AMAT Applied Materials 50412411000控制器模塊
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
控制能力 | 支持 16 路模擬 I/O、32 路數(shù)字 I/O，可擴(kuò)展至 64 路數(shù)字 I/O |
運(yùn)算性能 | 64 位多核處理器，指令響應(yīng)時(shí)間≤0.5ms，支持多任務(wù)并行處理 |
協(xié)議兼容 | 支持 Profinet、EtherNet/IP、Modbus-TCP/RTU，通訊速率≤1Gbps |
環(huán)境適配 | -10-70℃、濕度＜85% 無冷凝、抗 EMI 干擾（EN 61000-6-2） |
安全特性 | SIL 3 認(rèn)證，集成過載、短路、過溫保護(hù)，符合 SEMI S2/S8 標(biāo)準(zhǔn) |
兼容性 | 兼容 AMAT 0010-13143 射頻模塊、0100-66025 控制模塊、0100-02839 機(jī)架組件 |
- 工藝全流程控制：接收分析輸入板（0100-11000）的工藝數(shù)據(jù)，下發(fā)指令至射頻模塊調(diào)節(jié)功率、氣缸組件（3020-00121）控制動(dòng)作，實(shí)現(xiàn)晶圓上載 - 工藝執(zhí)行 - 卸載的全自動(dòng)流程。
- 多子系統(tǒng)協(xié)同：聯(lián)動(dòng)射頻匹配組件（0041-78374）與模擬輸入模塊（0100-09063），動(dòng)態(tài)補(bǔ)償射頻反射功率，同步調(diào)節(jié)反應(yīng)腔溫度、壓力，保障等離子體穩(wěn)定性。
- 安全與故障管理：整合射頻互鎖模塊（0100-35565）、氣體泄漏檢測器信號(hào)，危險(xiǎn)場景下 0.03s 內(nèi)切斷關(guān)鍵動(dòng)力源，同時(shí)記錄故障數(shù)據(jù)用于溯源與預(yù)防性維護(hù)。
AMAT Applied Materials 50412411000控制器模塊 英文資料：
1、 Core positioning
AMAT 50412411000 is the "global control center" for semiconductor equipment, integrating multi protocol communication, process logic operations, and safety interlock management functions. It is responsible for integrating signals from RF modules (such as 0010-13143), sensors, and actuators to achieve sequential control of process flow and real-time monitoring of equipment status. It is suitable for Class 100 clean environments and high-frequency electromagnetic interference scenarios, ensuring efficient and stable operation of complex processes such as etching and deposition.
2、 Key parameters
Category
Specifications
Control ability
Supports 16 analog I/O, 32 digital I/O, expandable to 64 digital I/O
Computational performance
64 bit multi-core processor, instruction response time ≤ 0.5ms, supports multitasking parallel processing
Protocol compatibility
Supports Profinet, EtherNet/IP, Modbus TCP/RTU, communication speed ≤ 1Gbps
Environmental adaptation
-10-70 ℃, humidity<85%, no condensation, anti EMI interference (EN 61000-6-2)
Security features
SIL 3 certification, integrated overload, short circuit, and over temperature protection, compliant with SEMI S2/S8 standards
Compatibility
Compatible with AMAT 0010-13143 RF module, 0100-66025 control module, 0100-02839 rack components
3、 Core applications
Process full process control: Receive and analyze process data from the input board (0100-11000), issue instructions to the RF module to adjust power, and control the actions of the cylinder components (3020-00121), achieving a fully automated process of wafer loading, process execution, and unloading.
Multi subsystem collaboration: linking the RF matching component (0041-78374) with the analog input module (0100-09063), dynamically compensating for RF reflection power, synchronously adjusting reaction chamber temperature and pressure, and ensuring plasma stability.
Safety and Fault Management: Integrate RF interlock module (0100-35565) and gas leak detector signals, cut off critical power sources within 0.03 seconds in hazardous scenarios, and record fault data for traceability and preventive maintenance.
AMAT Applied Materials 50412411000控制器模塊 產(chǎn)品展示
產(chǎn)品視頻
3.其他產(chǎn)品
Elmo? G-TUB30/480FEHSNA2?1080-01355運(yùn)動(dòng)控制模塊
Elmo G-TUB30/480ERSS0? 伺服驅(qū)動(dòng)器
GE TB43225AF14 斷路器
4.其他英文產(chǎn)品
FOXBORO 0399143 SY-0301060R Industrial control card
SY-1025115C SY-1025120E Industrial control card
FOXBORO 0399144 SY-0301059F module
| 6ES5262-8MA12 | 6SC9811-2BE25 | 6DD2920-0AW6 |
| 6ES5261-4UA11 | 6SC9731-0GL0 | TOSHIBA UTNH23A |
| 6ES5256-3AA11 | CACR-SR20BE12M | TOSHIBA USIO21 |
| 6ES5252-5BB11 | 6SC6110-5DA00 | TRICONEX 3806 |
| 6ES5252-4DA11 | CACR-SR03AB1ER-V | TOSHIBA HFAS11**S |
| 6ES5252-4BA11-2EA1 | 6SC9811-4BC10 | TOSHIBA UTLH21 |
| 6ES5247-5AA31 | CACR-SR44BB1AMY114 | TRICONEX 3806E |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
