AMAT Applied Materials 0010-09093電源供應(yīng)電池
1.產(chǎn) 品 資 料 介 紹:
技術(shù)維度 | 具體參數(shù)與實現(xiàn)細(xì)節(jié) |
部件屬性 | 半導(dǎo)體設(shè)備專用應(yīng)急電源模塊,適配 AMAT 設(shè)備電源管理系統(tǒng)的無縫對接需求 |
安裝定位 | 設(shè)備電氣柜內(nèi)部獨立電源艙,與主電源模塊間距≥30mm,需遠(yuǎn)離高溫發(fā)熱部件(如功率電阻) |
核心功能 | 應(yīng)急供電、電量監(jiān)測、充放電保護(hù),支持主電源中斷后≥4 小時的關(guān)鍵系統(tǒng)持續(xù)供電 |
電池類型 | 鋰 - 離子電池(Li - Ion),采用高容量電芯組合(單電芯容量≥2000mAh),無記憶效應(yīng) |
電氣性能 | 額定電壓 14.8V,額定容量 10Ah,最大放電電流 5A,充電時間≤3 小時(0 - 100% 電量) |
保護(hù)機(jī)制 | 內(nèi)置過充保護(hù)(充電電壓上限 16.8V)、過放保護(hù)(放電電壓下限 10.8V)、過流保護(hù)(短路電流≤20A)及溫度保護(hù)(工作溫度 - 10℃至 55℃) |
- 主電源中斷應(yīng)急場景:在光刻、離子注入等高精度工藝設(shè)備中,當(dāng)工廠電網(wǎng)波動或主電源故障時,該電池可在 50ms 內(nèi)完成供電切換,保障晶圓傳輸機(jī)械臂的定位精度(偏差≤0.01mm),避免晶圓碰撞損壞。
- 設(shè)備維護(hù)斷電場景:在設(shè)備日常維護(hù)需斷開主電源時,電池可為設(shè)備控制系統(tǒng)的參數(shù)存儲模塊供電,防止工藝配方、設(shè)備校準(zhǔn)數(shù)據(jù)等關(guān)鍵信息丟失,減少維護(hù)后設(shè)備重啟調(diào)試時間(縮短至 30 分鐘以內(nèi))。
- 潔凈室特殊環(huán)境場景:電池外殼采用阻燃 ABS 材料(阻燃等級 UL94 V - 0),表面經(jīng)防靜電處理(表面電阻 10? - 10?Ω),可耐受潔凈室中 75% 酒精的定期擦拭消毒,符合 ISO 5 級潔凈室的顆??刂埔螅苛⒎接⒊撸?.5μm 顆粒<100 個)。
AMAT Applied Materials 0010-09093電源供應(yīng)電池 英文資料:
1、 Product positioning and core values
AMAT 0010-09093 power supply battery is an emergency power supply component dedicated to Applied Materials semiconductor equipment, mainly providing uninterrupted power support for critical control systems such as chamber pressure monitoring modules and wafer transfer positioning systems. In the semiconductor production process, when the main power supply system suddenly interrupts, the battery can quickly switch power supply modes to avoid equipment data loss, process interruption, and wafer damage caused by power outages. It is the "backup energy core" that ensures the continuous and stable operation of semiconductor equipment and reduces production risks.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
Component Attributes
Special emergency power module for semiconductor equipment, compatible with seamless integration requirements of AMAT equipment power management system
Installation and positioning
The independent power supply compartment inside the equipment electrical cabinet should be at least 30mm away from the main power module and should be kept away from high-temperature heating components (such as power resistors)
Core functions
Emergency power supply, power monitoring, charge and discharge protection, supporting continuous power supply for critical systems for ≥ 4 hours after the main power supply is interrupted
Battery type
Lithium ion battery (Li Ion), using high-capacity cell combination (single cell capacity ≥ 2000mAh), no memory effect
Electrical performance
Rated voltage 14.8V, rated capacity 10Ah, maximum discharge current 5A, charging time ≤ 3 hours (0-100% power)
Protection mechanism
Built in overcharge protection (upper limit of charging voltage 16.8V), overdischarge protection (lower limit of discharging voltage 10.8V), overcurrent protection (short circuit current ≤ 20A), and temperature protection (working temperature -10 ℃ to 55 ℃)
3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
Emergency scenario of main power interruption: In high-precision process equipment such as photolithography and ion implantation, when the factory power grid fluctuates or the main power supply fails, the battery can complete power switching within 50ms, ensuring the positioning accuracy of the wafer transfer robotic arm (deviation ≤ 0.01mm) and avoiding wafer collision damage.
Equipment maintenance power-off scenario: When the main power supply needs to be disconnected for daily maintenance of the equipment, the battery can supply power to the parameter storage module of the equipment control system, preventing the loss of key information such as process formulas and equipment calibration data, and reducing the equipment restart and debugging time after maintenance (shortened to less than 30 minutes).
Special environmental scenario of clean room: The battery casing is made of flame-retardant ABS material (flame retardant grade UL94 V-0), and the surface has undergone anti-static treatment (surface resistance 10 ? -10 ? Ω). It can withstand regular wiping and disinfection with 75% alcohol in the clean room and meets the particle control requirements of ISO Class 5 clean rooms (>0.5 μ m particles<100 per cubic foot).
AMAT Applied Materials 0010-09093電源供應(yīng)電池 產(chǎn)品展示

產(chǎn)品視頻
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| 6ES5985-1BA21 | 6DD1684-0BH2 | 073-659724-00 |
| 6ES5984-1UA41 | 193X737ACG02 | F31X171TMAAEG2 |
| 6ES5983-0UA11 | 03-284352-00 | 073-450886-00 |
| 6ES5982-2CA12 | 531X113PSFAPG1 | TRICONEX 2870H |
| 6ES5981-0JA11 | 331X210AAG08 | TRICONEX 3623 |
| 6ES5981-0GB11 | 6DD1684-0EB0 | TRICONEX 3706A |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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