AMAT Applied Materials 0100-35565射頻互鎖模塊
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
監(jiān)測范圍 | 射頻功率 0-2000W、泄漏閾值 ≤5mW/cm2 |
響應(yīng)速度 | ≤0.05s |
安全等級 | SIL 2 認(rèn)證、符合 SEMI S8 標(biāo)準(zhǔn) |
環(huán)境適配 | -5-65℃、IP65、耐射頻干擾 |
兼容性 | 兼容 AMAT 0041-78374 射頻匹配組件、0190-09445 檢測器 |
- 射頻安全防護(hù)：監(jiān)測刻蝕機(jī)射頻接頭密封性，泄漏時(shí)立即切斷電源，防止人員灼傷。
- 工藝聯(lián)鎖控制：與腔室真空傳感器聯(lián)動(dòng)，真空不達(dá)標(biāo)時(shí)禁止射頻啟動(dòng)，避免等離子體異常。
- 維護(hù)安全管控：維護(hù)人員打開射頻柜時(shí)，自動(dòng)鎖定射頻輸出，防止誤觸觸電。
- 安裝：緊貼射頻通路安裝，屏蔽線單端接地（≤0.5Ω），與高壓部件間距≥20cm。
- 維護(hù)：每月校準(zhǔn)泄漏檢測閾值，每 6 個(gè)月檢查接線端子，故障優(yōu)先排查傳感器信號通路。
- 采購：優(yōu)先選原廠供應(yīng)商（如賽米卡爾電子），到貨驗(yàn)證 SIL 認(rèn)證與射頻兼容性報(bào)告。
AMAT Applied Materials 0100-35565射頻互鎖模塊 英文資料：
1、 Core positioning
AMAT 0100-35565 is a "safety protection hub" for semiconductor RF systems, dedicated to monitoring the status of RF paths (such as loose connectors, abnormal power). Once a danger signal is triggered (such as RF leakage, unauthorized operation), the RF power supply will be cut off within 0.05 seconds, and it is compatible with Class 100 clean environments and the mainstream RF frequency band of 13.56MHz.
2、 Key parameters
Category
Specifications
Monitoring scope
RF power 0-2000W, leakage threshold ≤ 5mW/cm 2
Response speed
≤0.05s
Security level
SIL 2 certification, compliant with SEMI S8 standard
Environmental adaptation
-5-65 ℃ IP65、 Resistant to radio frequency interference
Compatibility
Compatible with AMAT 0041-78374 RF matching components and 0190-09445 detector
3、 Core applications
RF safety protection: Monitor the sealing of the RF connector of the etching machine, cut off the power immediately in case of leakage, and prevent personnel from being burned.
Process interlocking control: linked with the chamber vacuum sensor, RF startup is prohibited when the vacuum does not meet the standard to avoid plasma abnormalities.
Maintain safety control: When maintenance personnel open the RF cabinet, the RF output is automatically locked to prevent accidental electric shock.
4、 Key points of operation and maintenance
Installation: Install in close proximity to the RF path, with shielded wire grounded at one end (≤ 0.5 Ω), and a distance of ≥ 20cm from high-voltage components
Maintenance: Calibrate the leakage detection threshold every month, check the wiring terminals every 6 months, and prioritize troubleshooting the sensor signal path for faults.
Procurement: Prioritize selecting original suppliers (such as Semicar Electronics), and verify SIL certification and RF compatibility reports upon arrival.
5、 Technical value
Millisecond level response blocks RF hazards, SIL 2 ensures personnel and equipment safety, is compatible with multiple RF components, and reduces the difficulty of system safety upgrades.
AMAT Applied Materials 0100-35565射頻互鎖模塊 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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