AMAT Applied Materials 0100-66025控制模塊
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
控制能力 | 支持 8 路模擬量輸入、6 路模擬量輸出、16 路數(shù)字 I/O |
運算性能 | 32 位處理器，指令響應時間≤1ms |
協(xié)議兼容 | 支持 Modbus-RTU、Profinet、EtherNet/IP |
環(huán)境適配 | -10-65℃、濕度＜85%、抗 EMI 干擾（EN 61000-6-2） |
安全特性 | 集成過載保護、短路保護，符合 SEMI S2/S8 標準 |
兼容性 | 兼容 AMAT 03-81830-00 PCB、0100-00985 智能接口板、0190-09445 檢測器 |
- 工藝參數(shù)管控：接收等離子弧電流板（0100-90642）、壓力傳感器數(shù)據(jù)，動態(tài)調節(jié)射頻匹配組件（0041-78374）功率，穩(wěn)定等離子體密度。
- 執(zhí)行器協(xié)同控制：聯(lián)動氣缸（3020-00121）、氣動閥，實現(xiàn)晶圓載臺定位、工藝腔門啟閉的時序化動作，保障自動化流程連貫。
- 安全聯(lián)鎖響應：接入射頻互鎖模塊（0100-35565）、氣體泄漏檢測器信號，危險場景下 0.5s 內(nèi)切斷動力源并觸發(fā)報警。
- 安裝：適配 0100-02839 機架組件標準插槽，電源線采用雙絞屏蔽線，接地電阻≤0.5Ω，與射頻模塊間距≥20cm。
- 維護：每 3 個月備份控制程序與參數(shù)；每 6 個月校準模擬量輸入 / 輸出精度；故障優(yōu)先排查通訊協(xié)議地址沖突或接線端子虛接。
- 采購：優(yōu)先選原廠供應商（如長欣自動化、賽米卡爾電子），到貨驗證功能測試報告與 SEMI 安全認證，確保兼容設備現(xiàn)有系統(tǒng)。
AMAT Applied Materials 0100-66025控制模塊 英文資料：
1、 Core positioning
AMAT 0100-66025 is the "process control center" for semiconductor equipment, responsible for integrating sensor data (such as temperature and pressure), actuator instructions (such as valves and motors), and safety interlock signals. It achieves real-time adjustment of process parameters and equipment safety control through built-in control algorithms, adapts to Class 100 clean environments and high-frequency electromagnetic interference scenarios, and ensures stable operation of processes such as etching and deposition.
2、 Key parameters
Category
Specifications
Control ability
Supports 8 analog inputs, 6 analog outputs, and 16 digital I/O channels
Computational performance
32-bit processor, instruction response time ≤ 1ms
Protocol compatibility
Supports Modbus RTU, Profinet, EtherNet/IP
Environmental adaptation
-10-65 ℃, humidity<85%, anti EMI interference (EN 61000-6-2)
Security features
Integrated overload protection and short circuit protection, compliant with SEMI S2/S8 standard
Compatibility
Compatible with AMAT 03-81830-00 PCB, 0100-00985 intelligent interface board, 0190-09445 detector
3、 Core applications
Process parameter control: Receive data from plasma arc current plate (0100-90642) and pressure sensor, dynamically adjust the power of RF matching component (0041-78374), and stabilize plasma density.
Collaborative control of actuators: linked cylinders (3020-00121) and pneumatic valves are used to achieve sequential actions of wafer stage positioning and process chamber door opening and closing, ensuring the continuity of automated processes.
Safety interlock response: Connect the RF interlock module (0100-35565) and gas leak detector signal, cut off the power source and trigger an alarm within 0.5 seconds in hazardous scenarios.
4、 Key points of operation and maintenance
Installation: Compatible with the standard slot of the 0100-02839 rack component, the power cord uses twisted pair shielded wire, the grounding resistance is ≤ 0.5 Ω, and the distance from the RF module is ≥ 20cm
Maintenance: Backup control programs and parameters every 3 months; Calibrate analog input/output accuracy every 6 months; Prioritize troubleshooting for communication protocol address conflicts or loose wiring terminals.
Procurement: Prioritize the selection of original suppliers (such as Changxin Automation and Semicar Electronics), provide functional testing reports and SEMI safety certifications upon arrival to ensure compatibility with existing equipment systems.
AMAT Applied Materials 0100-66025控制模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
