AMAT  3930-01083控制器

1.產(chǎn) 品 資 料 介 紹：

AMAT 3930-01083 控制器

產(chǎn)品概述

AMAT（Applied Materials）3930-01083 控制器是一種用于半導體制造設備的 核心電子控制單元。它負責設備各子模塊（如加熱器、泵浦、氣動閥門、射頻模塊、傳感器等）的協(xié)調運行與工藝控制，實現(xiàn)工藝參數(shù)的精確調節(jié)和設備狀態(tài)的監(jiān)控。該控制器通常集成在控制箱或底盤中，是設備自動化運行和工藝穩(wěn)定性的關鍵模塊。

技術參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 處理能力：支持多路模塊并行控制

• 接口類型：數(shù)字/模擬輸入輸出接口，兼容 AMAT 各類子模塊

• 通信能力：支持與上位控制系統(tǒng)及互鎖模塊的數(shù)據(jù)通信

• 控制功能：邏輯運算、工藝調節(jié)、狀態(tài)監(jiān)控

• 安裝方式：模塊化設計，可集成于控制箱或底盤

• 環(huán)境適應性：適應半導體設備潔凈室及工業(yè)溫度環(huán)境

應用場景

1. 沉積工藝（CVD/PVD/ALD）

   • 控制加熱器溫度、氣體流量和泵浦壓力

   • 保證薄膜沉積均勻性和工藝重復性

2. 刻蝕工藝設備

   • 控制射頻功率模塊、刻蝕氣體流量及腔體壓力

   • 提高刻蝕精度和工藝穩(wěn)定性

3. 離子注入系統(tǒng)

   • 控制離子源、掃描系統(tǒng)及束流監(jiān)測模塊

   • 確保注入劑量和均勻性

4. 控制箱與底盤控制箱

   • 作為設備內(nèi)部各模塊的核心控制單元

   • 與電源模塊、互鎖模塊、PCB等配合實現(xiàn)設備安全可靠運行

5. 工廠自動化與遠程監(jiān)控

   • 與上位系統(tǒng)和互鎖系統(tǒng)聯(lián)動，實現(xiàn)設備狀態(tài)監(jiān)控、數(shù)據(jù)采集和異常報警

AMAT 3930-01083控制器 英文資料：

AMAT 3930-01083 Controller

Product Overview

The AMAT (Applied Materials) 3930-01083 controller is a core electronic control unit used in semiconductor manufacturing equipment. It is responsible for the coordinated operation and process control of various sub modules of the equipment (such as heaters, pumps, pneumatic valves, RF modules, sensors, etc.), achieving precise adjustment of process parameters and monitoring of equipment status. This controller is usually integrated into the control box or chassis and is a key module for equipment automation operation and process stability.

Technical parameters (typical direction, specific data should refer to the original factory information)

Processing capability: Supports parallel control of multiple modules

Interface type: digital/analog input/output interface, compatible with various sub modules of AMAT

Communication capability: Supports data communication with the upper control system and interlock module

Control functions: logic operation, process adjustment, status monitoring

Installation method: Modular design, can be integrated into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and industrial temperature environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Control heater temperature, gas flow rate, and pump pressure

Ensure the uniformity of thin film deposition and process repeatability

Etching process equipment

Control RF power module, etching gas flow rate, and chamber pressure

Improve etching accuracy and process stability

Ion implantation system

Control ion source, scanning system, and beam monitoring module

Ensure injection dose and uniformity

Control box and chassis control box

As the core control unit of each module inside the device

Cooperate with power modules, interlock modules, PCBs, etc. to achieve safe and reliable operation of equipment

Factory Automation and Remote Monitoring

Linkage with the upper system and interlocking system to achieve equipment status monitoring, data collection, and abnormal alarm

AMAT 3930-01083控制器 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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