AMAT Applied Materials 0100-90642等離子弧電流板
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
電流范圍 | 0-500A（支持 0-100A/0-300A 分檔） |
調(diào)節(jié)精度 | ±0.2% FS |
響應(yīng)速度 | ≤50μs |
保護功能 | 過流保護（跳閘閾值 1.2 倍額定電流） |
環(huán)境適配 | -10-65℃、IP64、耐 HF/Cl? 腐蝕 |
兼容性 | 兼容 AMAT 0041-78374 射頻匹配組件、0225-01622 控制器 |
- 等離子體工藝管控：調(diào)節(jié)刻蝕機反應(yīng)腔等離子弧電流，穩(wěn)定等離子體密度，保障刻蝕圖形精度。
- 設(shè)備安全防護：檢測電流異常（如短路、過載），0.1s 內(nèi)切斷供電，避免射頻電源損壞。
- 數(shù)據(jù)反饋聯(lián)動：將電流數(shù)據(jù)傳輸至控制器，配合壓力 / 溫度傳感器動態(tài)優(yōu)化工藝參數(shù)。
- 安裝：固定于電控柜屏蔽區(qū)，接線端子緊固扭矩 1.5-2N?m，接地電阻 ≤0.5Ω。
- 維護：每 3 個月清潔接線端子，每 6 個月校準(zhǔn)電流精度，故障優(yōu)先排查采樣電阻 / 濾波電容。
- 采購：優(yōu)先選擇原廠供應(yīng)商（如長欣自動化），到貨驗證精度報告與序列號溯源。
AMAT Applied Materials 0100-90642等離子弧電流板 英文資料：
1、 Core positioning
AMAT 0100-90642 is the "current control core" of semiconductor plasma processes, responsible for real-time acquisition, precise adjustment, and overcurrent protection of plasma arc current, ensuring stable plasma density in etching/deposition processes, and adapting to Class 100 clean environments and high-frequency electromagnetic interference scenarios.
2、 Key parameters
Category
Specifications
Current range
0-500A (supports 0-100A/0-300A grading)
Adjustment accuracy
±0.2% FS
Response speed
≤50μs
Protection function
Overcurrent protection (trip threshold 1.2 times rated current)
Environmental adaptation
-10-65 ℃ IP64、 Resistant to HF/Cl ? corrosion
Compatibility
Compatible with AMAT 0041-78374 RF matching components and 0225-01622 controller
3、 Core applications
Plasma process control: Adjust the plasma arc current in the reaction chamber of the etching machine, stabilize the plasma density, and ensure the accuracy of the etching pattern.
Equipment safety protection: detect abnormal current (such as short circuit, overload), cut off power supply within 0.1 seconds to avoid damage to the RF power supply.
Data feedback linkage: Transmit current data to the controller and dynamically optimize process parameters in conjunction with pressure/temperature sensors.
4、 Key points of operation and maintenance
Installation: Fixed in the shielding area of the electrical control cabinet, with a tightening torque of 1.5-2N · m for the wiring terminals and a grounding resistance of ≤ 0.5 Ω.
Maintenance: Clean the wiring terminals every 3 months, calibrate the current accuracy every 6 months, and prioritize troubleshooting sampling resistors/filtering capacitors for faults.
Procurement: Prioritize the selection of original suppliers (such as Changxin Automation), and verify the accuracy report and serial number traceability upon arrival.
5、 Technical value
High precision current regulation ensures process yield, overcurrent protection reduces equipment failure rate, compatibility with multiple systems reduces modification costs, and meets process requirements of 14nm and below.
AMAT Applied Materials 0100-90642等離子弧電流板 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
