AMAT Applied Materials 0100-01691高壓氣體聯(lián)鎖模塊
1.產(chǎn) 品 資 料 介 紹：
- 設(shè)備適配：匹配 AMAT 半導(dǎo)體工藝設(shè)備（如 CVD 沉積、蝕刻機(jī)臺）的高壓氣體管路系統(tǒng)，用于硅烷、氨氣、氟化物等危險氣體的安全管控，適配 300mm 晶圓制造的氣體輸送鏈路。
- 工藝兼容：聚焦高壓氣體（0.5-10MPa）的安全使用場景，兼容半導(dǎo)體薄膜沉積、等離子蝕刻等需高壓氣體參與的工序，可與設(shè)備氣體控制柜、緊急切斷系統(tǒng)聯(lián)動。
- 核心功能：實現(xiàn)高壓氣體壓力監(jiān)測、泄漏檢測與聯(lián)鎖保護(hù)，當(dāng)氣體壓力異?；驒z測到泄漏時，自動觸發(fā)閥門切斷、聲光報警，防止氣體泄漏引發(fā)安全事故或工藝中斷。
- 監(jiān)測精度：壓力測量范圍 0-15MPa，測量誤差≤±0.5% FS，壓力分辨率 0.01MPa，可精準(zhǔn)捕捉高壓氣體的微小壓力波動；泄漏檢測靈敏度≤1×10?? Pa?m3/s（氦質(zhì)譜校準(zhǔn)）。
- 響應(yīng)性能：壓力采樣頻率≥5Hz，聯(lián)鎖動作響應(yīng)時間≤50ms，支持 “壓力超高 / 超低、流量異常、管路溫度異?！?三重聯(lián)鎖觸發(fā)條件，滿足危險氣體的快速安全管控需求。
- 信號兼容：支持 4-20mA 模擬量信號（壓力數(shù)據(jù)輸出）與 RS-485 數(shù)字信號（狀態(tài)反饋），可接入 AMAT 設(shè)備 PLC 系統(tǒng)，實現(xiàn)遠(yuǎn)程壓力監(jiān)控與聯(lián)鎖參數(shù)配置。
- 防護(hù)設(shè)計：閥體與檢測模塊采用 316L 不銹鋼材質(zhì)（抗腐蝕等級≥9 級），表面經(jīng)鈍化處理；外殼防護(hù)等級 IP66，防粉塵、防高壓噴淋清洗，內(nèi)部電路具備防爆設(shè)計（ATEX II 2G）。
- 安裝適配：采用法蘭式 / 卡套式接口（接口規(guī)格 1/2"-1"），支持管路水平 / 垂直安裝，適配設(shè)備氣體管路的緊湊布局；接線端子帶防爆密封套，避免氣體滲入電路引發(fā)故障。
- 操作便利：配備 1.8 英寸 OLED 顯示屏，實時顯示氣體壓力、聯(lián)鎖狀態(tài)、故障代碼；支持通過物理按鍵本地設(shè)置壓力閾值，也可通過專用軟件遠(yuǎn)程調(diào)試，無需拆解模塊。
AMAT Applied Materials 0100-01691高壓氣體聯(lián)鎖模塊 英文資料：
1. Adaptation scenarios and functions (0100-01691)
Equipment adaptation: High pressure gas pipeline system compatible with AMAT semiconductor process equipment (such as CVD deposition and etching machines), used for safety control of hazardous gases such as silane, ammonia, fluoride, etc., and adapted for gas transport links in 300mm wafer manufacturing.
Process compatibility: Focusing on safe use scenarios of high-pressure gas (0.5-10MPa), compatible with processes such as semiconductor film deposition and plasma etching that require high-pressure gas participation, and can be linked with equipment gas control cabinets and emergency shutdown systems.
Core function: Implement high-pressure gas pressure monitoring, leak detection, and interlock protection. When gas pressure is abnormal or a leak is detected, the valve will automatically shut off and sound and light alarms will be triggered to prevent gas leakage from causing safety accidents or process interruptions.
2. Accuracy and Performance (0100-01691)
Monitoring accuracy: pressure measurement range 0-15MPa, measurement error ≤ ± 0.5% FS, pressure resolution 0.01MPa, can accurately capture small pressure fluctuations of high-pressure gases; Leakage detection sensitivity ≤ 1 × 10 ?? Pa · m 3/s (helium mass spectrometry calibration).
Response performance: Pressure sampling frequency ≥ 5Hz, interlock action response time ≤ 50ms, supports triple interlock triggering conditions of "pressure ultra-high/ultra-low, flow abnormal, pipeline temperature abnormal", and meets the rapid and safe control requirements of hazardous gases.
Signal compatibility: Supports 4-20mA analog signals (pressure data output) and RS-485 digital signals (status feedback), and can be connected to AMAT equipment PLC system to achieve remote pressure monitoring and interlock parameter configuration.
3. Structure and Protection (0100-01691)
Protection design: The valve body and detection module are made of 316L stainless steel material (corrosion resistance level ≥ 9), and the surface has been passivated; The enclosure protection level is IP66, and it is dust-proof and high-pressure spray cleaning resistant. The internal circuit has explosion-proof design (ATEX II 2G).
Installation adaptation: adopts flange/sleeve interface (interface specification 1/2 "-1"), supports horizontal/vertical installation of pipelines, and adapts to the compact layout of equipment gas pipelines; The wiring terminals are equipped with explosion-proof sealing sleeves to prevent gas from infiltrating the circuit and causing faults.
Easy to operate: equipped with a 1.8-inch OLED display screen, real-time display of gas pressure, interlock status, and fault codes; Support setting pressure thresholds locally through physical buttons, and can also be remotely debugged through dedicated software without disassembling the module.
AMAT Applied Materials 0100-01691高壓氣體聯(lián)鎖模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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