AMAT Applied Materials 0190-09419驅動器
1.產 品 資 料 介 紹：
- 多類型電機適配驅動：支持交流伺服電機與步進電機的雙模驅動模式，適配功率范圍 50W-500W 的電機型號，兼容增量式編碼器（1024-10000 線）與絕對式編碼器信號輸入，可實現轉速 0-3000rpm 的無級調節(jié)，轉速控制精度達 ±0.1rpm，滿足涂覆頭移動、晶圓吸盤旋轉等不同運動場景的動力需求。
- 高精度運動閉環(huán)控制：內置 32 位 DSP 數字信號處理器與 PID + 前饋控制算法，配合位置反饋信號實現三重閉環(huán)控制 —— 位置控制誤差≤±1 脈沖當量（對應線性位移≤0.1μm），速度響應時間≤10ms，扭矩控制精度達 ±1% 額定扭矩。針對高速啟停場景，具備自動加減速規(guī)劃功能（加減速時間 0.1-10s 可調），避免運動沖擊導致的晶圓偏移或部件磨損。
- 智能信號處理與隔離：搭載 8 路數字輸入 / 輸出通道與 4 路模擬量輸入通道，可采集電機溫度、振動及外部限位信號，信號采樣頻率≥10kHz；采用光電隔離技術實現控制回路與功率回路的電氣隔離（隔離電壓≥2500V DC），配合低通濾波器與脈沖整形器抑制電磁噪聲，確保信號傳輸延遲≤1μs，適配半導體設備強電磁環(huán)境下的穩(wěn)定運行。
AMAT Applied Materials 0190-09419驅動器 英文資料：
1、 Core positioning and system of the product
The 0190-09419 driver is a key power drive component in the motion control system of semiconductor equipment at Applied Materials Corporation (AMAT), belonging to the "high-precision servo drive" product line. In core processes such as wafer transfer, coating and development, and film deposition that rely on micrometer level motion control, the speed stability and position accuracy of the motor directly determine the success or failure of the process. As the "power conversion center", this driver is specifically adapted to the servo motor system of AMAT Lithium Pro coating and development equipment and Endura PVD deposition equipment. By converting the digital instructions of the equipment's main controller into precise driving signals, it achieves closed-loop control of motor speed, torque, and position, and is the core execution unit that ensures high-precision movement of equipment moving parts (such as coating heads and wafer robotic arms).
2、 Analysis of core functions and technical characteristics
Considering the stringent requirements for precision, response speed, and reliability in semiconductor device motion control (such as wafer transfer position error requiring ≤± 1 μ m), the core characteristics of this driver can be accurately disassembled into the following points:
Multi type motor adaptation drive: supports dual-mode drive mode of AC servo motor and stepper motor, adapts to motor models with power range of 50W-500W, compatible with incremental encoder (1024-10000 lines) and absolute encoder signal input, can achieve stepless adjustment of speed from 0-3000rpm, with speed control accuracy of ± 0.1rpm, meeting the power requirements of different motion scenarios such as coating head movement and wafer suction cup rotation.
High precision motion closed-loop control: Built in 32-bit DSP digital signal processor and PID+feedforward control algorithm, combined with position feedback signal to achieve triple closed-loop control - position control error ≤ ± 1 pulse equivalent (corresponding to linear displacement ≤ 0.1 μ m), speed response time ≤ 10ms, torque control accuracy up to ± 1% of rated torque. For high-speed start stop scenarios, it has an automatic acceleration and deceleration planning function (acceleration and deceleration time adjustable from 0.1-10s) to avoid wafer offset or component wear caused by motion impact.
Intelligent signal processing and isolation: equipped with 8 digital input/output channels and 4 analog input channels, capable of collecting motor temperature, vibration, and external limit signals, with a signal sampling frequency of ≥ 10kHz; Adopting optoelectronic isolation technology to achieve electrical isolation between control circuit and power circuit (isolation voltage ≥ 2500V DC), combined with low-pass filter and pulse shaper to suppress electromagnetic noise, ensuring signal transmission delay ≤ 1 μ s, suitable for stable operation in strong electromagnetic environment of semiconductor equipment.
AMAT Applied Materials 0190-09419驅動器 產品展示
產品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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