AMAT Applied Materials 0190-77582適配器
1.產(chǎn) 品 資 料 介 紹：
- 工藝腔室閥門控制：驅(qū)動刻蝕機(jī)、PECVD 設(shè)備的反應(yīng)腔真空閥門（如閘閥、蝶閥），通過精準(zhǔn)行程控制閥門開度，調(diào)節(jié)腔室真空度與氣體流量，保障工藝環(huán)境穩(wěn)定性。
- 晶圓載臺定位：用于晶圓傳送腔室內(nèi)的載臺升降、平移機(jī)構(gòu)，通過氣缸的高精度定位特性，實(shí)現(xiàn)晶圓在傳送機(jī)器人與工藝腔室間的精準(zhǔn)對接，避免晶圓碰撞或位置偏移。
- 艙門與蓋板啟閉：適配設(shè)備維護(hù)艙門、工藝腔室蓋板的氣動啟閉機(jī)構(gòu)，結(jié)合磁性開關(guān)反饋位置狀態(tài)，確保艙門完全閉合后設(shè)備才能啟動工藝，防止工藝氣體泄漏或真空失效。
- 夾持與頂起機(jī)構(gòu)：在晶圓檢測設(shè)備中，驅(qū)動晶圓夾持爪或頂針機(jī)構(gòu)，實(shí)現(xiàn)晶圓的無損傷夾持與頂起，配合傳感器完成晶圓厚度、平整度檢測等動作。
- 主機(jī)設(shè)備適配：廣泛應(yīng)用于 AMAT Centura 刻蝕系統(tǒng)、Endura 沉積平臺、Track 光刻輔助設(shè)備及晶圓檢測設(shè)備。
- 配套模塊兼容：與 AMAT 0225-01622 控制器、0100-20001 電子接口模塊、氣動電磁閥組（如 AMAT 0020 系列閥島）直接對接，形成 “控制信號 - 氣動驅(qū)動 - 位置反饋” 的閉環(huán)執(zhí)行系統(tǒng)。
- 協(xié)同組件聯(lián)動：可與真空傳感器、壓力開關(guān)聯(lián)動，例如當(dāng)腔室真空度達(dá)標(biāo)后，氣缸驅(qū)動閥門開啟；若壓力異常，立即觸發(fā)氣缸復(fù)位，切斷工藝通路，保障設(shè)備安全。
- 安裝前準(zhǔn)備：確認(rèn)安裝區(qū)域潔凈度符合 Class 10 標(biāo)準(zhǔn)，用異丙醇（99.999% 純度）清潔氣缸表面及安裝面；檢查氣缸無劃痕、活塞桿無彎曲，磁性開關(guān)接線完好；準(zhǔn)備專用潔凈級氣管（如 PTFE 材質(zhì)，內(nèi)徑 6mm）、扭矩扳手（精度 ±5%）及防靜電工具。
- 硬件安裝：按設(shè)備圖紙固定氣缸，確保活塞桿軸線與驅(qū)動機(jī)構(gòu)中心線同軸度偏差≤0.1mm，避免側(cè)向力導(dǎo)致氣缸磨損；連接氣管（氣管需提前用氮?dú)獯祾?3 次，清除雜質(zhì)），氣管接頭采用卡套式連接，扭矩控制在 1.5-2N?m；固定磁性開關(guān)，調(diào)整其位置至氣缸行程兩端，確?；钊竭_(dá)時能穩(wěn)定觸發(fā)信號。
- 調(diào)試與驗(yàn)證：接入壓縮空氣（壓力調(diào)節(jié)至 0.4-0.6MPa，需經(jīng)過濾器除油除水），手動控制電磁閥測試氣缸往復(fù)運(yùn)動，檢查運(yùn)動是否順暢、無卡頓；通過設(shè)備控制系統(tǒng)設(shè)定運(yùn)動速度（調(diào)節(jié)流量控制閥），測試定位精度（使用激光位移傳感器測量），確保誤差≤±0.1mm；驗(yàn)證磁性開關(guān)信號是否正常反饋至控制器，確保位置狀態(tài)準(zhǔn)確識別。
AMAT Applied Materials 0190-77582適配器 英文資料：
Application scenarios and adaptation systems
1. Core application areas
As the "connection hub" of device components, this adapter mainly serves the key links in semiconductor manufacturing that require multi type signal/power adaptation:
RF module signal adaptation: used for connecting AMAT 0041-78374 RF matching components with RF power supplies (such as 0190 series), through N-type SMA interface conversion, to solve the interface difference problem of different RF devices, while reducing RF signal transmission loss through shielding structure, ensuring the power stability of plasma process.
Sensor and controller power/signal adaptation: Connect the device detection sensor (such as vacuum pressure sensor, temperature sensor) with the 0225-01622 controller, amplify the weak signal output by the sensor (such as 0-10mV) into a standard 0-5V signal through the built-in conditioning circuit, and provide stable 5V/12V DC power supply for the sensor to ensure accurate transmission of detection data.
Pneumatic component control signal conversion: adapted to the magnetic switch of cylinder component 3020-00121 and the electronic interface module 0100-20001, through terminal block pin connector conversion, to achieve standardized transmission of magnetic switch NPN signal, while avoiding signal interruption caused by loose wiring, ensuring the reliability of cylinder position feedback.
High voltage module power distribution: In the high-voltage unit of the equipment (such as the electrostatic suction cup high-voltage module), as a power distribution adapter, the 24V DC main power supply is converted into 5V/12V low-voltage power supply to supply power to the internal control circuit of the module. At the same time, overcurrent protection is used to prevent low-voltage circuit faults from affecting the main power system.
2. Adapt devices and systems
Host device adaptation: widely used in AMAT Centura etching systems, Endura deposition platforms, Producer thin film deposition equipment, and wafer inspection equipment.
Compatibility with supporting modules: Directly interface with AMAT 0100 series electronic interface modules, 0190 series RF components, 0225 series controllers, and third-party high-precision sensors (such as Honeywell pressure sensors and Omega temperature sensors) to form a closed-loop connection system of "signal/power input adaptation conversion output".
Collaborative component linkage: It can be linked with the equipment fault diagnosis module. When the adapter detects abnormalities such as overcurrent or signal interruption, it sends a fault signal to the controller in real time, triggers the equipment alarm, and records the fault log, making it easy for operation and maintenance personnel to quickly locate the problem.
4、 Operation standards and maintenance management
AMAT Applied Materials 0190-77582適配器 產(chǎn)品展示
產(chǎn)品視頻
3.其他產(chǎn)品
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4.其他英文產(chǎn)品
METSO IOP302 Numerical control module
METSO IOP303 Numerical control module
METSO IOP304 Sequential module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
