AMAT Applied Materials 0190-48891雙絲熱離子計(jì)
1.產(chǎn) 品 資 料 介 紹：
AMAT Applied Materials 0190-48891 雙絲熱離子計(jì)
核心功能
技術(shù)特點(diǎn)
典型應(yīng)用
AMAT Applied Materials 0190-48891雙絲熱離子計(jì) 英文資料：
AMAT Applied Materials 0190-48891 Double Wire Thermoionizer
AMAT 0190-48891 is a high-precision vacuum measuring instrument designed specifically for semiconductor manufacturing equipment. It adopts the thermal ion emission principle of dual lamp wire structure and is used to accurately monitor high vacuum environmental pressure, ensuring process stability and safe operation of equipment.
core functionality
Wide range measurement: can cover a pressure range from 10 ?3 to 10 ?11 Torr
Dual filament design: automatically switches to the backup filament when the main filament fails, improving system availability
Quick response: adopting optimized structural design to achieve rapid detection of pressure changes
Stable output: Provides linear analog signal output for easy data acquisition and control
Self protection: equipped with filament overcurrent and overheat protection functions, extending service life
Technical Features
Measurement principle: Hot cathode ionization vacuum gauge (hot ion gauge)
Filament material: high-purity tungsten wire or rhenium tungsten alloy, resistant to high temperature and sputtering
Signal output: 0-10V analog signal or standard digital communication interface
Control mode: Supports remote control and status monitoring
Installation form: CF or KF vacuum flange interface, convenient for system integration
Working temperature: 0-50 ° C, relative humidity 10-80%
Typical Applications
Etching equipment: monitoring the high vacuum state of the reaction chamber
Deposition system: ensuring a stable vacuum environment for thin film growth
Ion implantation machine: controlling the vacuum quality of the beamline
Testing instruments: ensure high vacuum requirements for the analysis environment
Vacuum system: monitoring the process of obtaining and maintaining vacuum
AMAT Applied Materials 0190-48891雙絲熱離子計(jì) 產(chǎn)品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
