AMAT Applied Materials 0100-11000分析輸入板
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
信號輸入 | 12 路模擬輸入（0-10V/4-20mA）、8 路數(shù)字輸入（24V DC） |
采集精度 | 模擬輸入 ±0.05% FS，采樣率≤1kHz |
信號處理 | 集成 16 位 ADC 轉(zhuǎn)換器，支持?jǐn)?shù)字濾波、信號放大（增益 1-100 可調(diào)） |
環(huán)境適配 | -5-60℃、濕度＜80%、抗 EMI 干擾（EN 61000-6-2） |
安全特性 | 輸入過壓保護(hù)（≤30V DC）、反接保護(hù) |
兼容性 | 兼容 AMAT 0100-66025 控制模塊、03-81830-00 PCB、0190-09445 檢測器 |
- 分析設(shè)備數(shù)據(jù)采集：接收晶圓成分分析質(zhì)譜儀的離子信號、薄膜厚度檢測光譜儀的光強(qiáng)信號，轉(zhuǎn)換為標(biāo)準(zhǔn)數(shù)據(jù)傳輸至控制模塊。
- 工藝環(huán)境監(jiān)測：采集反應(yīng)腔溫度、真空壓力、氣體濃度傳感器信號，實時反饋工藝環(huán)境狀態(tài)，輔助控制模塊優(yōu)化參數(shù)。
- 故障診斷數(shù)據(jù)支撐：記錄設(shè)備運行中的關(guān)鍵信號波動（如射頻功率反饋、電流信號），為設(shè)備故障溯源與預(yù)防性維護(hù)提供數(shù)據(jù)依據(jù)。
- 安裝：適配 0100-02839 機(jī)架組件標(biāo)準(zhǔn)卡槽，信號線采用雙絞屏蔽線（單端接地，接地電阻≤0.5Ω），遠(yuǎn)離射頻模塊與高壓部件。
- 維護(hù)：每 3 個月清潔金手指與接線端子（用異丙醇無塵布）；每 6 個月校準(zhǔn)采集精度（使用標(biāo)準(zhǔn)信號源）；故障優(yōu)先排查輸入信號短路、濾波電容老化。
- 采購：優(yōu)先選原廠供應(yīng)商（如長欣自動化、賽米卡爾電子），到貨驗證 ADC 轉(zhuǎn)換精度報告、信號兼容性測試報告，確保適配現(xiàn)有分析設(shè)備。
AMAT Applied Materials 0100-11000分析輸入板 英文資料：
1、 Core positioning
AMAT 0100-11000 is the "data acquisition core" of semiconductor equipment analysis and detection systems, designed specifically for high-precision reception of analog/digital signals from mass spectrometers, spectrometers, and sensors (such as temperature and pressure). Through built-in signal conditioning circuits, it achieves data noise reduction, amplification, and standardization conversion, adapts to Class 10 clean environments and low signal interference requirements, and provides precise data support for process analysis and quality control.
2、 Key parameters
Category
Specifications
Signal input
12 analog inputs (0-10V/4-20mA), 8 digital inputs (24V DC)
Collection accuracy
Analog input ± 0.05% FS, sampling rate ≤ 1kHz
Signal processing
Integrated 16 bit ADC converter, supporting digital filtering and signal amplification (gain adjustable from 1-100)
Environmental adaptation
-5-60 ℃, humidity<80%, anti EMI interference (EN 61000-6-2)
Security features
Input overvoltage protection (≤ 30V DC), reverse connection protection
Compatibility
Compatible with AMAT 0100-66025 control module, 03-81830-00 PCB, 0190-09445 detector
3、 Core applications
Analysis equipment data collection: Receive ion signals from wafer composition analysis mass spectrometer and light intensity signals from thin film thickness detection spectrometer, convert them into standard data, and transmit them to the control module.
Process environment monitoring: Collect signals from reaction chamber temperature, vacuum pressure, and gas concentration sensors, provide real-time feedback on the process environment status, and assist the control module in optimizing parameters.
Fault diagnosis data support: Record key signal fluctuations during equipment operation (such as RF power feedback and current signals), providing data basis for equipment fault tracing and preventive maintenance.
4、 Key points of operation and maintenance
Installation: Compatible with the 0100-02839 rack component standard card slot, the signal line adopts twisted pair shielded wire (single end grounded, grounding resistance ≤ 0.5 Ω), away from the RF module and high-voltage components.
Maintenance: Clean the gold fingers and wiring terminals every 3 months (using isopropanol dust-free cloth); Calibrate the collection accuracy every 6 months (using a standard signal source); Prioritize troubleshooting for input signal short circuits and aging filtering capacitors.
Procurement: Prioritize the selection of original suppliers (such as Changxin Automation and Semicar Electronics), verify the ADC conversion accuracy report and signal compatibility test report upon arrival, and ensure compatibility with existing analytical equipment.
AMAT Applied Materials 0100-11000分析輸入板 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
