AMAT Applied Materials 3020-00121氣缸組件
1.產(chǎn) 品 資 料 介 紹：
- 工藝腔室閥門控制：驅(qū)動刻蝕機、PECVD 設(shè)備的反應(yīng)腔真空閥門（如閘閥、蝶閥），通過精準行程控制閥門開度，調(diào)節(jié)腔室真空度與氣體流量，保障工藝環(huán)境穩(wěn)定性。
- 晶圓載臺定位：用于晶圓傳送腔室內(nèi)的載臺升降、平移機構(gòu)，通過氣缸的高精度定位特性，實現(xiàn)晶圓在傳送機器人與工藝腔室間的精準對接，避免晶圓碰撞或位置偏移。
- 艙門與蓋板啟閉：適配設(shè)備維護艙門、工藝腔室蓋板的氣動啟閉機構(gòu)，結(jié)合磁性開關(guān)反饋位置狀態(tài)，確保艙門完全閉合后設(shè)備才能啟動工藝，防止工藝氣體泄漏或真空失效。
- 夾持與頂起機構(gòu)：在晶圓檢測設(shè)備中，驅(qū)動晶圓夾持爪或頂針機構(gòu)，實現(xiàn)晶圓的無損傷夾持與頂起，配合傳感器完成晶圓厚度、平整度檢測等動作。
- 主機設(shè)備適配：廣泛應(yīng)用于 AMAT Centura 刻蝕系統(tǒng)、Endura 沉積平臺、Track 光刻輔助設(shè)備及晶圓檢測設(shè)備。
- 配套模塊兼容：與 AMAT 0225-01622 控制器、0100-20001 電子接口模塊、氣動電磁閥組（如 AMAT 0020 系列閥島）直接對接，形成 “控制信號 - 氣動驅(qū)動 - 位置反饋” 的閉環(huán)執(zhí)行系統(tǒng)。
- 協(xié)同組件聯(lián)動：可與真空傳感器、壓力開關(guān)聯(lián)動，例如當腔室真空度達標后，氣缸驅(qū)動閥門開啟；若壓力異常，立即觸發(fā)氣缸復(fù)位，切斷工藝通路，保障設(shè)備安全。
- 安裝前準備：確認安裝區(qū)域潔凈度符合 Class 10 標準，用異丙醇（99.999% 純度）清潔氣缸表面及安裝面；檢查氣缸無劃痕、活塞桿無彎曲，磁性開關(guān)接線完好；準備專用潔凈級氣管（如 PTFE 材質(zhì)，內(nèi)徑 6mm）、扭矩扳手（精度 ±5%）及防靜電工具。
- 硬件安裝：按設(shè)備圖紙固定氣缸，確保活塞桿軸線與驅(qū)動機構(gòu)中心線同軸度偏差≤0.1mm，避免側(cè)向力導致氣缸磨損；連接氣管（氣管需提前用氮氣吹掃 3 次，清除雜質(zhì)），氣管接頭采用卡套式連接，扭矩控制在 1.5-2N?m；固定磁性開關(guān)，調(diào)整其位置至氣缸行程兩端，確?；钊竭_時能穩(wěn)定觸發(fā)信號。
- 調(diào)試與驗證：接入壓縮空氣（壓力調(diào)節(jié)至 0.4-0.6MPa，需經(jīng)過濾器除油除水），手動控制電磁閥測試氣缸往復(fù)運動，檢查運動是否順暢、無卡頓；通過設(shè)備控制系統(tǒng)設(shè)定運動速度（調(diào)節(jié)流量控制閥），測試定位精度（使用激光位移傳感器測量），確保誤差≤±0.1mm；驗證磁性開關(guān)信號是否正常反饋至控制器，確保位置狀態(tài)準確識別。
AMAT Applied Materials 3020-00121氣缸組件 英文資料：
1. Core application areas
As the "execution gripper" of equipment automation, this cylinder component mainly serves the key links that require precise pneumatic drive in semiconductor manufacturing:
Process chamber valve control: Drive the reaction chamber vacuum valves (such as gate valves and butterfly valves) of the etching machine and PECVD equipment, control the valve opening through precise stroke, adjust the chamber vacuum degree and gas flow rate, and ensure the stability of the process environment.
Wafer stage positioning: used for the lifting and translation mechanism of the stage in the wafer transfer chamber. Through the high-precision positioning characteristics of the cylinder, the wafer is accurately docked between the transfer robot and the process chamber, avoiding wafer collision or position deviation.
Cabin door and cover opening and closing: Adapt to the pneumatic opening and closing mechanism of equipment maintenance cabin doors and process chamber covers, combined with magnetic switch feedback position status, to ensure that the cabin door is completely closed before the equipment can start the process, preventing process gas leakage or vacuum failure.
Clamping and lifting mechanism: In wafer inspection equipment, the wafer clamping claw or top pin mechanism is driven to achieve non-destructive clamping and lifting of the wafer, and to cooperate with sensors to complete actions such as wafer thickness and flatness detection.
2. Adapt devices and systems
Host equipment adaptation: widely used in AMAT Centura etching systems, Endura deposition platforms, Track lithography auxiliary equipment, and wafer inspection equipment.
Compatibility with supporting modules: Directly interface with AMAT 0225-01622 controller, 0100-20001 electronic interface module, and pneumatic solenoid valve group (such as AMAT 0020 series valve island) to form a closed-loop execution system of "control signal pneumatic drive position feedback".
Collaborative component linkage: It can be linked with vacuum sensors and pressure switches, for example, when the chamber vacuum degree meets the standard, the cylinder drives the valve to open; If the pressure is abnormal, immediately trigger the cylinder reset, cut off the process path, and ensure equipment safety.
4、 Operation standards and maintenance management
1. Installation and commissioning process
Preparation before installation: Confirm that the cleanliness of the installation area meets Class 10 standards, and clean the cylinder surface and installation surface with isopropanol (99.999% purity); Check the cylinder for scratches, the piston rod for bending, and the magnetic switch wiring for integrity; Prepare specialized clean grade trachea (such as PTFE material, inner diameter 6mm), torque wrench (accuracy ± 5%), and anti-static tools.
AMAT Applied Materials 3020-00121氣缸組件 產(chǎn)品展示
產(chǎn)品視頻
3.其他產(chǎn)品
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ROLLS-ROYCE 5801-RRDIO15 WB I/O 警報模塊
NI CRI0-9073 控制器模塊
4.其他英文產(chǎn)品
METSO IOP302 Numerical control module
METSO IOP303 Numerical control module
METSO IOP304 Sequential module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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