AMAT Applied Materials 5000-170閥門控制器
1.產(chǎn) 品 資 料 介 紹：
- 設(shè)備適配：匹配 AMAT 半導(dǎo)體真空腔室（如蝕刻、沉積設(shè)備），控制氣動(dòng) / 電動(dòng)真空閥門，適配 Gate Valve、Butterfly Valve 等主流閥門類型。
- 工藝兼容：聚焦真空環(huán)境下的閥門精準(zhǔn)控制，適配晶圓制造中真空抽排、氣體切換等工序，支持 1×10?3 - 1×10?? Pa 真空區(qū)間使用。
- 核心功能：實(shí)現(xiàn)閥門開關(guān) / 調(diào)節(jié)的閉環(huán)控制，配合設(shè)備主控系統(tǒng)完成壓力調(diào)節(jié)、氣體流量控制，保障工藝穩(wěn)定性。
- 控制精度：閥門開度調(diào)節(jié)精度 ±1%，開關(guān)響應(yīng)時(shí)間≤100ms，壓力控制偏差≤0.5% FS，適配 3x 納米制程對(duì)真空環(huán)境的嚴(yán)苛要求。
- 信號(hào)兼容：支持 4-20mA 模擬量、RS-485 數(shù)字量信號(hào)輸入 / 輸出，可接入 AMAT 設(shè)備 PLC 系統(tǒng)，實(shí)現(xiàn)遠(yuǎn)程監(jiān)控與參數(shù)調(diào)整。
- 運(yùn)行穩(wěn)定：內(nèi)置 PID 調(diào)節(jié)算法，自動(dòng)補(bǔ)償溫度、壓力波動(dòng)對(duì)閥門控制的影響，連續(xù)運(yùn)行無漂移，平均無故障時(shí)間（MTBF）超 5000 小時(shí)。
- 防護(hù)設(shè)計(jì)：外殼防護(hù)等級(jí) IP65，防粉塵、防車間清潔潑濺；電路具備防靜電（ESD）、防電磁干擾（EMI）設(shè)計(jì)，適應(yīng)半導(dǎo)體車間電磁環(huán)境。
- 安裝適配：緊湊型結(jié)構(gòu)（尺寸約 150×100×50mm），支持導(dǎo)軌式 / 壁掛式安裝，適配設(shè)備控制柜內(nèi)有限空間，接線端子帶防呆設(shè)計(jì)，避免誤接。
- 維護(hù)便利：面板配備 LCD 顯示屏 + 按鍵，可本地查看 / 設(shè)置參數(shù)（如閥門開度、壓力閾值），支持故障代碼顯示，快速定位問題。
AMAT Applied Materials 5000-170閥門控制器 英文資料：
1. Adaptation scenarios and functions (5000-170)
Equipment adaptation: Match AMAT semiconductor vacuum chambers (such as etching and deposition equipment), control pneumatic/electric vacuum valves, and adapt to mainstream valve types such as Gate Valve and Butterfly Valve.
Process compatibility: Focus on precise control of valves in vacuum environments, adapt to processes such as vacuum pumping and gas switching in wafer manufacturing, and support the use of 1 × 10 ?3 -1 × 10 ?? Pa vacuum intervals.
Core function: Implement closed-loop control of valve opening/adjustment, cooperate with the equipment main control system to complete pressure regulation and gas flow control, and ensure process stability.
2. Accuracy and performance (5000-170)
Control accuracy: Valve opening adjustment accuracy ± 1%, switch response time ≤ 100ms, pressure control deviation ≤ 0.5% FS, suitable for the strict requirements of 3x nanometer process on vacuum environment.
Signal compatibility: Supports 4-20mA analog and RS-485 digital signal input/output, can be connected to AMAT equipment PLC system, and achieve remote monitoring and parameter adjustment.
Stable operation: Built in PID regulation algorithm, automatically compensates for the impact of temperature and pressure fluctuations on valve control, continuous operation without drift, and an average time between failures (MTBF) of over 5000 hours.
3. Structure and Protection (5000-170)
Protection design: The shell protection level is IP65, which prevents dust and workshop cleaning splashes; The circuit is designed with anti-static (ESD) and electromagnetic interference (EMI) protection to adapt to the electromagnetic environment of semiconductor workshops.
Installation adaptation: Compact structure (size approximately 150 × 100 × 50mm), supports rail/wall mounted installation, adapts to limited space inside equipment control cabinets, and has foolproof terminal design to avoid misconnection.
Easy maintenance: The panel is equipped with an LCD display screen and buttons, which can locally view/set parameters (such as valve opening and pressure threshold), support fault code display, and quickly locate problems.
AMAT Applied Materials 5000-170閥門控制器 產(chǎn)品展示
產(chǎn)品視頻
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| PMA22B-01100-22 | AMAT 0100-35279 | PFTL101A-1.0KN 3BSE004166R1 |
| PMA22B-01100-00 | AMAT 0100-77043 | PFTL 101AER-1.0KN |
| PMA22B-00100-00 | AMAT 0100-00060 | PFTL-101A 3BSE008508R1 |
| PMA21B-10100-00 | AMAT 0100-00059 | PFEA112-65 |
| PMA21B-01100-00 | ANAT 0100-76091 | PFRL101A |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
