AMAT Applied Materials 0100-00003步進驅(qū)動器模塊
1.產(chǎn) 品 資 料 介 紹：
- 適用系統(tǒng)：優(yōu)先適配 AMAT Endura 系列晶圓傳輸設(shè)備，兼容 AMAT 同類步進電機驅(qū)動場景
- 電機適配：支持兩相混合式步進電機，額定電流 1.5A-3A，適配電機步距角 1.8°（細(xì)分后最小步距 0.09°）
- 控制方式：脈沖 + 方向信號控制，支持 16 檔細(xì)分（1-256 細(xì)分可調(diào)），脈沖頻率≤200kHz
- 保護功能：過流保護（3.5A 觸發(fā)）、過溫保護（85℃觸發(fā)）、欠壓保護（18V DC 觸發(fā)）、短路保護
- 電源需求：DC 24V-48V 寬壓輸入，功耗≤30W（滿負(fù)載運行）
- 物理尺寸：長 100mm× 寬 60mm× 高 30mm，安裝孔位適配原廠設(shè)備支架，螺絲固定（M3 規(guī)格）
- 環(huán)境適應(yīng)：工作溫度 - 5℃-65℃，相對濕度≤90% RH（無凝露），抗電磁干擾符合 EN 61000-6-3 標(biāo)準(zhǔn)
AMAT Applied Materials 0100-00003步進驅(qū)動器模塊 英文資料：
1、 Product Overview
The AMAT 0100-00003 stepper driver module is the core driving component of semiconductor wafer transfer equipment, such as the AMAT Endura series robotic arm. It mainly realizes precise speed and position control of the stepper motor, and drives the robotic arm to complete wafer grasping, transfer and other actions. The module supports subdivision control and real-time current regulation, which can reduce motor vibration and meet the strict requirements of semiconductor equipment for motion accuracy. It can directly ｒｅｐｌａｃｅ old drivers of the same model from the original factory without adjusting the equipment control logic.
2、 Key parameters
Applicable system: Priority adaptation to AMAT Endura series wafer transfer equipment, compatible with AMAT's similar stepper motor drive scenarios
Motor adaptation: Supports two-phase hybrid stepper motors with a rated current of 1.5A-3A and an adaptive motor step angle of 1.8 ° (minimum step angle after subdivision is 0.09 °)
Control mode: Pulse+direction signal control, supports 16 levels of subdivision (1-256 subdivision adjustable), pulse frequency ≤ 200kHz
Protection functions: overcurrent protection (triggered by 3.5A), over temperature protection (triggered by 85 ℃), under voltage protection (triggered by 18V DC), short circuit protection
Power requirement: DC 24V-48V wide voltage input, power consumption ≤ 30W (full load operation)
Physical dimensions: 100mm in length, 60mm in width, and 30mm in height. The installation holes are compatible with the original equipment bracket and fixed with screws (M3 specification)
Environmental adaptation: Working temperature -5 ℃ -65 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-3 standard
AMAT Applied Materials 0100-00003步進驅(qū)動器模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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