AMAT Applied Materials  0100-90708真空控制聯(lián)鎖 PCB 卡

1.產(chǎn) 品 資 料 介 紹：

AMAT Applied Materials  0100-90708真空控制聯(lián)鎖 PCB 卡 英文資料：

1、 Core positioning and system of the product

0100-90708 Vacuum Control Interlock PCB Card is a key control and safety protection component in the semiconductor equipment vacuum system of Applied Materials Company (AMAT), belonging to the "Vacuum System Intelligent Interlock Control" product line. In core processes such as wafer etching and thin film deposition that rely on high vacuum environments, the stability of vacuum degree and the reliability of cavity sealing directly determine the success or failure of the process and equipment safety. This PCB card serves as the "vacuum safety center" and is specifically adapted to the vacuum circuit of AMAT Centura and Endura series equipment. By integrating signals from vacuum gauges, valves, and other components, real-time monitoring and interlocking response are achieved. It is the core technical unit that ensures the safety and controllability of the entire process of vacuum system from rough and fine pumping to process maintenance.

2、 Analysis of core functions and technical characteristics

Based on the stringent requirements of semiconductor vacuum systems and industry standards for interlocking control, the core characteristics of this PCB card can be accurately disassembled into the following points:

Multi source vacuum signal integrated control: equipped with 12 high-precision analog/digital input channels, it can synchronously collect pressure signals of Pirani vacuum gauge (coarse vacuum monitoring) and capacitance film vacuum gauge (high vacuum monitoring) (measurement range covers 10 ?~10 ?? Pa), as well as switch status signals of isolation valves and pendulum valves. The signal sampling frequency is ≥ 1kHz, the response delay is ≤ 5ms, and millisecond level perception of vacuum parameters is achieved.

Intelligent interlocking logic execution: Built in programmable controller based on SIL 2 safety level, pre-set vacuum system exclusive interlocking logic - when the vacuum degree in the process chamber does not reach 10 ? Pa (process start-up threshold), it automatically locks the RF power supply and gas inlet valve; If there is a sudden leakage in the chamber (pressure surge ≥ 10Pa/s), triple protection can be triggered within 100ms: turn off the power supply of the molecular pump, open the front-end isolation valve, and start the nitrogen gas circuit to prevent air from entering the contaminated chamber.

Precise driving of vacuum valves: Integrated with 8 high-power relay output modules, it can directly drive various types of vacuum valves such as gate valves, angle valves, clock valves, etc. (supporting DC 24V/AC 220V driving voltage). The valve action response time is ≤ 200ms, and it has a valve jamming self detection function. When the valve does not complete the action according to the instructions, it will immediately trigger an alarm and cut off the power supply of the relevant process unit.

System collaboration and diagnostic function: equipped with dual communication interfaces of DeviceNet and RS-485, it can seamlessly connect to the AMAT equipment main control system and vacuum system monitoring platform, realizing real-time uploading and remote control of vacuum parameters; Built in LED status indicator and fault code output function can accurately locate 8 common problems such as vacuum gauge faults and valve drive circuit abnormalities, reducing maintenance time to less than 30 minutes.

 AMAT Applied Materials  0100-90708真空控制聯(lián)鎖 PCB 卡產(chǎn)品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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