AMAT Applied Materials  0190-01905控制器

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials 0190-01905控制器  英文資料：

1、 Core positioning and system of the product

The 0190-01905 controller is an important control component in the semiconductor equipment control system of Applied Materials Company (AMAT), belonging to the "Equipment Local Precision Control" product line. In the semiconductor manufacturing process, some key process links (such as local temperature control and specific component motion accuracy control) require specialized controllers for fine management. This controller is mainly suitable for AMAT Versys series ion implantation equipment and Silfex series silicon wafer growth equipment. By receiving instructions from the main control system, it can accurately control the local process parameters and motion components of the equipment, which is a key control unit to ensure the stable operation of specific process links and improve product quality.

2、 Analysis of core functions and technical characteristics

Based on the requirements for accuracy and response speed in local control of semiconductor equipment, as well as the application scenarios of the controller, its core functions and technical characteristics are as follows:

Accurate local parameter control: Equipped with a dual core ARM Cortex-A7 processor (with a main frequency of 800MHz), it has efficient local parameter processing capabilities and can independently control specific process parameters of the device, such as local magnetic field strength during ion implantation and local temperature during silicon wafer growth. Built in 20 bit ADC and 14 bit DAC, with parameter measurement accuracy of ± 0.2% FS and control accuracy of ± 0.3% FS. For example, in the silicon wafer growth process, the local temperature can be stably controlled within the range of ± 0.8 ℃, meeting the specific process requirements for parameter accuracy.

Specialized motion control capability: Provide exclusive motion control functions for specific moving parts of the equipment, such as the ion beam deflection mechanism in ion implantation equipment and the seed crystal rotation mechanism in silicon wafer growth equipment. Support the drive control of stepper motors and servo motors, suitable for motors in the 100-300W power range, with a speed control range of 0-2000rpm, a speed accuracy of ± 0.3rpm, and a position control error of ≤± 2 μ m, ensuring precise and stable movement of moving parts in specific process flows.

Simplified interface design: adopting a streamlined and efficient interface configuration, equipped with 1 EtherNet/IP communication interface for interaction with the main control system, 2 RS-485 interfaces for connecting local sensors and actuators, and 1 analog input/output interface (0-5V) for special parameter acquisition and control. The interface design focuses on local control requirements, reduces unnecessary interface redundancy, improves data transmission efficiency, and achieves a data transmission rate of ≥ 5Mbps to meet the real-time requirements of local control.

 AMAT Applied Materials 0190-01905控制器 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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