AMAT Applied Materials 0100-09063模擬輸入模塊
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
輸入通道 | 8 路差分模擬輸入，支持 0-5V/0-10V/4-20mA 信號(hào)類型 |
采集性能 | 18 位 ADC 分辨率，采集精度 ±0.02% FS，采樣率 10Hz-1kHz 可調(diào) |
信號(hào)處理 | 集成低通濾波（截止頻率 50Hz/100Hz 可選）、信號(hào)隔離（通道間隔離電壓≥1000V DC） |
環(huán)境適配 | -10-65℃、濕度＜85% 無冷凝、抗 EMI 干擾（EN 61000-6-2） |
安全特性 | 輸入過壓保護(hù)（≤36V DC）、過流保護(hù)（≤50mA） |
兼容性 | 兼容 AMAT 0100-66025 控制模塊、03-81830-00 PCB、0100-02839 機(jī)架組件 |
- 工藝參數(shù)采集：接收反應(yīng)腔溫度傳感器（如 Pt100）、真空壓力傳感器的模擬信號(hào)，轉(zhuǎn)換為數(shù)字信號(hào)傳輸至控制模塊，保障刻蝕 / 沉積工藝參數(shù)穩(wěn)定。
- 執(zhí)行器狀態(tài)反饋：采集氣缸（3020-00121）位置傳感器、氣體流量控制器（MFC）的模擬反饋信號(hào)，實(shí)時(shí)監(jiān)控執(zhí)行元件運(yùn)行狀態(tài)，避免動(dòng)作偏差。
- 設(shè)備健康監(jiān)測：采集射頻匹配組件（0041-78374）的電流 / 電壓模擬信號(hào)，分析信號(hào)波動(dòng)趨勢，提前預(yù)警組件性能衰減。
AMAT Applied Materials 0100-09063模擬輸入模塊 英文資料：
1、 Core positioning
AMAT 0100-09063 is an "analog signal acquisition hub" for semiconductor equipment electronic control systems, designed specifically for receiving analog signals from sensors such as temperature, pressure, and flow. Through built-in high-precision conditioning circuits, it achieves signal noise reduction, linearization processing, and standardized conversion, adapting to Class 100 clean environments and high-frequency electromagnetic interference scenarios, providing stable analog data support for equipment control and process monitoring.
2、 Key parameters
Category
Specifications
Input channel
8 differential analog inputs, supporting 0-5V/0-10V/4-20mA signal types
Collection performance
18 bit ADC resolution, acquisition accuracy ± 0.02% FS, sampling rate adjustable from 10Hz-1kHz
Signal processing
Integrated low-pass filtering (cut-off frequency 50Hz/100Hz optional), signal isolation (channel isolation voltage ≥ 1000V DC)
Environmental adaptation
-10-65 ℃, humidity<85%, no condensation, anti EMI interference (EN 61000-6-2)
Security features
Input overvoltage protection (≤ 36V DC), overcurrent protection (≤ 50mA)
Compatibility
Compatible with AMAT 0100-66025 control module, 03-81830-00 PCB, 0100-02839 rack components
3、 Core applications
Process parameter acquisition: Receive analog signals from reaction chamber temperature sensors (such as Pt100) and vacuum pressure sensors, convert them into digital signals, and transmit them to the control module to ensure stable etching/deposition process parameters.
Feedback on actuator status: Collect analog feedback signals from the cylinder (3020-00121) position sensor and gas flow controller (MFC), monitor the operating status of the actuator in real time, and avoid action deviation.
Equipment health monitoring: Collect current/voltage analog signals from RF matching components (0041-78374), analyze signal fluctuation trends, and provide early warning of component performance degradation.
AMAT Applied Materials 0100-09063模擬輸入模塊 產(chǎn)品展示
產(chǎn)品視頻
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| 6ES5420-7LA11 | CACR-PR03AE3ER | 6DD1843-0AB0 |
| 6ES5420-4UA14 | CACR-IR050505FC | 6AV30101DK00 |
| 6ES54201BA11 | CACR-SR30SB1AFY124 | 6DD1843-0AA0 |
| 6ES5405-7AB21 | CACR-HR05BAB12 | 6DD2920-3AW4 |
| 6ES5395-0UA11 | 6SC6180-0SG02 | 6DD2920-3AW3 |
| 6ES5393-0UA14 | CACR-CSL20DAAA, | 6ES5375-0LC41 |
| 6ES5382-0AA31 | 6SC6506-4AA02 | 6DD2920-3AW2 |
| 6ES5377-0BB41 | 6SC6108-0SE02 | 6ES5374-2AH21 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
