AMAT  0226-31128信號燈模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT 0226-31128 信號燈模塊

產(chǎn)品概述

AMAT（Applied Materials）0226-31128 信號燈模塊是一種用于半導(dǎo)體制造設(shè)備的 狀態(tài)指示與報警模塊。它通過不同顏色的燈光顯示設(shè)備或工藝狀態(tài)，如運(yùn)行、故障、待機(jī)或維護(hù)狀態(tài)。信號燈模塊可與控制系統(tǒng)和互鎖系統(tǒng)集成，實(shí)現(xiàn)直觀的視覺反饋，幫助操作人員快速識別設(shè)備狀態(tài)，提升工藝安全性和操作效率。

技術(shù)參數(shù)（典型方向，具體數(shù)據(jù)需參考原廠資料）

• 指示類型：多色燈光顯示（常見紅、黃、綠）

• 控制方式：通過控制系統(tǒng)或互鎖信號驅(qū)動

• 接口：兼容設(shè)備控制系統(tǒng)的數(shù)字或模擬輸出

• 安裝方式：模塊化，可固定在控制箱、設(shè)備面板或關(guān)鍵位置

• 環(huán)境適應(yīng)性：適應(yīng)潔凈室及工業(yè)環(huán)境，耐高溫和振動

應(yīng)用場景

1. 沉積工藝（CVD/PVD/ALD）

   • 顯示設(shè)備運(yùn)行狀態(tài)或工藝階段

   • 提示操作人員薄膜沉積過程中的異?；蚓?/p>

2. 刻蝕工藝設(shè)備

   • 指示刻蝕腔體或氣體流量控制模塊狀態(tài)

   • 提醒維護(hù)人員注意工藝異常

3. 離子注入系統(tǒng)

   • 實(shí)時顯示注入模塊或掃描系統(tǒng)狀態(tài)

   • 輔助操作人員快速判斷注入過程是否正常

4. 控制箱與底盤控制箱

   • 提供整體設(shè)備或子模塊的狀態(tài)指示

   • 與互鎖系統(tǒng)聯(lián)動，實(shí)現(xiàn)安全提示和異常報警

5. 工廠自動化與安全管理

   • 可作為遠(yuǎn)程監(jiān)控和可視化管理的一部分

   • 提高操作安全性和工藝管理效率

AMAT  0226-31128信號燈模塊  英文資料：

AMAT 0226-31128 Signal Light Module

Product Overview

AMAT (Applied Materials) 0226-31128 signal light module is a status indication and alarm module used in semiconductor manufacturing equipment. It displays the device or process status, such as running, fault, standby, or maintenance status, through lights of different colors. The signal light module can be integrated with the control system and interlock system to achieve intuitive visual feedback, helping operators quickly identify equipment status and improve process safety and operational efficiency.

Technical parameters (typical direction, specific data should refer to the original factory information)

Indication type: multi-color light display (commonly red, yellow, green)

Control method: driven by control system or interlock signal

Interface: Compatible with digital or analog outputs of device control systems

Installation method: Modular, can be fixed in control boxes, equipment panels, or key positions

Environmental adaptability: Suitable for clean rooms and industrial environments, resistant to high temperatures and vibrations

Application scenarios

Deposition process (CVD/PVD/ALD)

Display device operating status or process stage

Notify operators of abnormalities or warnings during the thin film deposition process

Etching process equipment

Indicate the status of the etching chamber or gas flow control module

Remind maintenance personnel to pay attention to process abnormalities

Ion implantation system

Real time display of injection module or scanning system status

Assist operators in quickly determining whether the injection process is normal

Control box and chassis control box

Provide status indication of the overall device or submodule

Linkage with the interlocking system to achieve security alerts and abnormal alarms

Factory Automation and Safety Management

Can be used as part of remote monitoring and visual management

Improve operational safety and process management efficiency

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