣動箱 產品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218