AMAT Applied Materials 0010-26029電源匹配組件
1.產(chǎn) 品 資 料 介 紹：
- 寬幅電壓調(diào)節(jié)范圍：支持輸入電壓 100-240V AC（50/60Hz）寬幅適配，可兼容全球不同地區(qū)的電網(wǎng)電壓標(biāo)準(zhǔn)，無(wú)需額外配置電壓轉(zhuǎn)換器；輸出電壓可根據(jù)設(shè)備模塊需求精準(zhǔn)調(diào)節(jié)，涵蓋 3.3V DC、5V DC、12V DC、24V DC 等常用工業(yè)級(jí)電壓檔位，輸出電壓精度達(dá) ±0.5%，確保半導(dǎo)體設(shè)備敏感元器件（如傳感器、控制芯片）獲得穩(wěn)定供電，避免因電壓波動(dòng)導(dǎo)致的設(shè)備性能偏差。
- 多通道獨(dú)立供電設(shè)計(jì)：具備 4-8 路獨(dú)立輸出通道（具體依型號(hào)配置），每路通道可單獨(dú)設(shè)定輸出電流（最大單路電流支持 10A），且通道間隔離度≥2500V AC，能同時(shí)為設(shè)備的控制系統(tǒng)（如 PLC）、執(zhí)行機(jī)構(gòu)（如電磁閥）、監(jiān)測(cè)模塊（如溫度傳感器）等不同負(fù)載供電，避免單一模塊故障影響其他通道供電，提升設(shè)備整體供電可靠性。
- 動(dòng)態(tài)負(fù)載響應(yīng)能力：采用高頻開(kāi)關(guān)電源架構(gòu)，負(fù)載調(diào)整率≤0.2%，當(dāng)半導(dǎo)體設(shè)備負(fù)載在 0-100% 范圍內(nèi)動(dòng)態(tài)變化時(shí)（如機(jī)械臂啟停、加熱腔功率調(diào)節(jié)），輸出電壓波動(dòng)可控制在 50mV 以內(nèi)；同時(shí)具備快速響應(yīng)能力（響應(yīng)時(shí)間≤50μs），能瞬間補(bǔ)償負(fù)載突變帶來(lái)的電壓跌落，保障設(shè)備核心模塊（如工藝控制單元）供電不中斷，避免制程中斷導(dǎo)致的晶圓報(bào)廢。
- 多重電氣安全保護(hù)：集成過(guò)電壓、過(guò)電流、過(guò)載、短路、過(guò)溫五重保護(hù)功能。當(dāng)輸出電壓超過(guò)額定值 120% 時(shí)，過(guò)電壓保護(hù)模塊立即切斷輸出；輸出電流超過(guò)額定值 150% 或負(fù)載短路時(shí)，短路保護(hù)快速觸發(fā)（響應(yīng)時(shí)間≤10μs），防止損壞電源組件與下游設(shè)備；同時(shí)內(nèi)置溫度監(jiān)測(cè)傳感器，當(dāng)組件內(nèi)部溫度超過(guò) 85℃時(shí)，自動(dòng)啟動(dòng)過(guò)熱保護(hù)，避免元器件燒毀，保障設(shè)備運(yùn)行安全。
- 絕緣與接地保護(hù)：輸入與輸出之間絕緣電阻≥100MΩ，絕緣強(qiáng)度達(dá) 3000V AC/1min，有效防止漏電事故發(fā)生；配備獨(dú)立接地端子，接地電阻≤1Ω，可快速釋放靜電與漏電流，避免靜電擊穿半導(dǎo)體設(shè)備中的精密芯片（如 FPGA、MCU），同時(shí)符合 SEMI S2 半導(dǎo)體設(shè)備安全標(biāo)準(zhǔn)，滿足潔凈車間電氣安全規(guī)范。
AMAT Applied Materials 0010-26029電源匹配組件 英文資料：
1、 High precision power supply adaptation: meets the multi module power supply needs of semiconductor equipment
As the "power regulation center" of semiconductor equipment, this power matching component has precise voltage and current adaptation capabilities as its core, meeting the differentiated power supply needs of different functional modules of the equipment:
Wide range voltage regulation: Supports wide range adaptation of input voltage 100-240V AC (50/60Hz), compatible with grid voltage standards in different regions around the world, without the need for additional voltage converters; The output voltage can be precisely adjusted according to the requirements of the device module, covering commonly used industrial grade voltage levels such as 3.3V DC, 5V DC, 12V DC, 24V DC, etc. The output voltage accuracy reaches ± 0.5%, ensuring stable power supply for sensitive components of semiconductor devices (such as sensors and control chips) and avoiding equipment performance deviations caused by voltage fluctuations.
Multi channel independent power supply design: it has 4-8 independent output channels (configured according to the model), each channel can set the output current independently (the maximum single channel current supports 10A), and the isolation between channels is ≥ 2500V AC, which can simultaneously supply power to different loads such as the equipment control system (such as PLC), actuator (such as solenoid valve), monitoring module (such as temperature sensor), so as to avoid the failure of a single module affecting the power supply of other channels, and improve the overall power supply reliability of the equipment.
Dynamic load response capability: Adopting a high-frequency switching power supply architecture, the load adjustment rate is ≤ 0.2%. When the load of the semiconductor equipment dynamically changes within the range of 0-100% (such as the start stop of the robotic arm and the power adjustment of the heating chamber), the output voltage fluctuation can be controlled within 50mV; Simultaneously possessing fast response capability (response time ≤ 50 μ s), it can instantly compensate for voltage drops caused by sudden load changes, ensuring uninterrupted power supply to equipment core modules (such as process control units) and avoiding wafer scrap caused by process interruptions.
2、 Comprehensive security protection: ensuring the power supply safety of semiconductor equipment
In response to the high-value and high-risk operating characteristics of semiconductor equipment, the power matching component has undergone multiple optimizations in safety protection to reduce the risk of power supply failures
Multiple electrical safety protection: integrated with five protection functions including overvoltage, overcurrent, overload, short circuit, and over temperature. When the output voltage exceeds 120% of the rated value, the overvoltage protection module immediately cuts off the output; When the output current exceeds 150% of the rated value or the load is short circuited, the short-circuit protection is triggered quickly (response time ≤ 10 μ s) to prevent damage to the power components and downstream equipment; At the same time, it is equipped with a temperature monitoring sensor, which automatically activates overheating protection when the internal temperature of the component exceeds 85 ℃, avoiding component burnout and ensuring the safe operation of the equipment.
Insulation and grounding protection: The insulation resistance between input and output is ≥ 100M Ω, and the insulation strength reaches 3000V AC/1min, effectively preventing leakage accidents; Equipped with an independent grounding terminal with a grounding resistance of ≤ 1 Ω, it can quickly release static electricity and leakage current, avoiding electrostatic breakdown of precision chips (such as FPGA and MCU) in semiconductor equipment
AMAT Applied Materials 0010-26029電源匹配組件 產(chǎn)品展示
產(chǎn)品視頻
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| 710-658669-00 | 8005-MP-24 | 4136J54G4 |
| 710-658363-20 | 8005-LTV-101 | 4136J56-G1 |
| 710-658340-20 | 8005-LTC-101 | 8030-DLM-110 |
| 710-658232-20 | 8005-LNV-101 | 8030-DIM-101 |
| 710-658232-00 | 8005-EPS-51 | 8030-CRM-931 |
| 710-658172-20 | 8005-EPS-50 | 8030-CRM-720 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
