AMAT Applied Materials AP001871-00高壓電源模塊
1.產(chǎn) 品 資 料 介 紹：
- 適用系統(tǒng)：優(yōu)先適配 AMAT Centura/Producer 系列等離子體設(shè)備，兼容 AMAT 同類高壓供電場景（如靜電吸盤、等離子體源）
- 輸出特性：額定輸出電壓 0-10kV DC（連續(xù)可調(diào)），額定輸出電流 0-10mA，電壓調(diào)節(jié)精度≤±0.5% FS，輸出紋波≤50Vpp（10Hz-20MHz）
- 輸入規(guī)格：AC 220V±10%（50/60Hz），輸入功率≤150W，功率因數(shù)≥0.9（滿負載）
- 控制方式：支持模擬量控制（0-5V/4-20mA，對應(yīng) 0-10kV 輸出）、RS485 通信控制（Modbus-RTU 協(xié)議，支持遠程電壓設(shè)置與狀態(tài)讀?。?/span>
- 保護功能：過壓保護（11kV 觸發(fā)，自動切斷輸出）、過流保護（12mA 觸發(fā)）、過溫保護（85℃觸發(fā)）、高壓短路保護（響應(yīng)時間≤10μs）、輸入欠壓保護（180V AC 觸發(fā)）
- 物理尺寸：長 200mm× 寬 120mm× 高 60mm，安裝孔位適配原廠設(shè)備高壓柜，M4 螺絲固定（力矩 1.0-1.2N?m）
- 環(huán)境與安全：工作溫度 - 10℃-60℃，相對濕度≤85% RH（無凝露），高壓絕緣等級 CLASS II，外殼接地電阻≤1Ω，抗電磁干擾符合 EN 61000-6-2 標準
AMAT Applied Materials AP001871-00高壓電源模塊 英文資料：
AMAT Applied Materials AP001871-00 High Voltage Power Module Manual (Simplified Version)
1、 Product Overview
The AMAT AP001871-00 high-voltage power module is the high-voltage power supply core of semiconductor plasma process equipment, such as the AMAT Centura series etching machine and Producer series CVD coating machine. It mainly provides stable high-voltage DC output for the equipment plasma generator and electrostatic suction cup, and controls the plasma density and electrostatic adsorption force through precise voltage adjustment to meet the strict requirements of semiconductor processes for high-voltage stability. The module has multiple high-voltage safety protections and can be directly replaced with original modules of the same model without the need to adjust the high-voltage circuit of the equipment, quickly restoring the process power supply function.
2、 Key parameters
Applicable system: Priority adaptation to AMAT Centura/Producer series plasma equipment, compatible with similar high-voltage power supply scenarios of AMAT (such as electrostatic suction cups, plasma sources)
Output characteristics: Rated output voltage 0-10kV DC (continuously adjustable), rated output current 0-10mA, voltage regulation accuracy ≤± 0.5% FS, output ripple ≤ 50Vpp (10Hz-20MHz)
Input specifications: AC 220V ± 10% (50/60Hz), input power ≤ 150W, power factor ≥ 0.9 (full load)
Control mode: Supports analog control (0-5V/4-20mA, corresponding to 0-10kV output), RS485 communication control (Modbus RTU protocol, supports remote voltage setting and status reading)
Protection functions: overvoltage protection (triggered by 11kV, automatically cutting off output), overcurrent protection (triggered by 12mA), over temperature protection (triggered by 85 ℃), high voltage short circuit protection (response time ≤ 10 μ s), input undervoltage protection (triggered by 180V AC)
Physical dimensions: 200mm in length, 120mm in width, and 60mm in height. The installation holes are compatible with the original equipment high-voltage cabinet and fixed with M4 screws (torque 1.0-1.2N · m)
Environment and safety: Working temperature -10 ℃ -60 ℃, relative humidity ≤ 85% RH (no condensation), high voltage insulation level CLASS II, shell grounding resistance ≤ 1 Ω, anti electromagnetic interference in accordance with EN 61000-6-2 standard
AMAT Applied Materials AP001871-00高壓電源模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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