AMAT Applied Materials 0120-00794過程傳感器主板
1.產(chǎn) 品 資 料 介 紹:
- 集成 8-16 路傳感器接口,支持熱電偶(K/J 型)、RTD(鉑電阻)、4-20mA 模擬信號輸入,可同步采集溫度、壓力、流量等工藝參數(shù),16 位 ADC 轉(zhuǎn)換精度,測量誤差≤±0.1% FS。
- 具備信號濾波與冷端補償功能,能抑制車間電磁干擾,溫度采集范圍 - 200~1300℃,適配半導體蝕刻、沉積工藝的高精度監(jiān)測需求。
- 配備 RS485/Modbus 接口,可直接對接 AMAT 0190-24007 單板計算機、20-000314-003 模擬輸入模塊,實時上傳采集數(shù)據(jù),支持遠程校準傳感器參數(shù)。
- 預留 2 路數(shù)字量輸出接口,可聯(lián)動控制閥門、加熱器等執(zhí)行元件,形成工藝參數(shù)監(jiān)測 - 控制閉環(huán),提升設(shè)備自動化程度。
- 工作溫度 - 20~+70℃,濕度 5%-95%(無凝露),防護等級 IP20,表面防靜電噴涂,適配半導體潔凈車間溫濕度波動與粉塵控制要求。
- 采用光電隔離技術(shù)(隔離電壓≥2500V DC),抗電磁干擾符合 EN 55022 Class B,避免射頻設(shè)備干擾導致的信號失真。
- 核心芯片選用工業(yè)級型號,經(jīng) 10 萬次循環(huán)采集測試,MTBF≥8 萬小時,支持 7×24 小時連續(xù)運行,適配半導體工廠高稼動率需求。
- 符合 UL/CE/RoHS 認證,原廠提供 1-3 年質(zhì)保,支持快速備件更換,減少因主板故障導致的設(shè)備停機時間。
AMAT Applied Materials 0120-00794過程傳感器主板 英文資料:
1. Signal acquisition performance (AMAT 0120-00794)
Integrate 8-16 sensor interfaces, support thermocouple (K/J type), RTD (platinum resistance), 4-20mA analog signal input, can synchronously collect process parameters such as temperature, pressure, flow rate, etc., 16 bit ADC conversion accuracy, measurement error ≤ ± 0.1% FS
Equipped with signal filtering and cold junction compensation functions, it can suppress electromagnetic interference in the workshop, with a temperature acquisition range of -200~1300 ℃, suitable for high-precision monitoring requirements of semiconductor etching and deposition processes.
2. Adaptation and linkage (AMAT 0120-00794)
Equipped with RS485/Modbus interface, it can directly interface with AMAT 0190-24007 single board computer and 20-000314-003 analog input module, upload and collect data in real time, and support remote calibration of sensor parameters.
Reserve 2 digital output interfaces, which can be linked to control valve, heater and other actuating components, forming a process parameter monitoring control loop and improving equipment automation.
3. Environment and Protection (AMAT 0120-00794)
Working temperature -20~+70 ℃, humidity 5% -95% (no condensation), protection level IP20, surface anti-static spraying, suitable for temperature and humidity fluctuations and dust control requirements in semiconductor clean workshops.
Adopting optoelectronic isolation technology (isolation voltage ≥ 2500V DC), anti electromagnetic interference complies with EN 55022 Class B, avoiding signal distortion caused by RF equipment interference.
4. Reliability (AMAT 0120-00794)
The core chip is selected from industrial grade models, which have undergone 100000 cycles of data collection and testing. The MTBF is ≥ 80000 hours and supports continuous operation for 7 × 24 hours, meeting the high utilization requirements of semiconductor factories.
Compliant with UL/CE/RoHS certification, the original factory provides a 1-3 year warranty, supports quick replacement of spare parts, and reduces equipment downtime caused by motherboard failures.
AMAT Applied Materials 0120-00794過程傳感器主板 產(chǎn)品展示

產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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