MKS AX7670-60 發(fā)電機(jī)

1.產(chǎn) 品 資 料 介 紹：

中文資料：

MKS AX7670-60 是一款高性能射頻（RF）發(fā)電機(jī)，主要用于需要精確射頻功率控制的工業(yè)和應(yīng)用場景。以下是其特點(diǎn)和應(yīng)用領(lǐng)域：

主要特點(diǎn)：

1. 高精度射頻輸出

   • 提供穩(wěn)定的射頻功率輸出，適合對功率要求嚴(yán)格的應(yīng)用。

2. 寬頻率范圍

   • 支持多種頻率，適應(yīng)不同工藝需求。

3. 數(shù)字控制

   • 支持?jǐn)?shù)字接口（如以太網(wǎng)、RS-232等），便于集成到自動化系統(tǒng)中。

4. 高可靠性

   • 設(shè)計(jì)適用于嚴(yán)苛的工業(yè)環(huán)境，具有長壽命和穩(wěn)定性能。

5. 多級保護(hù)機(jī)制

   • 內(nèi)置過載、過熱和短路保護(hù)，確保設(shè)備安全運(yùn)行。

6. 用戶友好界面

   • 提供直觀的操作界面，便于設(shè)置和監(jiān)控。

應(yīng)用領(lǐng)域：

1. 半導(dǎo)體制造

   • 用于等離子體刻蝕、化學(xué)氣相沉積（CVD）和濺射等工藝。

2. 平板顯示制造

   • 在液晶顯示器（LCD）和有機(jī)發(fā)光二極管（OLED）生產(chǎn)中用于薄膜沉積和刻蝕。

3. 太陽能電池制造

   • 用于光伏電池的薄膜沉積和表面處理。

4. 科研與實(shí)驗(yàn)室

   • 支持等離子體物理、材料科學(xué)等領(lǐng)域的研究。

5. 醫(yī)療設(shè)備

   • 用于等離子體滅菌和醫(yī)療器械的表面處理。

6. 工業(yè)涂層

   • 在工具、模具和零部件上用于耐磨、防腐涂層的沉積。

7. 光學(xué)鍍膜

   • 用于光學(xué)鏡片和濾光片的鍍膜工藝。

總結(jié)：

MKS AX7670-60 射頻發(fā)電機(jī)是一款高精度、高可靠性的設(shè)備，廣泛應(yīng)用于半導(dǎo)體、平板顯示、太陽能電池、科研、醫(yī)療設(shè)備、工業(yè)涂層和光學(xué)鍍膜等領(lǐng)域，滿足對射頻功率控制的嚴(yán)格要求。

英文資料：

The MKS AX7670-60 is a high-performance radio frequency (RF) generator primarily used in industrial and application scenarios that require precise RF power control. The following are its characteristics and application areas:

Main features:

High precision RF output

Provide stable RF power output, suitable for applications with strict power requirements.

Wide Frequency Range

Support multiple frequencies to meet different process requirements.

digital control

Supports digital interfaces (such as Ethernet, RS-232, etc.) for easy integration into automation systems.

high reliability

Designed for harsh industrial environments, with long lifespan and stable performance.

Multi level protection mechanism

Built in overload, overheating, and short circuit protection ensures safe operation of the equipment.

User friendly interface

Provide an intuitive user interface for easy setup and monitoring.

Application areas:

Semiconductor Manufacturing

Used for processes such as plasma etching, chemical vapor deposition (CVD), and sputtering.

Flat panel display manufacturing

Used for thin film deposition and etching in the production of liquid crystal displays (LCDs) and organic light-emitting diodes (OLEDs).

Manufacturing of solar cells

Used for thin film deposition and surface treatment of photovoltaic cells.

Research and Laboratory

Support research in fields such as plasma physics and materials science.

medical equipment

Used for plasma sterilization and surface treatment of medical devices.

Industrial coating

Deposition of wear-resistant and anti-corrosion coatings on tools, molds, and components.

Optical Coating

Coating process for optical lenses and filters.

Summary:

The MKS AX7670-60 RF generator is a high-precision and highly reliable device widely used in fields such as semiconductors, flat panel displays, solar cells, scientific research, medical equipment, industrial coatings, and optical coatings, meeting strict requirements for RF power control.

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