AMAT Applied Materials 0100-90271晶圓裝載機(jī)聯(lián)鎖模塊
1.產(chǎn) 品 資 料 介 紹：
- 適用系統(tǒng)：優(yōu)先適配 AMAT FOUP 系列晶圓裝載機(jī)，兼容 AMAT 同類晶圓傳輸設(shè)備安全回路
- 聯(lián)鎖功能：支持 2 路門體聯(lián)鎖檢測（裝載機(jī)前門 + 艙門），1 路安全回路輸出（常閉觸點(diǎn)）
- 信號類型：數(shù)字量輸入（24V DC，檢測門體傳感器信號）、繼電器輸出（250V AC/30V DC，5A）
- 保護(hù)機(jī)制：過壓保護(hù)（30V DC 觸發(fā)）、短路保護(hù)（輸出端短路時自動斷開）
- 電源需求：DC 24V±10%，功耗≤5W（靜態(tài)功耗≤1W）
- 物理尺寸：長 80mm× 寬 60mm× 高 25mm，安裝孔位適配原廠設(shè)備支架，M2.5 螺絲固定
- 環(huán)境適應(yīng)：工作溫度 0℃-55℃，相對濕度≤85% RH（無凝露），抗電磁干擾符合 EN 61000-6-2 標(biāo)準(zhǔn)
- 安全冗余：雙路門體檢測獨(dú)立觸發(fā)，任一聯(lián)鎖異常立即切斷安全回路，響應(yīng)時間≤10ms
- 原廠兼容：尺寸、接口定義、觸點(diǎn)參數(shù)與原廠完全匹配，替換后無需重新校準(zhǔn)安全回路
- 高可靠性：繼電器觸點(diǎn)壽命≥10 萬次，工業(yè)級檢測芯片抗干擾，MTBF≥6 萬小時
AMAT Applied Materials 0100-90271晶圓裝載機(jī)聯(lián)鎖模塊 英文資料：
1、 Product Overview
The AMAT 0100-90271 wafer loader interlock module is the safety control core component of semiconductor wafer loaders (such as AMAT Front Opening Unified Pod, FOUP loader), mainly realizing equipment door interlock, door status monitoring, and safety circuit triggering functions. When the loader door is not closed or the cabin door is abnormally opened, the module will immediately cut off the equipment power circuit to prevent wafer collision and personnel accidental contact risks. It adapts to the safety protection requirements of the semiconductor wafer transmission link and can directly ｒｅｐｌａｃｅ the original module of the same model without adjusting the equipment safety control logic.
2、 Key parameters
Applicable system: Priority adaptation to AMAT FOUP series wafer loader, compatible with AMAT's similar wafer transfer equipment safety circuit
Interlocking function: Supports 2-way door interlock detection (loader front door+cabin door), 1-way safety circuit output (normally closed contact)
Signal type: digital input (24V DC, detecting door sensor signal), relay output (250V AC/30V DC, 5A)
Protection mechanism: overvoltage protection (triggered by 30V DC), short circuit protection (automatically disconnected when output terminal short circuit occurs)
Power requirement: DC 24V ± 10%, power consumption ≤ 5W (static power consumption ≤ 1W)
Physical dimensions: 80mm in length, 60mm in width, and 25mm in height. The installation holes are compatible with the original equipment bracket and secured with M2.5 screws
Environmental adaptation: working temperature of 0 ℃ -55 ℃, relative humidity ≤ 85% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-2 standard
3、 Core advantages
Security redundancy: The dual door detection is independently triggered, and any interlock abnormality will immediately cut off the safety circuit, with a response time of ≤ 10ms
Original factory compatibility: The size, interface definition, and contact parameters are completely matched with the original factory, and there is no need to recalibrate the safety circuit after replacement
High reliability: Relay contact life ≥ 100000 times, industrial grade detection chip anti-interference, MTBF ≥ 60000 hours
AMAT Applied Materials 0100-90271晶圓裝載機(jī)聯(lián)鎖模塊 產(chǎn)品展示
產(chǎn)品視頻
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| AMAT 0190-16010 | AMAT 0190-76252 | 369-LO-0-M-0-0-0-E |
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
