AMAT Applied Materials 0010-81309溫度控制單元組件
1.產(chǎn) 品 資 料 介 紹：
- 控溫范圍覆蓋 - 50~300℃（適配半導(dǎo)體工藝腔室、加熱平臺(tái)需求），采用 PID 閉環(huán)控制，控溫精度 ±0.1℃，支持快速升溫（升溫速率≥5℃/min），避免溫度波動(dòng)影響工藝穩(wěn)定性。
- 集成多路溫度采集通道（推測(cè) 4-8 路），兼容熱電偶（K/J 型）、RTD 傳感器，可實(shí)時(shí)監(jiān)測(cè)多區(qū)域溫度，異常時(shí)自動(dòng)調(diào)節(jié)輸出功率，保障全域溫度均勻性。
- 輸出接口可直接對(duì)接 AMAT 0190-35176 加熱器驅(qū)動(dòng)，支持 4-20mA 模擬信號(hào) / RS485 通信，能接收 0120-00794 過程傳感器主板的溫度數(shù)據(jù)，形成 “采集 - 控制 - 執(zhí)行” 閉環(huán)。
- 兼容 AMAT 0190-24007 單板計(jì)算機(jī)，支持 Modbus 協(xié)議，可遠(yuǎn)程設(shè)置溫度閾值、啟停時(shí)間，適配 ENDURA? 等半導(dǎo)體裝備的自動(dòng)化溫控鏈路。
- 集成超溫保護(hù)（超設(shè)定值 10℃觸發(fā)斷電）、傳感器斷線告警、過流保護(hù)（超額定電流 150% 切斷），故障時(shí)立即鎖定輸出并發(fā)送告警信號(hào)至主控系統(tǒng)。
- 采用電氣隔離設(shè)計(jì)（隔離電壓≥2500V DC），抗電磁干擾符合 EN 55022 Class B 標(biāo)準(zhǔn)，適配半導(dǎo)體車間復(fù)雜電磁環(huán)境，避免信號(hào)干擾導(dǎo)致控溫偏差。
- 核心元件（溫控芯片、繼電器）為工業(yè)級(jí)型號(hào)，經(jīng)高低溫老化（-40~+85℃）與 10 萬次循環(huán)控溫測(cè)試，MTBF≥8 萬小時(shí)，支持 7×24 小時(shí)連續(xù)運(yùn)行。
- 符合 UL/CE/RoHS 認(rèn)證及 SEMI 行業(yè)標(biāo)準(zhǔn)，原廠提供 1-3 年質(zhì)保，備件可快速替換，減少因溫控故障導(dǎo)致的設(shè)備停機(jī)時(shí)間。
AMAT Applied Materials 0010-81309溫度控制單元組件 英文資料：
1. Temperature control performance (AMAT 0010-81309)
The temperature control range covers -50~300 ℃ (suitable for semiconductor process chambers and heating platforms), using PID closed-loop control with a temperature control accuracy of ± 0.1 ℃. It supports rapid heating (heating rate ≥ 5 ℃/min) to avoid temperature fluctuations affecting process stability.
Integrated multiple temperature acquisition channels (estimated to be 4-8 channels), compatible with thermocouples (K/J type) and RTD sensors, can monitor temperature in multiple areas in real time, automatically adjust output power in case of abnormalities, and ensure temperature uniformity throughout the entire area.
2. Adaptation and linkage (AMAT 0010-81309)
The output interface can directly interface with the AMAT 0190-35176 heater driver, support 4-20mA analog signal/RS485 communication, and can receive temperature data from the 0120-00794 process sensor motherboard, forming a "acquisition control execution" closed loop.
Compatible with AMAT 0190-24007 single board computer, supports Modbus protocol, can remotely set temperature threshold and start stop time, compatible with ENDURA ? Automated temperature control link for semiconductor equipment.
3. Safety and Protection (AMAT 0010-81309)
Integrated over temperature protection (triggering power-off when exceeding the set value by 10 ℃), sensor disconnection alarm, overcurrent protection (cutting off when exceeding the rated current by 150%), immediately lock the output and send an alarm signal to the main control system in case of a fault.
Adopting electrical isolation design (isolation voltage ≥ 2500V DC), anti electromagnetic interference meets EN 55022 Class B standard, adapts to complex electromagnetic environment in semiconductor workshop, and avoids temperature control deviation caused by signal interference.
4. Reliability (AMAT 0010-81309)
The core components (temperature control chip, relay) are industrial grade models that have undergone high and low temperature aging (-40~+85 ℃) and 100000 cycles of temperature control testing. The MTBF is ≥ 80000 hours and supports continuous operation for 7 × 24 hours.
Compliant with UL/CE/RoHS certification and SEMI industry standards, the original factory provides a 1-3 year warranty, and spare parts can be quickly replaced to reduce equipment downtime caused by temperature control failures.
AMAT Applied Materials 0010-81309溫度控制單元組件 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
