AMAT Applied Materials 0100-20001電子接口模塊
1.產(chǎn) 品 資 料 介 紹:
- 制程設(shè)備信號(hào)調(diào)度:用于刻蝕機(jī)、PVD 沉積設(shè)備的主控單元與射頻匹配器、真空閥門等執(zhí)行機(jī)構(gòu)的信號(hào)交互,實(shí)現(xiàn)工藝參數(shù)的實(shí)時(shí)下發(fā)與狀態(tài)反饋
- 檢測(cè)數(shù)據(jù)傳輸中轉(zhuǎn):連接缺陷檢測(cè)模塊(如 DNP-CPCI-2 掃描儀)與設(shè)備主控制器,將亞微米級(jí)檢測(cè)數(shù)據(jù)高速傳輸至分析系統(tǒng)
- 跨設(shè)備協(xié)同控制:在晶圓傳送系統(tǒng)中,實(shí)現(xiàn)機(jī)器人、對(duì)準(zhǔn)器與制程腔室的動(dòng)作同步信號(hào)傳輸,保障自動(dòng)化流程連貫性
AMAT Applied Materials 0100-20001電子接口模塊 英文資料:
1、 Product core positioning
AMAT 0100-20001 is a high-performance electronic interface module specially designed by Applied Materials for multi system collaboration in semiconductor equipment. It belongs to the "signal conversion and transmission center" of equipment electrical control systems. Its core function is to achieve signal protocol conversion and high-speed data exchange among different subsystems (such as control units, actuators, and detection modules) in semiconductor equipment. It adapts to the cross module transmission of digital and analog signals through standardized interfaces, solves the communication compatibility problem between heterogeneous systems, and is a key connecting component to ensure the smooth operation of equipment automation processes.
Compared with general industrial interface modules, this model adopts semiconductor level anti-interference circuit design and redundant communication architecture, which can withstand high-frequency electromagnetic interference in process scenarios such as etching and deposition, adapt to harsh environments in clean workshops, and meet the high reliability communication requirements of advanced process equipment with 14nm and below.
2、 Key technical parameters (derived based on series commonalities and industry standards)
Based on the technical specifications of AMAT 0100 series modules, general requirements for semiconductor equipment interfaces, and characteristics of similar products, the core specifications of this model are speculated as follows:
Parameter category
Specification Description
Interface and Protocol Characteristics
Support multi protocol conversion: RS-485/RS-32 (serial), Ethernet (TCP/IP), I2C/SPI (industrial bus); Compatible with PROFINET communication standards
Signal transmission performance
Digital signal transmission rate ≥ 1Mbps, analog signal accuracy ± 0.1% FS; supports 8 input/8 output channels, channel isolation voltage ≥ 2500V DC
Power supply and power consumption
Redundant 24V DC power supply (compatible with 0100 series standard power supply), typical power consumption ≤ 8W, standby power consumption < 1W
Physical and Environmental Specifications
Size approximately 145 × 100 × 30mm, weight<300g; working temperature 0-60 ℃, humidity<85%, no condensation, cleanliness Class 100 requirement
Protection and Certification
Surface anti-static coating, interface adopts gold-plated contacts; Compliant with UL 61010-1 safety standards and EN 61000-6-2 anti-interference certification
3、 Application scenarios and adaptation systems
1. Core application areas
As the "communication bridge" of the device subsystem, this interface module mainly serves the multi system collaboration link in semiconductor manufacturing:
Process equipment signal scheduling: used for signal interaction between the main control unit of etching machines, PVD deposition equipment, RF matching devices, vacuum valves and other actuators, to achieve real-time issuance of process parameters and status feedback
Transfer of detection data: Connect the defect detection module (such as DNP-CPCI-2 scanner) with the device main controller to transmit sub micron level detection data at high speed to the analysis system
Cross device collaborative control: In the wafer transfer system, achieve synchronized signal transmission of the actions of robots, aligners, and process chambers to ensure the continuity of automated processes
AMAT Applied Materials 0100-20001電子接口模塊 產(chǎn)品展示

產(chǎn)品視頻
3.其他產(chǎn)品
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Triconex 3624 數(shù)字輸出模塊
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| 710-404778-00 | 03-169460-00N | F31X125SNHADG2 |
| 710-404576-00 | 6DD1684-0DK0 | 710-652840-20 |
| 710-404556-00 | 531X121PCRAEG1 | F31X111PSHALGI |
| 710-404420-00 | 193X741EAG01 | F31X171TMAAFG2 |
| 710-404228-00 | 193X803BBG03 | 710-300015-01 |
| 710-404208-00 | 531X121PCRACG1 | 073-805314-00 |
| 710-404146-00 | 03-137064-00 | 740-612539-000 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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