AMAT Applied Materials  0100-03012傳感器加熱器控制模塊

1.產 品 資 料 介 紹：

AMAT Applied Materials  0100-03012傳感器加熱器控制模塊 英文資料：

1、 High precision temperature control: ensuring stable operation of sensors

As the "temperature control core" of semiconductor device sensors, the 0100-03012 sensor heater control module focuses on precise temperature control, providing a stable working temperature environment for temperature sensitive sensors (such as pressure sensors and gas sensors) to avoid temperature fluctuations affecting sensor measurement accuracy

Wide range temperature control and high adjustment accuracy

Support temperature control range -20 ℃~200 ℃, adaptable to the temperature control needs of different types of sensors in semiconductor devices - such as gas detection sensors in low-temperature environments (requiring a constant temperature of 50 ℃), pressure sensors in high-temperature process areas (requiring a constant temperature of 120 ℃); Adopting PID closed-loop control algorithm, the temperature regulation accuracy reaches ± 0.1 ℃, and the temperature fluctuation range is ≤± 0.2 ℃, ensuring stable operation of the sensor at the set temperature and avoiding measurement errors caused by temperature drift (such as pressure measurement error ≤± 0.5% F.S.).

Multi channel independent temperature control capability

Integrate 4-6 independent temperature control channels (depending on the configuration), each channel can be individually set with target temperature, heating power, and control parameters. The isolation between channels is ≥ 2500V AC, and multiple sensor heaters can be powered and temperature controlled simultaneously - for example, one channel controls the pressure sensor heater in the wafer transfer area, and two channels control the gas sensor heater in the etching chamber, without interfering with each other; The maximum heating power of a single channel can be adjusted from 50W to 200W, and can be flexibly matched according to the power requirements of the sensor heater, avoiding energy waste caused by temperature control lag due to insufficient power or excessive power.

Rapid heating and dynamic response

Using high-frequency PWM (pulse width modulation) heating control method, the heating response time is ≤ 100ms, which can quickly compensate for temperature deviation caused by environmental temperature changes in the sensor - for example, when the temperature in the clean room fluctuates by 5 ℃, the module can adjust the sensor temperature back to the set value within 1 second; Equipped with high-precision temperature sensors (such as PT100 platinum resistors, with a measurement accuracy of ± 0.1 ℃), with a sampling frequency of ≥ 10Hz, providing real-time feedback on the temperature of the sensor heater to ensure timely dynamic response of the temperature control system, without overshoot or underadjustment.

AMAT Applied Materials  0100-03012傳感器加熱器控制模塊 產品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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