LAM 839-019090-611靜電夾
1.產 品 資 料 介 紹：
中文資料：
LAM 839-019090-611 是一款用于半導體制造設備的靜電夾（Electrostatic Chuck, ESC），主要用于在晶圓加工過程中固定和控溫。以下是其特點和應用領域：
主要特點：
靜電吸附
利用靜電力牢固固定晶圓，避免機械夾持造成的損傷。
精確控溫
內置加熱和冷卻系統，實現晶圓溫度的精確控制。
高可靠性
設計適用于高真空和等離子體環(huán)境，具有長壽命和穩(wěn)定性能。
多種尺寸兼容
支持不同尺寸的晶圓（如 200mm、300mm），適應多種工藝需求。
低污染
采用高純度材料制造，減少對晶圓的污染。
快速響應
溫度調節(jié)響應速度快，適合高精度工藝要求。
易于集成
設計符合半導體設備標準，便于安裝和維護。
應用領域：
半導體制造
用于刻蝕、化學氣相沉積（CVD）、物理氣相沉積（PVD）等工藝。
平板顯示制造
在液晶顯示器（LCD）和有機發(fā)光二極管（OLED）生產中用于薄膜沉積和刻蝕。
太陽能電池制造
用于光伏電池的薄膜沉積和表面處理。
光學鍍膜
用于光學鏡片和濾光片的鍍膜工藝。
科研與實驗室
支持材料科學和半導體工藝的研究。
總結：
LAM 839-019090-611 靜電夾是一款高精度、高可靠性的晶圓固定和控溫設備，廣泛應用于半導體制造、平板顯示制造、太陽能電池制造、光學鍍膜和科研領域，滿足高精度工藝的需求。
英文資料：
LAM 839-019090-611 is an electrostatic chuck (ESC) used in semiconductor manufacturing equipment, mainly for fixing and temperature control during wafer processing. The following are its characteristics and application areas:
Main features:
Electrostatic adsorption
Use electrostatic force to firmly fix the wafer and avoid damage caused by mechanical clamping.
Accurate temperature control
Built in heating and cooling system for precise control of wafer temperature.
high reliability
Designed for high vacuum and plasma environments, with long lifespan and stable performance.
Compatible with multiple sizes
Supports wafers of different sizes (such as 200mm, 300mm) to meet various process requirements.
Low Pollution
Made with high-purity materials to reduce wafer contamination.
quick response
Fast temperature regulation response speed, suitable for high-precision process requirements.
Easy to integrate
Design in accordance with semiconductor equipment standards for easy installation and maintenance.
Application areas:
Semiconductor Manufacturing
Used for processes such as etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), etc.
Flat panel display manufacturing
Used for thin film deposition and etching in the production of liquid crystal displays (LCDs) and organic light-emitting diodes (OLEDs).
Manufacturing of solar cells
Used for thin film deposition and surface treatment of photovoltaic cells.
Optical Coating
Coating process for optical lenses and filters.
Research and Laboratory
Support research in materials science and semiconductor processes.
Summary:
LAM 839-019090-611 electrostatic clamp is a high-precision and highly reliable wafer fixing and temperature control device, widely used in semiconductor manufacturing, flat panel display manufacturing, solar cell manufacturing, optical coating, and scientific research fields, meeting the needs of high-precision processes.
2.產 品 展 示
3.其他產品
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