AMAT  0100-09026通信模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT 0100-09026 通信模塊

產(chǎn)品概述

AMAT（Applied Materials）0100-09026 通信模塊是一種用于半導體制造設備的 數(shù)據(jù)傳輸與網(wǎng)絡接口模塊。它負責設備內(nèi)部控制器、傳感器、執(zhí)行模塊與上位控制系統(tǒng)（如工廠自動化系統(tǒng)或監(jiān)控系統(tǒng)）之間的數(shù)據(jù)通信，確保工藝參數(shù)、設備狀態(tài)和監(jiān)控信息的實時交換。該模塊是實現(xiàn)設備聯(lián)網(wǎng)、遠程監(jiān)控和自動化管理的重要組件。

技術參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 通信類型：工業(yè)標準網(wǎng)絡協(xié)議（如Ethernet/IP、RS-232/485等）

• 數(shù)據(jù)速率：適應實時工藝數(shù)據(jù)傳輸需求

• 接口：多路輸入/輸出接口，支持設備內(nèi)部模塊和上位系統(tǒng)連接

• 控制方式：通過控制器或上位系統(tǒng)進行數(shù)據(jù)交換和管理

• 安裝方式：模塊化設計，便于集成到控制箱或底盤

• 環(huán)境適應性：適應半導體設備潔凈室及工業(yè)溫度范圍

應用場景

1. 沉積工藝（CVD/PVD/ALD）

   • 實現(xiàn)加熱器、泵浦、氣體閥門、傳感器與控制器之間的數(shù)據(jù)通信

   • 支持工藝參數(shù)實時監(jiān)控和調(diào)節(jié)

2. 刻蝕工藝設備

   • 連接射頻模塊、流量控制模塊和壓力傳感器

   • 提供穩(wěn)定的數(shù)據(jù)通路，保證刻蝕工藝精度

3. 離子注入系統(tǒng)

   • 數(shù)據(jù)傳輸離子源、掃描系統(tǒng)及束流監(jiān)測模塊

   • 確保注入劑量和均勻性可控

4. 控制箱與底盤控制箱

   • 作為設備內(nèi)部網(wǎng)絡通信的核心節(jié)點

   • 支持模塊間協(xié)調(diào)運行和遠程監(jiān)控

5. 工廠自動化與安全管理

   • 與上位系統(tǒng)、互鎖系統(tǒng)和監(jiān)控平臺集成

   • 實現(xiàn)遠程操作、數(shù)據(jù)記錄和異常報警

AMAT  0100-09026通信模塊 英文資料：

AMAT 0100-09026 Communication Module

Product Overview

AMAT (Applied Materials) 0100-09026 communication module is a data transmission and network interface module used in semiconductor manufacturing equipment. It is responsible for data communication between the internal controllers, sensors, execution modules, and upper control systems (such as factory automation systems or monitoring systems) of the equipment, ensuring real-time exchange of process parameters, equipment status, and monitoring information. This module is an important component for implementing device networking, remote monitoring, and automated management.

Technical parameters (typical direction, specific data should refer to the original factory information)

Communication type: Industrial standard network protocol (such as Ethernet/IP, RS-232/485, etc.)

Data rate: Suitable for real-time process data transmission requirements

Interface: Multi channel input/output interface, supporting connection between internal modules of the device and the upper system

Control method: Data exchange and management through the controller or upper system

Installation method: Modular design, easy to integrate into the control box or chassis

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and industrial temperature ranges

Application scenarios

Deposition process (CVD/PVD/ALD)

Realize data communication between heaters, pumps, gas valves, sensors, and controllers

Support real-time monitoring and adjustment of process parameters

Etching process equipment

Connect the RF module, flow control module, and pressure sensor

Provide a stable data path to ensure the accuracy of the etching process

Ion implantation system

Data transmission ion source, scanning system, and beam monitoring module

Ensure controllable injection dose and uniformity

Control box and chassis control box

As the core node for internal network communication of the device

Support coordinated operation and remote monitoring between modules

Factory Automation and Safety Management

Integrate with the upper system, interlock system, and monitoring platform

Implement remote operation, data recording, and abnormal alarm

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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