AMAT Applied Materials 0100-09293矩陣板組件
1.產(chǎn) 品 資 料 介 紹：
技術(shù)維度 | 具體參數(shù)與實(shí)現(xiàn)細(xì)節(jié) |
部件屬性 | 腔體專(zhuān)用串行通信矩陣模塊，適配 AMAT 設(shè)備 Seriplex 總線協(xié)議的模塊化集成需求 |
安裝定位 | 設(shè)備腔體側(cè)部電氣控制柜內(nèi)，與腔體主控單元通過(guò)專(zhuān)用接口直連，安裝間距需滿足≥50mm 散熱要求 |
核心功能 | 串行信號(hào)轉(zhuǎn)發(fā)、多設(shè)備通信適配、故障信號(hào)隔離，支持≥8 路并行數(shù)據(jù)傳輸通道 |
材質(zhì)體系 | 基板采用 FR-4 玻璃環(huán)氧樹(shù)脂（介電常數(shù) 4.2-4.7），觸點(diǎn)區(qū)域采用鍍金銅箔（厚度≥30μm） |
工藝標(biāo)準(zhǔn) | 采用沉金工藝處理焊盤(pán)，線寬公差控制在 ±0.05mm，絕緣電阻≥1012Ω，耐電壓≥500V AC |
通信性能 | 支持 Seriplex 協(xié)議下 1Mbps 傳輸速率，信號(hào)延遲≤10μs，誤碼率＜10?? |
- 腔體工藝控制場(chǎng)景：在化學(xué)氣相沉積（CVD）、物理氣相沉積（PVD）設(shè)備腔體中，負(fù)責(zé)連接壓力傳感器、溫度控制器、氣體流量閥等部件，實(shí)現(xiàn)工藝參數(shù)的實(shí)時(shí)采集與指令下發(fā)，保障薄膜沉積厚度均勻性。
- 潔凈室運(yùn)行環(huán)境：基板采用無(wú)鹵素阻燃材料，表面經(jīng)防靜電處理（表面電阻 10?-10?Ω），可耐受潔凈室高頻酒精擦拭，符合 ISO 5 級(jí)潔凈室顆粒釋放標(biāo)準(zhǔn)（每立方英尺＞0.5μm 顆粒＜100 個(gè)）。
- 設(shè)備維護(hù)調(diào)試場(chǎng)景：預(yù)留專(zhuān)用測(cè)試接口，支持在線信號(hào)診斷與通路檢測(cè)，可快速定位通信故障點(diǎn)，配合 AMAT 設(shè)備管理系統(tǒng)實(shí)現(xiàn)故障預(yù)警與遠(yuǎn)程排查。
AMAT Applied Materials 0100-09293矩陣板組件 英文資料：
1、 Product positioning and core values
The AMAT 0100-09293 matrix board component (official logo: CHAMBER STORPLEX MATRIX (CH.C)) is a factory specific communication integration component for Applied Materials semiconductor equipment cavity systems. As the core hub of the Seriplex network, it undertakes the signal transfer and distribution functions between various sensors, actuators, and main control systems inside the device cavity. In precision process equipment such as photolithography and etching, it is the "nerve center" that ensures real-time feedback of cavity parameters and precise coordination of actions, directly affecting the process stability and equipment operation reliability of wafer processing.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
Component Attributes
The dedicated serial communication matrix module for the cavity is designed to meet the modular integration requirements of the Seriplex bus protocol for AMAT devices
Installation and positioning
The electrical control cabinet on the side of the equipment cavity is directly connected to the main control unit of the cavity through a dedicated interface, and the installation distance must meet the requirement of ≥ 50mm heat dissipation
Core functions
Serial signal forwarding, multi device communication adaptation, fault signal isolation, supporting ≥ 8 parallel data transmission channels
Material system
The substrate is made of FR-4 glass epoxy resin (dielectric constant 4.2-4.7), and the contact area is made of gold-plated copper foil (thickness ≥ 30 μ m)
Process standards
Using immersion gold process to treat solder pads, the line width tolerance is controlled within ± 0.05mm, the insulation resistance is ≥ 10 12 Ω, and the withstand voltage is ≥ 500V AC
Communication performance
Support 1Mbps transmission rate under Seriplex protocol, signal delay ≤ 10 μ s, error rate<10 ??
3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
Scenario of cavity process control: In chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment cavities, responsible for connecting pressure sensors, temperature controllers, gas flow valves and other components to achieve real-time acquisition of process parameters and command issuance, ensuring the uniformity of thin film deposition thickness.
Clean room operating environment: The substrate is made of halogen-free flame-retardant material, and the surface has undergone anti-static treatment (surface resistance 10 ? -10 ? Ω). It can withstand high-frequency alcohol wiping in clean rooms and meets the ISO Class 5 clean room particle release standard (>0.5 μ m particles<100 per cubic foot).
Equipment maintenance and debugging scenario: Reserve dedicated testing interfaces, support online signal diagnosis and path detection, quickly locate communication fault points, and cooperate with AMAT equipment management system to achieve fault warning and remote troubleshooting.
AMAT Applied Materials 0100-09293矩陣板組件 產(chǎn)品展示
產(chǎn)品視頻
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| 6ES5998-1DL31 | 531X111PSHSWG2 | 531X308PCSADG2 |
| 6ES5998-1DB11 | 531X116SHAAAG2 | 208-500103-3 |
| 6ES5998-0UK31 | 531X121PCRAGG1 | 720-11200-002 |
| 6ES5998-0UF33 | 531X111PSHAPG1 | 820-30004-00 |
| 6ES5998-0SH21 | 193X804ADG02 | 710-655005-00 |
| 6ES5998-0MA34 | 531X113PSFASG1 | 710-659465-20 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
