AMAT Applied Materials 0190-26514驅(qū)動(dòng)器

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials 0190-26514驅(qū)動(dòng)器 英文資料：

1、 Product Overview

The AMAT 0190-26514 driver is the servo drive core of semiconductor wafer transfer equipment, such as the AMAT Endura series robotic arm and Centura series wafer stage. It mainly realizes high-precision speed control and position closed-loop adjustment of servo motors, and drives the mechanical structure to complete wafer grasping, transfer, positioning and other actions. The module supports real-time current feedback and dynamic load compensation, which can reduce vibration and deviation during motion, adapt to the strict requirements of semiconductor devices for motion stability, and can directly ｒｅｐｌａｃｅ the same type of driver from the original factory without adjusting the device control logic, quickly restoring the driving function.

2、 Key parameters

Applicable system: Priority adaptation to AMAT Endura/Ventura series equipment servo motors, compatible with AMAT's similar wafer transfer and stage drive scenarios

Motor adaptation: Supports three-phase permanent magnet synchronous servo motors, rated output current 3A-6A, adapted motor power 0.5kW-1.5kW, encoder resolution ≤ 2500 lines (supports frequency doubling to 10000 pulses/rev)

Control mode: Supports three control modes: pulse+direction, analog (0-10V), and EtherCAT communication. Pulse frequency ≤ 500kHz, position control accuracy ≤ ± 1 pulse

Protection functions: overcurrent protection (triggered by 7A), over temperature protection (triggered by 90 ℃), under voltage protection (triggered by 28V DC), overload protection (150% rated current, lasting for 10 seconds), motor encoder fault protection

Power requirement: DC 48V-72V wide voltage input, power consumption ≤ 120W (full load operation), power conversion efficiency ≥ 90%

Physical dimensions: 150mm in length, 80mm in width, and 40mm in height. The installation holes are compatible with the original equipment bracket and fixed with M3 screws (torque 0.5-0.7N · m)

Environmental adaptation: Working temperature -10 ℃ -65 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-3 standard, protection level IP20

3、 Core advantages

High precision drive control: Three loop closed-loop control of current loop, speed loop, and position loop, dynamic response time ≤ 50 μ s, motion positioning error ≤± 0.005mm, meeting millimeter level positioning requirements for wafer transmission

Seamless compatibility with the original factory: interface definition, control signal format, and motor matching parameters are completely identical to those of the original factory. After replacement, there is no need to re debug the gain or electronic gear ratio, and the downtime for replacement is ≤ 1 hour

High stability and durability: using industrial grade power IGBT modules and optimized heat dissipation structure, the core temperature during full load operation is ≤ 75 ℃, the average time between failures (MTBF) is ≥ 60000 hours, and it is suitable for long-term continuous operation of equipment

AMAT Applied Materials 0190-26514驅(qū)動(dòng)器  產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218