AMAT Applied Materials 0100-00427互鎖模塊
1.產(chǎn) 品 資 料 介 紹：
- 多維度安全信號管控：集成至少 8 路數(shù)字 / 模擬輸入接口，可實時采集腔體門蓋狀態(tài)（閉合 / 開啟）、真空壓力（正常 / 泄漏）、工藝氣體流量（超標 / 正常）、腔體溫度（超限 / 合規(guī)）等關(guān)鍵參數(shù)，信號響應(yīng)延遲≤10ms，滿足高速工藝的安全防護需求。
- 聯(lián)鎖邏輯智能執(zhí)行：內(nèi)置可編程安全控制器（如基于 SIL 2 安全等級設(shè)計），預(yù)設(shè) MCVD 工藝專屬聯(lián)鎖邏輯 —— 當檢測到真空度低于 10?3Pa 或門蓋未鎖緊等異常時，可在 200ms 內(nèi)觸發(fā)三重保護：切斷腔體加熱電源、關(guān)閉氣體進氣閥門、啟動真空泄放回路。
- 工業(yè)級穩(wěn)定適配：采用 FR-4 環(huán)氧玻璃布基板與鍍金引腳設(shè)計，工作溫度范圍覆蓋 - 10~70℃，濕度耐受≤70% RH（無凝露），可適應(yīng)半導體潔凈車間（Class 100）的嚴苛環(huán)境，MTBF（平均無故障時間）≥50000 小時。
- 系統(tǒng)兼容與診斷功能：配備 DeviceNet 工業(yè)總線接口，可無縫接入 AMAT Centura Endura 等主設(shè)備控制系統(tǒng)，同時支持 LED 指示燈與上位機雙重診斷，可精準定位信號斷路、接口故障等問題，縮短維護時間。
AMAT Applied Materials 0100-00427互鎖模塊 英文資料：
1、 Core positioning and system of the product
0100-00427 interlock module is a key PCB component in the semiconductor equipment safety control system of Applied Materials Company (AMAT), belonging to the "Process Chamber Safety Interlock" product line. As the "logical center" of equipment safety protection, it is specifically adapted to core process units such as MCVD (Modified Chemical Vapor Deposition) chambers, and achieves risk prediction and emergency response by integrating multidimensional safety signals. It is the core protective component that ensures personnel safety, equipment integrity, and process stability in the semiconductor manufacturing process.
2、 Analysis of core functions and technical characteristics
Based on the industry standards for semiconductor safety interlocking and the application scenarios of this module, its core characteristics can be accurately defined as:
Multidimensional safety signal control: Integrated with at least 8 digital/analog input interfaces, it can real-time collect key parameters such as chamber door cover status (closed/open), vacuum pressure (normal/leakage), process gas flow rate (excessive/normal), chamber temperature (excessive/compliant), etc. The signal response delay is ≤ 10ms, meeting the safety protection requirements of high-speed processes.
Intelligent execution of interlocking logic: Built in programmable safety controller (such as based on SIL 2 safety level design), pre-set MCVD process exclusive interlocking logic - when detecting abnormalities such as vacuum degree below 10 ? Pa or door cover not being locked, triple protection can be triggered within 200ms: cutting off the heating power supply of the chamber, closing the gas inlet valve, and starting the vacuum relief circuit.
Industrial grade stable adaptation: using FR-4 epoxy glass cloth substrate and gold-plated pin design, the working temperature range covers -10~70 ℃, the humidity tolerance is ≤ 70% RH (no condensation), and it can adapt to the harsh environment of semiconductor cleanrooms (Class 100), with MTBF (mean time between failures) ≥ 50000 hours.
System compatibility and diagnostic function: Equipped with DeviceNet industrial bus interface, it can seamlessly connect to main equipment control systems such as AMAT Centura Endura. It also supports dual diagnosis of LED indicator lights and upper computer, which can accurately locate problems such as signal disconnection and interface faults, and shorten maintenance time.
AMAT Applied Materials 0100-00427互鎖模塊 產(chǎn)品展示
產(chǎn)品視頻
3.其他產(chǎn)品
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Schneider 140CPU67260 處理器模塊
GE CK11CE300 接觸器
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DSSB140 48980001-P Logic control card
DSTC175 57310001-KN Automation module
GRBTU 3BSE013175R1 base module
| 6ES5477-8EC11 | CACR-SR15BE13S | 5341852 |
| 6ES5470-7LC13 | CACR-SR06TZ9SMY02A | 3BHB005171R0101 |
| 6ES5470-7LC12 | CACR-PR30BC3AFY | 3HAB8101-19 DSQC545A |
| 6ES5470-7LB13 | CACR-SR05BB1BF | 6SC6101-2B-Z |
| 6ES5470-7LB12 | CONTROLLER | TSX3721101 |
| 6ES5470-7LA13 | CACR-SR03SB1AF | TSX07301012 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
