AMAT Applied Materials 0010-47052控制器

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials 0010-47052控制器 英文資料：

1、 Product Overview

The AMAT 0010-47052 controller is the process parameter control core of semiconductor thin film deposition equipment, such as the AMAT Producer series CVD coating machine. It mainly realizes real-time monitoring and precise adjustment of chamber temperature, gas flow rate, and deposition pressure, and ensures the uniformity and consistency of thin film growth through closed-loop control algorithms. The module supports seamless communication with device sensors, actuators, and upper computers, and can directly ｒｅｐｌａｃｅ the original controller of the same model without adjusting the device control logic, quickly restoring process control functions.

2、 Key parameters

Applicable system: Priority adaptation to AMAT Producer series CVD equipment, compatible with process control units of similar AMAT thin film deposition equipment

Control channels: 4-channel temperature control (compatible with PT100/PT1000 sensors), 6-channel gas flow control (compatible with mass flow controllers), 2-channel pressure control (compatible with vacuum pressure sensors)

Control accuracy: Temperature control ± 0.1 ℃ (200-500 ℃ range), flow control ± 0.5% FS, pressure control ± 0.2% FS

Communication interfaces: EtherCAT (real-time control), RS485 (Modbus RTU protocol), Ethernet (TCP/IP, supporting MES system docking)

Power requirement: DC 24V ± 10%, power consumption ≤ 20W (full load operation), with overvoltage (30V), undervoltage (18V), overcurrent (1A) protection

Physical dimensions: 180mm in length, 100mm in width, and 40mm in height. The installation holes are compatible with the original equipment electrical cabinet and fixed with M3 screws

Environmental adaptation: Working temperature -10 ℃ -65 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-2 standard

3、 Core advantages

High precision process control: adopting adaptive PID algorithm to compensate for load fluctuations in real time, ensuring multi parameter coordinated stability, and meeting the high-precision coating requirements of semiconductors

Seamless compatibility with the original factory: interface definition, communication protocol, and control logic are completely matched with the original factory, and there is no need to recalibrate process parameters after replacement. The downtime is ≤ 1 hour

High reliability: Industrial grade core chip+isolation circuit design, mean time between failures (MTBF) ≥ 50000 hours, suitable for long-term continuous operation of equipment

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218