AMAT Applied Materials 0100-90853伺服控制模塊
1.產(chǎn) 品 資 料 介 紹：
- 多模式伺服控制能力：支持位置控制、速度控制、扭矩控制三種核心模式，可根據(jù)不同工藝需求靈活切換。位置控制模式下，支持脈沖 / 方向、A/B 相正交脈沖等多種位置指令輸入，定位精度達 ±0.1 脈沖當量（對應(yīng)線性位移≤0.05μm，適配高精度工作臺運動）；速度控制模式下，轉(zhuǎn)速調(diào)節(jié)范圍 0-5000rpm，轉(zhuǎn)速穩(wěn)定度≤±0.05rpm，滿足晶圓傳輸機械臂勻速運行需求；扭矩控制模式下，扭矩控制范圍 0-10N?m，控制精度 ±2% 額定扭矩，可用于靶材調(diào)節(jié)機構(gòu)的恒扭矩加載控制。
- 高性能信號處理與反饋：搭載 32 位高性能 DSP（數(shù)字信號處理器），運算頻率≥200MHz，可快速處理位置、速度、扭矩反饋信號，動態(tài)響應(yīng)時間≤5ms，確保伺服電機對指令的快速跟隨。支持增量式編碼器（最高分辨率 10000 線 / 轉(zhuǎn)）、絕對式編碼器（單圈分辨率 16384 線）及光柵尺（分辨率 0.1μm）等多種反饋器件接入，通過實時采集反饋信號形成閉環(huán)控制，有效補償機械間隙、負載擾動等因素導致的控制誤差，位置控制重復(fù)精度≤±0.3μm。
- 智能抗干擾與穩(wěn)定性優(yōu)化：內(nèi)置自適應(yīng) PID 調(diào)節(jié)算法，可根據(jù)負載變化（如晶圓傳輸時的負載增減）自動優(yōu)化 PID 參數(shù)，避免超調(diào)與振蕩，確保電機運動平穩(wěn)（運動過程中振動量≤0.05g）。采用多重信號濾波技術(shù)，包括電流環(huán)低通濾波、位置環(huán)卡爾曼濾波，可有效抑制電磁干擾（EMI）與機械振動對反饋信號的影響，信號信噪比≥60dB。同時具備電源波動補償功能，當輸入電壓在 DC 24V±10% 范圍內(nèi)波動時，輸出控制精度保持不變，適配半導體車間復(fù)雜供電環(huán)境。
AMAT Applied Materials 0100-90853伺服控制模塊 英文資料：
1、 Core positioning and system of the product
0100-90853 servo control module is a key control component in the semiconductor equipment servo control system of Applied Materials Company (AMAT), belonging to the "high-precision servo drive and control" product line. In core components such as wafer transfer robotic arms, coating and developing equipment workbenches, and target adjustment mechanisms in thin film deposition equipment that rely on micrometer or even nanometer level motion accuracy, the motion accuracy of servo motors directly determines process stability and product quality. This module serves as the "servo system brain" and is specifically designed to adapt to the servo motors of the AMAT Centura series etching equipment and Lithius Pro coating and developing equipment. By receiving instructions from the main controller, it achieves real-time and precise control of the servo motor speed, position, and torque, and is the core unit that ensures efficient, stable, and accurate operation of semiconductor equipment moving parts.
2、 Analysis of core functions and technical characteristics
Based on the strict requirements of semiconductor equipment servo systems for control accuracy (position error must be ≤± 0.5 μ m), response speed (dynamic response time ≤ 10ms), and stability, the core characteristics of this servo control module can be accurately disassembled into the following points:
Multi mode servo control capability: supports three core modes: position control, speed control, and torque control, which can be flexibly switched according to different process requirements. In position control mode, it supports multiple position command inputs such as pulse/direction, A/B phase orthogonal pulse, etc., with a positioning accuracy of ± 0.1 pulse equivalent (corresponding to linear displacement ≤ 0.05 μ m, suitable for high-precision worktable motion); In speed control mode, the speed adjustment range is 0-5000rpm, and the speed stability is ≤± 0.05rpm, which meets the requirement of uniform speed operation of the wafer transfer robotic arm; In torque control mode, the torque control range is 0-10N · m, and the control accuracy is ± 2% of the rated torque. It can be used for constant torque loading control of the target material adjustment mechanism.
High performance signal processing and feedback: Equipped with a 32-bit high-performance DSP (digital signal processor), the operating frequency is ≥ 200MHz, which can quickly process position, speed, and torque feedback signals. The dynamic response time is ≤ 5ms, ensuring that the servo motor can quickly follow instructions. Support the integration of various feedback devices such as incremental encoders (with a maximum resolution of 10000 lines/revolution), absolute encoders (with a single loop resolution of 16384 lines), and grating rulers (with a resolution of 0.1 μ m). By collecting feedback signals in real-time, closed-loop control is formed to effectively compensate for control errors caused by mechanical clearances, load disturbances, and other factors. The position control repeatability accuracy is ≤ ± 0.3 μ m.
Intelligent anti-interference and stability optimization: Built in adaptive PID adjustment algorithm, can automatically optimize PID parameters according to load changes (such as load increase or decrease during wafer transfer), avoid overshoot and oscillation, and ensure smooth motor motion (vibration amount ≤ 0.05g during motion). Adopting multiple signal filtering techniques, including current loop low-pass filtering and position loop Kalman filtering,
AMAT Applied Materials 0100-90853伺服控制模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
