AMAT Applied Materials 0100-90411 主板
1.產(chǎn) 品 資 料 介 紹:
- 存儲(chǔ)規(guī)格:參考同系列 0100-09000 型號(hào),預(yù)計(jì)配備 16MB SDRAM 運(yùn)行內(nèi)存 + 32MB Flash 存儲(chǔ),滿足設(shè)備控制程序快速加載與數(shù)據(jù)緩存需求
- 適配設(shè)備:作為 AMAT 專用主板,大概率適配 300mm 半導(dǎo)體制程設(shè)備(如沉積、蝕刻機(jī)臺(tái)),可匹配 P5000、Producer 系列平臺(tái)的控制單元接口
- 供電設(shè)計(jì):預(yù)計(jì)采用 24V DC 冗余電壓輸入,支持雙路電源備份,避免單路斷電導(dǎo)致的工藝中斷
- 通信接口:可能集成 RS-232/485 串行接口及千兆以太網(wǎng)端口,實(shí)現(xiàn)與設(shè)備腔室、傳感器的實(shí)時(shí)數(shù)據(jù)交互,支持 1Mbps 級(jí)數(shù)據(jù)吞吐量
- 擴(kuò)展插槽:預(yù)留 PCIe x16 或 x4 擴(kuò)展槽,可適配射頻控制卡、數(shù)據(jù)采集模塊等專用組件,兼容 AMAT 平臺(tái)化設(shè)備的功能擴(kuò)展需求
- I/O 控制:配備多組 GPIO 接口,支持對(duì)真空閥門(mén)、加熱器等外設(shè)的精準(zhǔn)控制,適配半導(dǎo)體設(shè)備的多工序協(xié)同邏輯
- 運(yùn)算能力:采用工業(yè)級(jí)嵌入式處理器(參考同類主板 x86 架構(gòu)或 ARM 架構(gòu)),支持多線程并行處理,滿足蝕刻、沉積等工藝的實(shí)時(shí)控制需求
- 抗干擾設(shè)計(jì):可能采用差分 IO 通信技術(shù),阻斷半導(dǎo)體車間電磁干擾對(duì)信號(hào)傳輸?shù)挠绊?,保障工藝參?shù)控制精度
- 監(jiān)控功能:內(nèi)置硬件監(jiān)控模塊,可實(shí)時(shí)采集溫度、電壓等運(yùn)行數(shù)據(jù),配合 watchdog 功能實(shí)現(xiàn)故障自動(dòng)復(fù)位
- 耐受能力:工作溫度范圍預(yù)計(jì)達(dá) 0-60℃,適配潔凈車間溫濕度波動(dòng),金屬基板設(shè)計(jì)提升散熱效率
- 結(jié)構(gòu)規(guī)格:尺寸或接近 14.7cm×5.15cm×11.4cm 的緊湊型設(shè)計(jì),重量約 0.6kg,適配設(shè)備內(nèi)部有限安裝空間
- 認(rèn)證標(biāo)準(zhǔn):符合 UL、CE 安全認(rèn)證及 RoHS 環(huán)保要求,適配全球半導(dǎo)體工廠合規(guī)性需求
AMAT Applied Materials 0100-90411 主板 英文資料:
1. Hardware configuration and adaptability (0100-90411 motherboard)
Storage specifications: Referring to the same series 0100-09000 models, it is expected to be equipped with 16MB SDRAM running memory and 32MB Flash storage to meet the requirements of fast loading of device control programs and data caching
Adaptation equipment: As an AMAT dedicated motherboard, it is highly likely to be compatible with 300mm semiconductor process equipment (such as deposition and etching machines), and can be matched with control unit interfaces for P5000 and Producer series platforms
Power supply design: It is expected to use 24V DC redundant voltage input, support dual power backup, and avoid process interruption caused by single power outage
2. Interface and Expansion Capability (0100-90411 motherboard)
Communication interface: It may integrate RS-232/485 serial interface and Gigabit Ethernet port to achieve real-time data interaction with equipment chambers and sensors, supporting 1Mbps level data throughput
Expansion slot: Reserve PCIe x16 or x4 expansion slots, which can adapt to specialized components such as RF control cards and data acquisition modules, and are compatible with the functional expansion requirements of AMAT platform devices
I/O control: equipped with multiple GPIO interfaces, supporting precise control of external devices such as vacuum valves and heaters, and adapting to the multi process collaborative logic of semiconductor equipment
3. Performance and stability (0100-90411 motherboard)
Computing capability: Adopting industrial grade embedded processors (referring to similar motherboard x86 architecture or ARM architecture), supporting multi-threaded parallel processing, meeting the real-time control requirements of etching, deposition and other processes
Anti interference design: Differential IO communication technology may be used to block the impact of electromagnetic interference in the semiconductor workshop on signal transmission, ensuring the accuracy of process parameter control
Monitoring function: Built in hardware monitoring module, can collect real-time operating data such as temperature and voltage, and cooperate with watchdog function to achieve automatic fault reset
4. Environment and Compliance (0100-90411 motherboard)
Tolerance: The expected working temperature range is 0-60 ℃, suitable for temperature and humidity fluctuations in clean workshops, and the metal substrate design improves heat dissipation efficiency
Structural specifications: Compact design with dimensions close to 14.7cm × 5.15cm × 11.4cm, weighing approximately 0.6kg, suitable for limited installation space inside the equipment
Certification standards: Compliant with UL, CE safety certification and RoHS environmental requirements, suitable for global semiconductor factory compliance needs
AMAT Applied Materials 0100-90411 主板 產(chǎn)品展示

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| PMA54R-10100-00 | 70 AS 04b-E | PFTL101AE 0.5KN 3BSE004211R1 |
| PMA54R-00100-00 | NIMP01 | N31HLLJ-LNK-NS-00 |
| PMA54Q-11100-00 | AMAT 0100-00397 | PFRL101D 5.0KN 3BSE002969R0002 |
| PMA54Q-10100-00 | 70 AS 40b-E | 3BUR980025R1 DSTX 180 |
| PMA54Q-00100-00 | AMAT 0100-71261 | N32HREM-LNK-NS-00 |
| PMA53R-00100-00 | NKTU117 | P21NRLC-LSS-NS-03 |
| PMA53Q-10100-00 | AMAT 0110-00001 | N31HRLJ-LNK-NS-01 |
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