AMAT Applied Materials 0100-71047主框架互鎖模塊
1.產(chǎn) 品 資 料 介 紹：
- 電控柜安全聯(lián)鎖：安裝于設(shè)備主電控柜柜門，監(jiān)測柜門啟閉狀態(tài)。當(dāng)柜門未完全閉合或非授權(quán)開啟時，立即切斷柜內(nèi)高壓電路（如射頻電源、加熱電源），防止人員接觸帶電部件引發(fā)觸電事故。
- 工藝腔室艙門防護(hù)：適配刻蝕機(jī)、沉積設(shè)備的工藝腔室艙門，與腔室壓力傳感器聯(lián)動。若艙門在真空未解除或工藝運行中開啟，模塊快速切斷腔室動力源，避免工藝氣體泄漏或真空環(huán)境破壞導(dǎo)致的安全風(fēng)險。
- 高壓模塊安全管控：用于設(shè)備高壓模塊（如離子注入電源、靜電吸盤高壓單元）的外殼聯(lián)鎖，當(dāng)外殼開啟時強(qiáng)制斷開高壓輸出，同時觸發(fā)聲光報警，提醒現(xiàn)場人員遠(yuǎn)離危險區(qū)域。
- 主機(jī)設(shè)備適配：廣泛應(yīng)用于 AMAT Centura 刻蝕系統(tǒng)、Endura 沉積平臺、Producer 薄膜沉積設(shè)備及離子注入機(jī)等中高風(fēng)險半導(dǎo)體設(shè)備。
- 配套模塊兼容：與 AMAT 0225-01622 控制器、0100-20001 電子接口模塊、安全光柵（如 Sick C40E 系列）直接對接，形成 “狀態(tài)監(jiān)測 - 聯(lián)鎖控制 - 報警反饋” 的閉環(huán)安全體系。
- 協(xié)同系統(tǒng)聯(lián)動：支持與工廠安全管理平臺（如 EHS 監(jiān)控系統(tǒng)）數(shù)據(jù)交互，實時上傳聯(lián)鎖觸發(fā)記錄與故障信息，便于安全事件追溯與設(shè)備安全狀態(tài)評估。
- 安裝前準(zhǔn)備：確認(rèn)安裝區(qū)域潔凈度符合 Class 100 標(biāo)準(zhǔn)，清除粉塵與金屬碎屑；檢查模塊外觀無損傷，接口無氧化；準(zhǔn)備專用安全線纜（截面積≥1.5mm2，絕緣等級≥600V）、扭矩扳手（精度 ±5%）及防靜電工具。
- 硬件安裝：將模塊固定在設(shè)備電控柜 DIN 導(dǎo)軌上（與高壓部件間距≥30cm，避免電磁干擾）；連接冗余安全電源（確保正負(fù)極無反接，接地電阻≤0.5Ω）；按接口定義連接聯(lián)鎖輸入（門開關(guān)、光柵）與安全輸出（動力切斷繼電器），線纜需做標(biāo)識區(qū)分，避免誤接。
- 調(diào)試與驗證：通過 AMAT 安全配置軟件登錄模塊，設(shè)置聯(lián)鎖邏輯（如 “柜門開啟→切斷高壓”“艙門開啟→切斷腔室電源”）；模擬各類異常場景（如手動開啟柜門、斷開安全光柵），驗證模塊是否在 10ms 內(nèi)觸發(fā)安全動作，同時檢查報警信號是否正常輸出；調(diào)試完成后鎖定模塊參數(shù)，防止非授權(quán)修改。
AMAT Applied Materials 0100-71047主框架互鎖模塊 英文資料：
1. Core application areas
As the "first line of defense" for device security, this module mainly serves the security protection of the main framework of semiconductor equipment and hazardous areas:
Electrical control cabinet safety interlock: installed on the main electrical control cabinet door of the equipment to monitor the opening and closing status of the cabinet door. When the cabinet door is not fully closed or opened without authorization, immediately cut off the high-voltage circuit inside the cabinet (such as RF power supply, heating power supply) to prevent personnel from touching live parts and causing electric shock accidents.
Process chamber door protection: Suitable for process chamber doors of etching machines and deposition equipment, linked with chamber pressure sensors. If the cabin door is not evacuated or opened during process operation, the module quickly cuts off the chamber power source to avoid safety risks caused by process gas leakage or vacuum environment damage.
High voltage module safety control: used for the shell interlocking of equipment high voltage modules (such as ion injection power supply, electrostatic suction cup high voltage unit). When the shell is opened, the high voltage output is forcibly disconnected, and an audible and visual alarm is triggered to remind on-site personnel to stay away from dangerous areas.
2. Adapt devices and systems
Host equipment adaptation: widely used in medium and high-risk semiconductor equipment such as AMAT Centura etching system, Endura deposition platform, Producer thin film deposition equipment, and ion implantation machine.
Compatibility with supporting modules: Directly interface with AMAT 0225-01622 controller, 0100-20001 electronic interface module, and safety grating (such as Sick C40E series) to form a closed-loop safety system of "state monitoring interlocking control alarm feedback".
Collaborative system linkage: supports data exchange with factory safety management platforms (such as EHS monitoring systems), real-time uploading of interlocking trigger records and fault information, facilitating safety event tracing and equipment safety status assessment.
4、 Operation standards and maintenance management
1. Installation and commissioning process
Preparation before installation: Confirm that the cleanliness of the installation area meets Class 100 standards, and remove dust and metal debris; Check the appearance of the module for damage and the interface for oxidation; Prepare specialized safety cables (cross-sectional area ≥ 1.5mm 2, insulation level ≥ 600V), torque wrenches (accuracy ± 5%), and anti-static tools.
Hardware installation: Fix the module on the DIN rail of the equipment control cabinet (with a distance of ≥ 30cm from high-voltage components to avoid electromagnetic interference); Connect redundant safety power supply (ensure that the positive and negative poles are not reversed, and the grounding resistance is ≤ 0.5 Ω); Connect the interlocking input (door switch, grating) and safety output (power cut-off relay) according to the interface definition, and label the cables to avoid misconnection.
Debugging and verification: Log in to the module through AMAT security configuration software and set interlocking logic (such as "cabinet door open → cut off high voltage" and "cabin door open → cut off chamber power"); Simulate various abnormal scenarios (such as manually opening cabinet doors, disconnecting safety barriers), verify whether the module triggers safety actions within 10ms, and check whether the alarm signal is output normally; Lock module parameters after debugging to prevent unauthorized modifications.
AMAT Applied Materials 0100-71047主框架互鎖模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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