AMAT Applied Materials 0100-71261互鎖板
1.產(chǎn) 品 資 料 介 紹：
類別 | 規(guī)格 |
信號處理 | 8 路安全輸入（24V DC）、4 路安全輸出 |
響應速度 | ≤0.1s |
安全等級 | SIL 2 認證 |
環(huán)境適配 | -10-60℃、IP65、耐 HF/Cl? |
兼容性 | 兼容 AMAT 0225-01622 控制器、0100-20001 接口模塊 |
- 設(shè)備安全防護：控制刻蝕機 / 沉積設(shè)備的電控柜門、工藝艙門，未閉合則切斷射頻電源。
- 危險預警聯(lián)動：接入氣體泄漏檢測器，泄漏時立即停工藝、開排風。
- 人機安全：配合安全光柵，人員進入危險區(qū)域時，暫停晶圓傳送機器人。
- 安裝：固定于電控柜 DIN 導軌，屏蔽線單端接地（≤0.5Ω），與高壓模塊間距≥30cm。
- 維護：每月檢查接線端子，每 6 個月校準信號響應時間，故障優(yōu)先排查輸入信號短路 / 虛接。
- 采購：優(yōu)先選原廠供應商（如長欣自動化），到貨驗證 SIL 認證與序列號溯源。
AMAT Applied Materials 0100-71261互鎖板 英文資料：
1、 Core positioning
The AMAT 0100-71261 interlock board is the "core logic unit" for semiconductor equipment safety protection, responsible for integrating safety signals such as cabinet door switches, gratings, gas leak detectors, etc. When unauthorized operations or dangerous states are detected (such as cabinet doors not closed, gas leaks), the high voltage/power source is cut off within 0.1 seconds, and an alarm is triggered, adapting to Class 100 clean environments and corrosive process scenarios.
2、 Key parameters
Category
Specifications
Signal processing
8 safety inputs (24V DC), 4 safety outputs
Response speed
≤0.1s
Security level
SIL 2 certification
Environmental adaptation
-10-60 ℃ IP65、 Resistant to HF/Cl ?
Compatibility
Compatible with AMAT 0225-01622 controller and 0100-20001 interface module
3、 Core applications
Equipment safety protection: Control the electrical control cabinet door and process cabin door of the etching machine/deposition equipment. If they are not closed, cut off the RF power supply.
Hazard warning linkage: Connect the gas leak detector, immediately stop the process and start the exhaust when there is a leak.
Human machine safety: In conjunction with safety barriers, suspend the wafer transfer robot when personnel enter hazardous areas.
4、 Key points of operation and maintenance
Installation: Fixed to the DIN rail of the electrical control cabinet, with shielded wire grounded at one end (≤ 0.5 Ω), and a distance of ≥ 30cm from the high-voltage module
Maintenance: Check the wiring terminals monthly, calibrate the signal response time every 6 months, and prioritize troubleshooting input signal short circuits/virtual connections.
Procurement: Prioritize selecting original suppliers (such as Changxin Automation), and verify SIL certification and serial number traceability upon arrival.
5、 Technical value
SIL 2 level and rapid response ensure that equipment has no safety accidents, modular design reduces failure points, is compatible with multiple device systems, and reduces renovation costs.
AMAT Applied Materials 0100-71261互鎖板 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
