AMAT Applied Materials AX8200D控制器
1.產(chǎn) 品 資 料 介 紹：
- 適用系統(tǒng)：優(yōu)先適配 AMAT Varian 系列離子注入機(jī)、AdvantEdge 系列蝕刻機(jī)，兼容 AMAT 同類高端半導(dǎo)體設(shè)備
- 控制能力：8 軸運(yùn)動(dòng)控制（支持伺服 / 步進(jìn)電機(jī)，定位精度≤±0.001mm）、16 路模擬量輸入（4-20mA/0-10V，采樣精度 16 位）、12 路模擬量輸出（4-20mA/0-10V，輸出精度 12 位）、32 路數(shù)字量 I/O（24V DC）
- 工藝控制精度：溫度控制 ±0.05℃（100-600℃區(qū)間）、壓力控制 ±0.1% FS（真空 / 常壓場(chǎng)景）、流量控制 ±0.3% FS（適配 AMAT MFC 模塊）
- 通信接口：EtherCAT（實(shí)時(shí)運(yùn)動(dòng)控制，周期≤1ms）、Profinet（工藝數(shù)據(jù)交互）、以太網(wǎng)（TCP/IP，支持 MES 系統(tǒng)對(duì)接）、RS485（Modbus-RTU，連接外圍傳感器）
- 電源需求：DC 48V±10%，功耗≤50W（滿負(fù)載運(yùn)行），具備過(guò)壓（60V）、欠壓（38V）、過(guò)流（2A）、過(guò)溫（85℃）四重保護(hù)
- 物理尺寸：長(zhǎng) 220mm× 寬 140mm× 高 50mm，安裝孔位適配原廠設(shè)備電氣柜標(biāo)準(zhǔn)導(dǎo)軌，M4 螺絲固定
- 環(huán)境適應(yīng)：工作溫度 - 15℃-70℃，相對(duì)濕度≤90% RH（無(wú)凝露），抗電磁干擾符合 EN 61000-6-4 標(biāo)準(zhǔn)（射頻場(chǎng)強(qiáng) 20V/m，80MHz-1GHz 無(wú)性能波動(dòng)）
AMAT Applied Materials AX8200D控制器 英文資料：
1、 Product Overview
The AMAT AX8200D controller is the core of multi axis motion and process coordination control for high-end semiconductor wafer processing equipment, such as the AMAT Varian series ion implantation machine and AdvantEdge series etching machine. It mainly achieves high-precision positioning of the wafer stage, ion beam current regulation, and multi-channel coordinated control of process gases. Through multi task real-time scheduling algorithms, it ensures the synchronous operation of multiple processes of the equipment. The module supports seamless integration with device sensors, actuators, and factory MES systems, and can directly ｒｅｐｌａｃｅ old controllers of the same model from the original factory without the need to reconstruct device control logic, quickly restoring the high-precision operation capability of the equipment.
2、 Key parameters
Applicable system: Priority adaptation to AMAT Varian series ion implantation machine, AdvantEdge series etching machine, compatible with AMAT high-end semiconductor equipment of the same kind
Control capability: 8-axis motion control (supporting servo/stepper motors, positioning accuracy ≤ ± 0.001mm), 16 analog inputs (4-20mA/0-10V, sampling accuracy 16 bits), 12 analog outputs (4-20mA/0-10V, output accuracy 12 bits), 32 digital I/O (24V DC)
Process control accuracy: temperature control ± 0.05 ℃ (100-600 ℃ range), pressure control ± 0.1% FS (vacuum/atmospheric pressure scenario), flow control ± 0.3% FS (compatible with AMAT MFC module)
Communication interfaces: EtherCAT (real-time motion control, cycle ≤ 1ms), Profinet (process data exchange), Ethernet (TCP/IP, supporting MES system docking), RS485 (Modbus RTU, connecting peripheral sensors)
Power requirement: DC 48V ± 10%, power consumption ≤ 50W (full load operation), with four layers of protection: overvoltage (60V), undervoltage (38V), overcurrent (2A), and over temperature (85 ℃)
Physical dimensions: 220mm in length, 140mm in width, and 50mm in height. The installation holes are compatible with the standard guide rails of the original equipment electrical cabinet, and are fixed with M4 screws
Environmental adaptation: Working temperature -15 ℃ -70 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-4 standard (RF field strength 20V/m, 80MHz-1GHz without performance fluctuations)
AMAT Applied Materials AX8200D控制器 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
