AMAT Applied Materials  0190-02506 控制器模塊

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials  0190-02506 控制器模塊英文資料：

1、 Core positioning and system of the product

The 0190-02506 controller module is the core command component in the semiconductor equipment central control system of Applied Materials Corporation (AMAT), and belongs to the "Equipment Global Control and Collaboration" product line. In the entire process of semiconductor manufacturing, from wafer transfer, process execution to quality monitoring, multiple systems need to work together. This controller module serves as the "device brain" and is specifically adapted to the AMAT Centura series etching equipment and Producer series deposition equipment. By integrating signals from various subsystems (such as drive systems, vacuum systems, and RF systems), it achieves centralized control of equipment operating parameters, automated scheduling of process flows, and rapid response to abnormal situations. It is the core control unit that ensures efficient, stable, and accurate operation of semiconductor equipment.

2、 Analysis of core functions and technical characteristics

Based on the strict requirements of semiconductor equipment for control accuracy, response speed, and compatibility (such as process parameter control error of ≤± 0.5%), the core characteristics of this controller module can be accurately disassembled into the following points:

Multi subsystem collaborative control: Equipped with a high-performance multi-core processor (quad core ARM Cortex-A9, main frequency 1.2GHz), it has powerful data processing and instruction scheduling capabilities, and can simultaneously access 16 different types of subsystem interfaces (including drive control interface, vacuum monitoring interface, RF power interface, sensor signal interface) to achieve collaborative control of motor drive, vacuum valve, RF generator and other components. The system response cycle is ≤ 1ms, ensuring the synchronization of subsystem action timing (deviation ≤ 10 μ s).

High precision process parameter control: Built in 24 bit high-precision ADC (analog-to-digital converter) and 16 bit DAC (digital to analog converter), supporting bidirectional conversion of 0-10V analog signals and digital signals, can real-time collect and control key process parameters (such as chamber temperature, gas flow rate, RF power), with parameter measurement accuracy of ± 0.1% FS and control accuracy of ± 0.2% FS. For example, in etching process, the chamber temperature can be stably controlled within the range of ± 0.5 ℃, and the gas flow control error is ≤ ± 1sccm, meeting the requirements of advanced process for process stability.

Flexible programming and process storage: Supports IEC 61131-3 standard programming language (including ladder diagrams, functional block diagrams, structured text), engineers can customize control logic and processes according to different process requirements; Built in large capacity storage unit (8GB NAND Flash+2GB DDR3), capable of storing no less than 100 complete process recipes (including process parameters, step timing, safety interlock conditions), with recipe call time ≤ 500ms, achieving fast process switching for multi variety chip manufacturing.

Comprehensive safety interlocking and fault handling: Integrated SIL 3 safety control unit, pre-set with more than 20 types of safety interlocking logic (such as vacuum pressure loss interlocking, RF over power interlocking, and door control unassociated locking),

 AMAT Applied Materials 0190-02506 控制器模塊 產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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