AMAT Applied Materials 0020-04129頂部鉸鏈支架
1.產(chǎn) 品 資 料 介 紹：
技術(shù)維度 | 具體參數(shù)與實(shí)現(xiàn)細(xì)節(jié) |
部件屬性 | 高精度機(jī)械固定類(lèi)支架，適配半導(dǎo)體設(shè)備鉸鏈系統(tǒng)的模塊化裝配需求 |
安裝定位 | 設(shè)備上部鉸鏈集成區(qū)域，與門(mén)蓋旋轉(zhuǎn)軸心同軸對(duì)齊，安裝基準(zhǔn)誤差≤0.1mm |
核心功能 | 鉸鏈支撐、力矩承載、定位校準(zhǔn)，可承受≥10 萬(wàn)次開(kāi)合循環(huán)的機(jī)械應(yīng)力沖擊 |
材質(zhì)體系 | 主體采用 304/316L 不銹鋼（含鉻≥18%、鎳≥8%）或高強(qiáng)度鋁合金，部分高端型號(hào)選用鈦合金復(fù)合結(jié)構(gòu) |
表面工藝 | 經(jīng)無(wú)鉻鈍化 + 電解拋光處理（Ra≤0.8μm），鹽霧測(cè)試達(dá) 500 小時(shí)無(wú)紅銹，適配潔凈室化學(xué)腐蝕環(huán)境 |
固定機(jī)制 | 采用粗牙螺紋螺釘 + 鋸齒墊片組合固定，配合鉸鏈銷(xiāo)軸實(shí)現(xiàn)同軸定位，防振松脫設(shè)計(jì)通過(guò) 10-2000Hz 振動(dòng)測(cè)試 |
- 工藝設(shè)備腔體防護(hù)：用于光刻、刻蝕設(shè)備的真空腔體門(mén)蓋鉸鏈固定，通過(guò)精準(zhǔn)的軸心定位確保門(mén)體與腔體的密封貼合，避免工藝氣體泄漏與外部顆粒侵入。
AMAT Applied Materials 0020-04129頂部鉸鏈支架 英文資料：
1、 Product positioning and core values
The top hinge bracket of AMAT 0020-04129 serves as the original core structural component of Applied Materials semiconductor equipment, providing rigid support for the hinge system of the upper chamber door cover and maintenance port of the equipment. In the high-frequency operation scenarios of semiconductor manufacturing, it not only undertakes the basic functions of hinge load-bearing and opening and closing torque transmission, but also ensures the sealing and positioning accuracy of door closure through precision structural design. It is a key component to avoid particle pollution caused by mechanical looseness and reduce the risk of equipment shutdown.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
Component Attributes
High precision mechanical fixed bracket, suitable for modular assembly requirements of semiconductor equipment hinge systems
Installation and positioning
The upper hinge integration area of the equipment is aligned coaxially with the rotation axis of the door cover, and the installation reference error is ≤ 0.1mm
Core functions
Hinge support, torque bearing, positioning calibration, capable of withstanding mechanical stress impact of ≥ 100000 opening and closing cycles
Material system
The main body is made of 304/316L stainless steel (chromium ≥ 18%, nickel ≥ 8%) or high-strength aluminum alloy, and some high-end models use titanium alloy composite structure
Surface technology
After chromium free passivation and electrolytic polishing treatment (Ra ≤ 0.8 μ m), salt spray testing for 500 hours without red rust, suitable for chemical corrosion environment in clean rooms
Fixed mechanism
Using a combination of coarse thread screws and serrated washers for fixation, coupled with hinge pins for coaxial positioning, anti vibration loosening design has passed 10-2000Hz vibration testing
3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
Process equipment chamber protection: used for fixing the hinge of the vacuum chamber door cover of lithography and etching equipment, ensuring the sealing fit between the door body and the chamber through precise axis positioning, avoiding process gas leakage and external particle invasion.
AMAT Applied Materials 0020-04129頂部鉸鏈支架 產(chǎn)品展示
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3.其他產(chǎn)品
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SOCAPEL SOCASIN?ST1/25-310? 交流電伺服器
AUTOMATION 5AC600.FLAP-K11插槽接口模塊
4.其他英文產(chǎn)品
WOODWARD 8440-1713 D Control the governor
TRICONEX EPI3382 Control card
ICS TRIPLEX 9100 base
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| 6ES5998-8MB22 | 531X116SHAAAG1 | 531X308PCSAEG3 |
| 6ES5998-8MA12 | 531X102CCHAEM1 | 740-689986-002 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
