AMAT  DIP-280-015互鎖模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT DIP-280-015 互鎖模塊

產(chǎn)品概述

AMAT（Applied Materials）DIP-280-015 互鎖模塊是一種用于半導(dǎo)體制造設(shè)備的 安全控制與互鎖單元。它通過(guò)邏輯互鎖和信號(hào)監(jiān)控，確保設(shè)備在運(yùn)行、維護(hù)或異常情況下能夠安全操作?；ユi模塊主要用于防止腔體、控制箱或關(guān)鍵工藝模塊在不安全狀態(tài)下被開(kāi)啟或操作，從而保護(hù)設(shè)備、工藝和操作人員安全。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 控制方式：邏輯互鎖，支持硬件和電子信號(hào)輸入

• 接口類(lèi)型：數(shù)字輸入/輸出接口，可與設(shè)備控制系統(tǒng)和安全系統(tǒng)連接

• 信號(hào)類(lèi)型：狀態(tài)檢測(cè)、門(mén)鎖信號(hào)、故障報(bào)警

• 安裝方式：模塊化，可集成于控制箱或底盤(pán)

• 環(huán)境適應(yīng)性：耐高溫、耐振動(dòng)，適應(yīng)半導(dǎo)體設(shè)備潔凈室環(huán)境

應(yīng)用場(chǎng)景

1. 設(shè)備腔體安全控制

   • 防止反應(yīng)腔、真空腔或加工模塊在異常狀態(tài)下開(kāi)啟

   • 保證工藝過(guò)程和人員操作安全

2. 控制箱與底盤(pán)控制箱安全保護(hù)

   • 監(jiān)控控制箱門(mén)、模塊鎖狀態(tài)

   • 與設(shè)備控制系統(tǒng)聯(lián)動(dòng)，實(shí)現(xiàn)異常停機(jī)或報(bào)警

3. 沉積工藝（CVD/PVD/ALD）

   • 在沉積腔體維護(hù)或操作時(shí)提供安全互鎖

   • 防止誤操作引發(fā)設(shè)備損壞或工藝異常

4. 刻蝕工藝設(shè)備

   • 對(duì)刻蝕腔體和氣動(dòng)系統(tǒng)進(jìn)行安全互鎖

   • 保證設(shè)備運(yùn)行期間操作安全

5. 工廠自動(dòng)化與安全管理

   • 與上位控制系統(tǒng)結(jié)合，實(shí)現(xiàn)遠(yuǎn)程監(jiān)控和安全管理

   • 提供設(shè)備狀態(tài)指示和異常報(bào)警功能

AMAT   DIP-280-015互鎖模塊 英文資料：

AMAT DIP-280-015 Interlock Module

Product Overview

The AMAT (Applied Materials) DIP-280-015 interlock module is a safety control and interlock unit used in semiconductor manufacturing equipment. It ensures safe operation of equipment during operation, maintenance, or abnormal situations through logical interlocking and signal monitoring. Interlocking modules are mainly used to prevent cavities, control boxes, or critical process modules from being opened or operated in an unsafe state, thereby protecting the safety of equipment, processes, and operators.

Technical parameters (typical direction, specific data should refer to the original factory information)

Control mode: Logic interlock, supporting hardware and electronic signal input

Interface type: Digital input/output interface, can be connected to device control system and security system

Signal types: status detection, door lock signal, fault alarm

Installation method: modular, can be integrated into the control box or chassis

Environmental adaptability: high temperature resistance, vibration resistance, suitable for semiconductor equipment cleanroom environment

Application scenarios

Equipment cavity safety control

Prevent the reaction chamber, vacuum chamber, or processing module from opening in abnormal conditions

Ensure the safety of the process and personnel operation

Control box and chassis control box safety protection

Monitor the status of control box doors and module locks

Integrate with the equipment control system to achieve abnormal shutdown or alarm

Deposition process (CVD/PVD/ALD)

Provide safety interlocks during maintenance or operation of sedimentation chambers

Prevent equipment damage or process abnormalities caused by misoperation

Etching process equipment

Safely interlock the etching chamber and pneumatic system

Ensure safe operation during equipment operation

Factory Automation and Safety Management

Combining with the upper control system to achieve remote monitoring and safety management

Provide device status indication and abnormal alarm function

AMAT  DIP-280-015互鎖模塊 產(chǎn)品展示      

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