AMAT Applied Materials  0100-09302檢測(cè)器模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials  0100-09302檢測(cè)器模塊 英文資料：

1、 Core positioning and system of the product

The 0100-09302 detector module is a key detection component in the semiconductor equipment monitoring system of Applied Materials Corporation (AMAT), belonging to the "Multi Parameter Precision Detection and State Perception" product line. Real time monitoring of equipment operating status (such as component temperature and vibration) and process parameters (such as gas concentration and film thickness) is key to ensuring process stability and product quality in core processes such as etching, deposition, coating, and development in semiconductor manufacturing. This module serves as the "device sensing nerve endings" and is specifically designed to adapt to the AMAT Centura series etching equipment and Producer series deposition equipment. By integrating multiple detection units, it achieves real-time acquisition and anomaly recognition of multi-dimensional parameters of the equipment, providing accurate monitoring data support for the main control system of the equipment (such as the 0190-02506 controller). It is the core monitoring unit that ensures the safe and efficient operation of semiconductor equipment.

2、 Analysis of core functions and technical characteristics

Based on the strict requirements of semiconductor equipment for monitoring accuracy (such as temperature detection error ≤ ± 0.3 ℃), response speed (such as gas concentration detection response time ≤ 1s), and stability, the core characteristics of this detector module can be accurately disassembled into the following points:

Multi parameter integrated detection capability: integrating four core detection units including temperature, vibration, gas concentration, and pressure, which can synchronously monitor key parts of equipment and process environmental parameters. High precision platinum resistance (PT1000) is used for temperature detection, with a detection range of -50~300 ℃ and an accuracy of ≤± 0.3 ℃. It is suitable for temperature monitoring of components such as cavity walls and motor casings; The vibration detection adopts a piezoelectric accelerometer with a measurement range of 0-50g, a frequency response of 1-1000Hz, an accuracy of ≤± 2% FS, and can capture abnormal vibrations of moving parts such as robotic arms and workbenches; Gas concentration detection is aimed at commonly used process gases in semiconductors (such as O ?, CF ?, SiH ?), using non dispersive infrared (NDIR) principle, with a detection lower limit as low as 1ppm and an accuracy of ≤± 5% FS, to prevent gas leakage or abnormal concentration from affecting the process; The pressure detection adopts a miniature capacitive pressure sensor with a measurement range of 0-1MPa and an accuracy of ≤± 0.2% FS, which is suitable for the pressure monitoring needs of gas pipelines and vacuum chambers.

High speed data acquisition and transmission: equipped with a 16 bit high-precision ADC (analog-to-digital converter), the sampling frequency of each type of detection parameter is independently adjustable (up to 1kHz), ensuring fast capture of dynamic changes in parameters; Equipped with one EtherNet/IP industrial Ethernet interface (transmission rate 100Mbps, cycle ≤ 10ms) and one RS-485 interface, the collected monitoring data can be uploaded in real time to the main control system and factory MES system, with a data transmission delay of ≤ 5ms, meeting the requirements of real-time control and remote monitoring of equipment. Simultaneously supporting local data caching (with built-in 8GB storage unit), it can store at least 30 days of historical monitoring data for easy fault tracing and process analysis.

 AMAT Applied Materials  0100-09302檢測(cè)器模塊 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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